Reactant vaporizer and related systems and methods
Herein disclosed are systems and methods related to solid source chemical vaporizer vessels and multiple chamber deposition modules. In some embodiments, a solid source chemical vaporizer includes a housing base and a housing lid. Some embodiments also include a first and second tray configured to be housed within the housing base, wherein each tray defines a first serpentine path adapted to hold solid source chemical and allow gas flow thereover. In some embodiments, a multiple chamber deposition module includes first and second vapor phase reaction chambers and a solid source chemical vaporizer vessel to supply each of the first and second vapor phase reaction chambers.
1. A solid source chemical vaporizer, comprising:
a housing base;
a first tray configured to be housed within the housing base, the first tray defining a first serpentine path adapted to hold solid source chemical and allow gas flow thereover, the first serpentine path comprising a plurality of antiparallel segments within a first plane;
a second tray configured to be housed within the housing base vertically stacked above the first tray, the second tray defining a second serpentine path adapted to hold solid source chemical and allow gas flow thereover, the second serpentine path comprising a plurality of antiparallel segments within a second plane parallel to the first plane, wherein the first serpentine path and the second serpentine path are configured to be switchably arranged between series and parallel arrangements; and
a housing lid.
2. The solid source chemical vaporizer of claim 1 , wherein the first serpentine path and the second serpentine path are fluidly connected in series.
3. The solid source chemical vaporizer of claim 1 , wherein the first serpentine path and the second serpentine path are fluidly connected in parallel.
4. The solid source chemical vaporizer of claim 1 , wherein the first and second serpentine paths each comprise a recess formed in a solid metal block, the recess of the first serpentine path defining a height width aspect ratio in a range of about 1.5-5.
5. The solid source chemical vaporizer of claim 1 , wherein the first serpentine path has a length in a range of about 2000 mm-8000 mm.
6. The solid source chemical vaporizer of claim 1 , wherein a combined height of the first tray and the second tray is between about 50 mm-100 mm.
7. The solid source chemical vaporizer of claim 1 , wherein a ratio of a length of the serpentine path to a width of the first tray is at least about 4:1.