Granted Patent B2

US 11,289,307 · App. 16/935,600 · Granted Mar 29, 2022

Inventor: Imran Ahmed Bhutta (Moorestown, NJ)

H01J37/32183H01L21/02274H01L21/28556H01L21/31116H01L21/31138H01L21/32136H01L21/67069H03H7/38H03H7/40H01J2237/332H01J2237/334

Abstract

Claims (63)

1. An impedance matching network comprising:

an RF input configured to operably couple to an RF source;

an RF output configured to operably couple to a plasma chamber;

an electronically variable reactance element (EVRE) comprising discrete reactance elements and corresponding switches, the EVRE having different positions for providing different reactances, wherein each switch is configured to switch in and out one of the discrete reactance elements to provide the different positions of the EVRE; and

a control circuit configured to carry out the operations of:

determining a parameter related to the matching network or plasma chamber;

for the determined parameter, determining potential new positions for the EVRE, the potential new positions having differing effectiveness in causing an impedance match between the RF source and the plasma chamber;

determining which of the discrete reactance elements of the EVRE are currently restricted from switching;

determining a preferred position for the EVRE, the preferred position being a one of the potential new positions that provides greatest effectiveness in providing an impedance match while also not requiring switching in or out of any of the discrete reactance elements that are currently restricted from switching; and

altering the EVRE to the preferred position.

2. The matching network of claim 1 wherein the determination of which of the discrete reactance elements of the EVRE are currently restricted from switching is based on whether any of the discrete reactance elements has previously switched a predetermined number of times in a predetermined period of time.

3. The matching network of claim 1 :

wherein the matching network further comprises a second EVRE, the second EVRE also having discrete reactance elements currently restricted from switching; and

wherein each of the potential new positions for the EVRE comprises a combination of a potential new position for the EVRE and a potential new position for the second EVRE.

4. The matching network of claim 1 wherein the preferred position must further have a threshold effectiveness in providing an impedance match.

5. The matching network of claim 4 wherein it is determined whether a potential position has the threshold effectiveness in providing an impedance match by determining whether the potential position will cause, in view of the determined parameter, a reflection parameter to exceed a predetermined limit.

6. The matching network of claim 5 wherein the reflection parameter is an input reflection coefficient or a reflected power.

7. The matching network of claim 1 wherein, from the potential new positions for the EVRE, the preferred position providing the greatest effectiveness is determined by calculating, for each of the potential new positions, a reflection parameter, the calculation of the reflection parameter being based on the determined parameter and the potential new position.

8. The matching network of claim 7 wherein the potential new positions for the EVRE are ranked in order of effectiveness based on the calculated reflection parameter.

9. A semiconductor processing tool comprising:

a plasma chamber configured to deposit a material onto a substrate or etch a material from the substrate; and

an impedance matching network comprising:

an RF input configured to operably couple to an RF source;

an RF output configured to operably couple to the plasma chamber;

an electronically variable reactance element (EVRE) comprising discrete reactance elements and corresponding switches, the EVRE having different positions for providing different reactances, wherein each switch is configured to switch in and out one of the discrete reactance elements to provide the different positions of the EVRE; and

a control circuit configured to carry out the operations of:

determining a parameter related to the matching network or plasma chamber;

for the determined parameter, determining potential new positions for the EVRE, the potential new positions having differing effectiveness in causing an impedance match between the RF source and the plasma chamber;

determining which of the discrete reactance elements of the EVRE are currently restricted from switching;

determining a preferred position for the EVRE, the preferred position being a one of the potential new positions that provides greatest effectiveness in providing an impedance match while also not requiring switching in or out of any of the discrete reactance elements that are currently restricted from switching; and

altering the EVRE to the preferred position.

10. A method of matching an impedance, the method comprising:

operably coupling an impedance matching network between a radio frequency (RF) source and a plasma chamber, the matching network comprising:

an RF input configured to operably couple to the RF source;

an RF output configured to operably couple to the plasma chamber; and

an electronically variable reactance element (EVRE) comprising discrete reactance elements and corresponding switches, the EVRE having different positions for providing different reactances, wherein each switch is configured to switch in and out one of the discrete reactance elements to provide the different positions of the EVRE;

determining a parameter related to the matching network or plasma chamber;

for the determined parameter, determining potential new positions for the EVRE, the potential new positions having differing effectiveness in causing an impedance match between the RF source and the plasma chamber;

determining which of the discrete reactance elements of the EVRE are currently restricted from switching;

determining a preferred position for the EVRE, the preferred position being a one of the potential new positions that provides greatest effectiveness in providing an impedance match while also not requiring switching in or out of any of the discrete reactance elements that are currently restricted from switching; and

altering the EVRE to the preferred position.

11. The method of claim 10 :

wherein the matching network further comprises a second EVRE, the second EVRE also having discrete reactance elements currently restricted from switching; and

wherein each of the potential new positions for the EVRE comprises a combination of a potential new position for the EVRE and a potential new position for the second EVRE.

12. The method of claim 10 wherein the EVRE is an electronically variable capacitor (EVC), the discrete reactance elements are discrete capacitors of the EVC, and the different reactances are different capacitances.

13. The method of claim 10 wherein the preferred position must further have a threshold effectiveness in providing an impedance match.

14. The method of claim 13 wherein it is determined whether a potential position has the threshold effectiveness in providing an impedance match by determining whether the potential position will cause, in view of the determined parameter, a reflection parameter to exceed a predetermined limit.

15. The method of claim 14 wherein the reflection parameter is an input reflection coefficient or a reflected power.

16. The method of claim 10 wherein, from the potential new positions for the EVRE, the preferred position providing the greatest effectiveness is determined by calculating, for each of the potential new positions, a reflection parameter, the calculation of the reflection parameter being based on the determined parameter and the potential new position.

17. The method of claim 16 wherein the potential new positions for the EVRE are ranked in order of effectiveness based on the calculated reflection parameter.

18. The method of claim 10 wherein the determination of which of the discrete reactance elements of the EVRE are currently restricted from switching is based on whether any of the discrete reactance elements has previously switched a predetermined number of times in a predetermined period of time.

19. The method of claim 10 wherein the determination of which of the discrete reactance elements of the EVRE are currently restricted from switching is further based on whether a predetermined cooling off period has elapsed.

20. A method of manufacturing a semiconductor, the method comprising:

placing a substrate in a plasma chamber configured to deposit a material layer onto the substrate or etch a material layer from the substrate;

operably coupling an impedance matching network between an RF source and the plasma chamber, the matching network comprising:

an RF input configured to operably couple to the RF source;

an RF output configured to operably couple to the plasma chamber; and

an electronically variable reactance element (EVRE) comprising discrete reactance elements and corresponding switches, the EVRE having different positions for providing different reactances, wherein each switch is configured to switch in and out one of the discrete reactance elements to provide the different positions of the EVRE;

determining a parameter related to the matching network or plasma chamber;

for the determined parameter, determining potential new positions for the EVRE, the potential new positions having differing effectiveness in causing an impedance match between the RF source and the plasma chamber;

determining which of the discrete reactance elements of the EVRE are currently restricted from switching;

determining a preferred position for the EVRE, the preferred position being a one of the potential new positions that provides greatest effectiveness in providing an impedance match while also not requiring switching in or out of any of the discrete reactance elements that are currently restricted from switching; and

altering the EVRE to the preferred position.

Assignments (3)

Continuity (21)