IP Library › Granted Patent US 11,374,042
Granted Patent B1
US 11,374,042 · App. 17/699,099 · Granted Jun 28, 2022

3D micro display semiconductor device and structure

Inventors: Zvi Or-Bach (Haifa, IL); Deepak C. Sekar (Sunnyvale, CA)
Assignee: MONOLITHIC 3D INC.
H01L27/14603H01L25/0756H01L27/156H01L33/16H01L33/62
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Quick Facts
Patent No.
US 11,374,042
App. No.
17/699,099
Granted
Jun 28, 2022
Kind
B1
Abstract

A 3D micro display, the 3D micro display including: a first level including a first single crystal layer, the first single crystal layer includes at least one LED driving circuit; a second level including a first plurality of light emitting diodes (LEDs), the first plurality of LEDs including a second single crystal layer, where the second level is disposed on top of the first level, where the second level includes at least ten individual first LED pixels; and a bonding structure, where the bonding structure includes oxide to oxide bonding.

Claims (80)

1. A 3D micro display, the 3D micro display comprising:

a first level comprising a first single crystal layer, said first single crystal layer comprises at least one LED driving circuit;

a second level comprising a first plurality of light emitting diodes (LEDs), said first plurality of LEDs comprising a second single crystal layer,

wherein said second level is disposed on top of said first level,

wherein said second level comprises at least ten individual first LED pixels; and

a bonding structure,

wherein said bonding structure comprises oxide to oxide bonding.

2. The 3D micro display according to claim 1 ,

wherein a plurality of said at least ten individual first LED pixels are individually driven, and

wherein each of said plurality of said at least ten individual first LED pixels is driven by a unique said at least one LED driving circuit.

3. The 3D micro display according to claim 1 , further comprising:

a top surface of said first single crystal layer; and

a bottom surface of said second single crystal layer,

wherein a vertical distance is a distance from said top surface of said first single crystal layer to said bottom surface of said second single crystal layer, and

wherein said vertical distance is less than ten microns and greater than 0.1 microns.

4. The 3D micro display according to claim 1 , further comprising:

a second plurality of light emitting diodes (LEDs),

wherein said first plurality of LEDs emits a first light with a first wavelength,

wherein said second plurality of LEDs emits a second light with a second wavelength, and

wherein said first wavelength and said second wavelength differ by greater than 10 nm.

5. The 3D micro display according to claim 1 ,

wherein said first single crystal layer thickness is greater than 10 nm and smaller than 50 micrometers.

6. The 3D micro display according to claim 1 ,

wherein said second single crystal layer thickness is greater than 10 nm and smaller than 50 micrometers.

7. The 3D micro display according to claim 1 ,

wherein said at least one LED driving circuit comprises n type devices and p type devices.

8. A 3D micro display, the 3D micro display comprising:

a first level comprising a first single crystal layer, said first single crystal layer comprises at least one LED driving circuit;

a second level comprising a first plurality of light emitting diodes (LEDs), said first plurality of LEDs comprising a second single crystal layer,

wherein said second level is disposed on top of said first level,

wherein said second level comprises at least ten individual first LED pixels; and

a bonding structure,

wherein said first level is bonded to said second level, and

wherein said bonded comprises oxide to oxide bonding.

9. The 3D micro display according to claim 8 ,

wherein a plurality of said at least ten individual first LED pixels are individually driven, and

wherein each of said plurality of said at least ten individual first LED pixels is driven by a unique said at least one LED driving circuit.

10. The 3D micro display according to claim 8 , further comprising:

a top surface of said first single crystal layer; and

a bottom surface of said second single crystal layer,

wherein a vertical distance is a distance from said top surface of said first single crystal layer to said bottom surface of said second single crystal layer, and

wherein said vertical distance is less than ten microns and greater than 0.1 microns.

11. The 3D micro display according to claim 8 , further comprising:

a second plurality of light emitting diodes (LEDs),

wherein said first plurality of LEDs emits a first light with a first wavelength,

wherein said second plurality of LEDs emits a second light with a second wavelength, and

wherein said first wavelength and said second wavelength differ by greater than 10 nm.

12. The 3D micro display according to claim 8 ,

wherein said first single crystal layer thickness is greater than 10 nm and smaller than 50 micrometers.

13. The 3D micro display according to claim 8 ,

wherein said second single crystal layer thickness is greater than 10 nm and smaller than 50 micrometers.

14. The 3D micro display according to claim 8 ,

wherein said at least one LED driving circuit comprises n type devices and p type devices.

15. A 3D micro display, the 3D micro display comprising:

a first level comprising a first single crystal layer, said first single crystal layer comprises at least one LED driving circuit;

a second level comprising a first plurality of light emitting diodes (LEDs), said first plurality of LEDs comprising a second single crystal layer,

wherein said second level is disposed on top of said first level,

wherein said second level comprises at least ten individual first LED pixels,

wherein said first plurality of LEDs comprise at least 10 individual LED pixels,

wherein said at least 10 individual LED pixels been made individual by an etch process; and

a bonding structure,

wherein said first level is bonded to said second level, and

wherein said bonded comprises oxide to oxide bonding.

16. The 3D micro display according to claim 15 ,

wherein a plurality of said first LED pixels are individually driven, and

wherein each of said plurality of said first LED pixels is driven by a unique said at least one LED driving circuit.

17. The 3D micro display according to claim 15 , further comprising:

a top surface of said first single crystal layer; and

a bottom surface of said second single crystal layer,

wherein a vertical distance is a distance from said top surface of said first single crystal layer to said bottom surface of said second single crystal layer, and

wherein said vertical distance is less than ten microns and greater than 0.1 microns.

18. The 3D micro display according to claim 15 , further comprising:

a second plurality of light emitting diodes (LEDs),

wherein said first plurality of LEDs emits a first light with a first wavelength,

wherein said second plurality of LEDs emits a second light with a second wavelength, and

wherein said first wavelength and said second wavelength differ by greater than 10 nm.

19. The 3D micro display according to claim 15 ,

wherein said first single crystal layer thickness is greater than 10 nm and smaller than 50 micrometers.

20. The 3D micro display according to claim 15 ,

wherein said at least one LED driving circuit comprises n type devices and p type devices.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 19, 2022
From: OR-BACH, ZVI; SEKAR, DEEPAK
To: MONOLITHIC 3D INC.
Reel/Frame 059316/0334 →
Continuity (9)
Continuation 17487369 · Sep 28, 2021
Continuation In Part 17216597 · Mar 29, 2021
Continuation In Part 17113045 · Dec 5, 2020
Continuation In Part 17027217 · Sep 21, 2020
Continuation In Part 16860027 · Apr 27, 2020
Continuation In Part 15920499 · Mar 14, 2018
Continuation In Part 14936657 · Nov 9, 2015
Continuation In Part 13274161 · Oct 14, 2011
Continuation In Part 12904103 · Oct 13, 2010
Cited By (1)
US 12,635,583