IP Library Granted Patent US 11,359,277
Granted Patent B2
US 11,359,277 · App. 16/880,432 · Granted Jun 14, 2022

Masking block that is configured in a pattern for direct synthesis of a two-dimensional material having the pattern on a growth substrate and that is easily bondable to and debondable from the growth substrate

Inventors: Jaehyun Park (Seoul, KR); Dongjun Lee (Seoul, KR)
Assignee: Korea Institute of Science and Technology
C23C16/342C23C16/0209C23C16/0254C23C16/042C23C16/0227C23C16/45525
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Quick Facts
Patent No.
US 11,359,277
App. No.
16/880,432
Granted
Jun 14, 2022
Kind
B2
Abstract

A masking block configured to contact a growth substrate to define a pattern of a two-dimensional material directly synthesized on the growth substrate, includes a base substrate; a gamma-alumina film that is disposed on the base substrate and that has an upper surface in which a (110) plane is dominant as being more than 50%; and a hexagonal boron nitride film that is doped with carbon and oxygen that is disposed on the gamma-alumina film, and that has reduced defects due to properties of the gamma-alumina film, wherein the hexagonal boron nitride film contains an amount of carbon ranging from 1 at % to 15 at % based on total atoms of carbon, oxygen, nitrogen and boron in the hexagonal boron nitride film and includes voids such that a coverage ratio of the hexagonal boron nitride film on the gamma-alumina film is less than 1 and equal to or more than 0.9.

Claims (25)

1. A masking block configured to contact a growth substrate to define a pattern of a two-dimensional material directly synthesized on the growth substrate, the masking block comprising:

a base substrate;

a gamma-alumina film that is disposed on the base substrate and that has an upper surface in which a (110) plane is dominant as being more than 50%; and

a hexagonal boron nitride film that is doped with carbon and oxygen, that is disposed on the gamma-alumina film,

wherein the hexagonal boron nitride film contains an amount of carbon ranging from 1 at % to 15 at % based on total atoms of carbon, oxygen, nitrogen and boron in the hexagonal boron nitride film, and

wherein the hexagonal boron nitride film includes voids such that a coverage ratio of the hexagonal boron nitride film on the gamma-alumina film is less than 1 and equal to or more than 0.9, and

wherein the upper surface of the gamma-alumina film has a root mean square roughness of 1 nm or less.

2. The masking block of claim 1 , wherein the hexagonal boron nitride film contains an amount of oxygen ranging from 1 at % to 10 at % based on the total atoms of carbon, oxygen, nitrogen and boron in the hexagonal boron nitride film.

3. The masking block of claim 1 , wherein the hexagonal boron nitride film is a monolayer or a bilayer and has a thickness ranging up to and including 1 nm.

4. The masking block of claim 1 , wherein the gamma-alumina film has a thickness ranging from 5 nm to 50 nm.

5. The masking block of claim 1 , wherein the gamma-alumina film has a thickness ranging from 5 nm to 10 nm.

6. A method for forming a pattern, the method comprising:

pressing the masking block of claim 1 on a growth substrate to adhere the masking block to the growth substrate;

providing a source material to the growth substrate to form a pattern of a two-dimensional material; and

debonding the masking block from the growth substrate.

7. The method of claim 6 , wherein the two-dimensional material includes graphene, and the pattern is formed selectively at a contact interface between the masking block and the growth substrate.

8. The method of claim 7 , wherein the pattern including graphene is synthesized in an atmosphere including a carbon source and an oxygen-containing material.

9. The method of claim 6 , wherein the two-dimensional material includes hexagonal boron nitride or a transitional metal dichalcogenide, and the pattern is formed selectively on an exposed surface of the growth substrate, which is not adhered to the masking block.

10. A masking block configured to contact a growth substrate to define a pattern of a two-dimensional material directly synthesized on the growth substrate, the masking block comprising:

a base substrate;

a gamma-alumina film that is disposed on the base substrate and that has an upper surface in which a (110) plane is dominant as being more than 50%; and

a hexagonal boron nitride film that is doped with carbon and oxygen, that is disposed on the gamma-alumina film,

wherein the hexagonal boron nitride film contains an amount of carbon ranging from 1 at % to 15 at % based on total atoms of carbon, oxygen, nitrogen and boron in the hexagonal boron nitride film, and

wherein the hexagonal boron nitride film includes voids such that a coverage ratio of the hexagonal boron nitride film on the gamma-alumina film is less than 1 and equal to or more than 0.9, and

wherein the upper surface of the gamma-alumina film has an (111) plane, and wherein a sum of the (110) plane and the (111) plane in the upper surface of the gamma-alumina film is equal to or more than 99% thereof.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 21, 2020
From: PARK, JAEHYUN; LEE, DONGJUN
To: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
Reel/Frame 052727/0015 →
Priority Claims (1)
KR 10-2019-0155421 · Nov 28, 2019 · national
Continuity (1)
Related Publication 20210164096A1 · Jun 3, 2021