Semiconductor device and manufacturing method thereof
A semiconductor device includes a stack structure including conductive layers and insulating layers, which are alternately stacked; an opening including a first opening penetrating the stack structure and second openings protruding from the first opening; and a channel layer including channel regions located in the second openings and impurity regions located in the first opening, the impurity regions having an impurity concentration higher than that of the channel regions.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a stack structure;
forming a first opening penetrating the stack structure;
forming second openings protruding from the first opening; and
forming a channel layer including channel regions located in the second openings and impurity regions located in the first opening, the impurity regions having an impurity concentration higher than that of the channel regions.
2. The method of claim 1 , wherein the forming of the channel layer includes:
forming the channel layer in the first and second openings;
forming barrier patterns in the second openings; and
forming the impurity regions in the channel layer exposed by the barrier patterns.
3. The method of claim 2 , wherein the forming of the barrier patterns includes:
forming a barrier layer in the channel layer; and
forming the barrier patterns by etching the barrier layer.
4. The method of claim 3 , wherein the barrier layer is etched using a dry cleaning process.
5. The method of claim 2 , wherein, in the forming of the impurity regions, an impurity is doped into the channel layer, using a plasma gas.
6. The method of claim 2 , wherein, in the forming of the impurity regions, an impurity is doped into the channel layer, using an impurity source gas.
7. The method of claim 2 , wherein a heat treatment process is performed after the impurity regions are formed.
8. The method of claim 2 , wherein the barrier patterns include a material having a higher etch selectivity different from the channel layer.
9. The method of claim 2 , wherein the barrier patterns include oxide, nitride or metal.
10. The method of claim 2 , further comprising:
after the impurity regions are formed, removing the barrier patterns; and
forming a gap fill layer in the channel layer.
11. The method of claim 2 , further comprising, after the impurity regions are formed, forming a gap fill layer in the channel layer.
12. The method of claim 1 , wherein the stack structure includes first material layers and second material layers, which are alternately stacked, and the second openings are formed by selectively etching the first material layers exposed through the first opening.
13. A method of manufacturing a semiconductor device, the method comprising:
forming a stack structure;
forming a first opening penetrating the stack structure;
forming second openings protruding from the first opening; and
forming a channel layer including first regions located in the second openings and second regions located in the first opening, wherein the second regions have a greater electrical conductivity than the first regions.
14. The method of claim 13 , wherein the forming of the channel layer includes:
forming the channel layer in the first and second openings;
forming barrier patterns in the second openings; and
forming the second regions in the channel layer exposed by the barrier patterns.
15. The method of claim 14 , wherein the forming of the barrier patterns includes:
forming a barrier layer in the channel layer; and
forming the barrier patterns by etching the barrier layer.
16. The method of claim 15 , wherein the barrier layer is etched using a dry cleaning process.
17. The method of claim 14 , wherein, in the forming of the second regions, an impurity is doped into the channel layer, using a plasma gas.
18. The method of claim 14 , wherein, in the forming of the second regions, an impurity is doped into the channel layer, using an impurity source gas.