IP Library › Granted Patent US 11,387,227
Granted Patent B2
US 11,387,227 · App. 17/017,101 · Granted Jul 12, 2022

Memory device having multiple chips and method for manufacturing the same

Inventor: Mutsumi Okajima (Yokkaichi Mie, JP)
Assignee: Kioxia Corporation
H01L25/50H01L24/08H01L24/80H01L25/18G11C11/161G11C11/407H01L21/02244H01L21/02258H01L27/10852H01L27/224H01L2224/08145H01L2224/8013H01L2924/1436
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Quick Facts
Patent No.
US 11,387,227
App. No.
17/017,101
Granted
Jul 12, 2022
Kind
B2
Abstract

According to one embodiment, a memory device includes: a first chip including a first insulating layer and a first pad; a plurality of memory units provided in a first area of the first insulating layer and arranged at first intervals in a first direction parallel to a surface of the first chip; a plurality of mark portions provided in a second area of the first insulating layer and arranged at second intervals in the first direction; a second chip including a second pad connected to the first pad and overlapping the first chip in a second direction perpendicular to the surface of the first chip; and a circuit provided in the second chip.

Claims (43)

1. A memory device comprising:

a first chip including a first insulating layer and a first pad;

a plurality of memory units provided in a first area of the first insulating layer and arranged at first intervals along a first direction parallel to a surface of the first chip, each of the plurality of memory units including a first columnar portion extending along a second direction in the first insulating layer, the second direction being perpendicular to the surface of the first chip;

a plurality of mark portions provided in a second area of the first insulating layer and arranged at second intervals along the first direction, each of the plurality of mark portions including a second columnar portion extending along the second direction in the first insulating layer;

a second chip including a second pad connected to the first pad and overlapping the first chip along the second direction; and

a circuit provided in the second chip,

wherein

the plurality of mark portions are electrically isolated from the plurality of memory units and the circuit,

the first columnar portion includes a capacitor,

the capacitor includes a first conductive portion, a second conductive portion, and a first insulating portion between the first conductive portion and the second conductive portion,

the second columnar portion includes a third conductive portion, a fourth conductive portion, and a second insulating portion between the third conductive portion and the fourth conductive portion,

a material of the first conductive portion is identical to a material of the third conductive portion,

a material of the second conductive portion is identical to a material of the fourth conductive portion, and

a material of the first insulating portion is identical to a material of the second insulating portion.

2. The memory device of claim 1 , further comprising a plurality of first members provided in a third area between the first area and the second area in the first insulating layer, wherein:

the plurality of memory units are arranged in the first area in a first layout pattern;

the plurality of mark portions are arranged in the second area in the first layout pattern; and

the plurality of first members are arranged in the third area in a random layout pattern.

3. The memory device of claim 1 , further comprising a plurality of second members provided in the second area in a random layout pattern.

4. The memory device of claim 1 , wherein the first insulating layer is an aluminum oxide layer.

5. The memory device of claim 1 , wherein each of the plurality of memory units and each of the plurality of mark portions has a structure including a plurality of constricted portions arranged along the second direction.

6. The memory device of claim 1 , wherein each of the first and second columnar portions has a structure including a plurality of constricted portions, and the plurality of constricted portions are periodically arranged along the second direction.

7. The memory device of claim 1 , wherein

the plurality of mark portions are provided for an alignment of the first chip and the second chip.

8. A memory device comprising:

a first chip including a first insulating layer and a first pad;

a plurality of memory units provided in a first area of the first insulating layer and arranged at first intervals along a first direction parallel to a surface of the first chip;

a plurality of mark portions provided in a second area of the first insulating layer and arranged at second intervals along the first direction;

a second chip including a second pad connected to the first pad and overlapping the first chip in a second direction perpendicular to the surface of the first chip; and

a circuit provided in the second chip,

wherein each of the plurality of memory units includes a first magnetic body and a reading element connected to one end of the magnetic body.

9. The memory device of claim 8 , wherein each of the plurality of mark portions includes a second magnetic body and a first layer provided on the second magnetic body in the second direction.

10. The memory device of claim 8 , wherein:

each of the plurality of memory units includes a first columnar portion extending along the second direction in the first insulating layer; and

each of the plurality of mark portions includes a second columnar portion extending along the second direction in the first insulating layer.

11. The memory device of claim 8 , further comprising a plurality of first members provided in a third area between the first area and the second area in the first insulating layer, wherein:

the plurality of memory units are arranged in the first area in a first layout pattern;

the plurality of mark portions are arranged in the second area in the first layout pattern; and

the plurality of first members are arranged in the third area in a random layout pattern.

12. The memory device of claim 8 , further comprising a plurality of second members provided in the second area in a random layout pattern.

13. The memory device of claim 8 , wherein the first insulating layer is an aluminum oxide layer.

14. The memory device of claim 8 , wherein each of the plurality of memory units and each of the plurality of mark portions has a structure including a plurality of constricted portions arranged along the second direction.

15. The memory device of claim 14 , wherein the plurality of constricted portions are periodically arranged along the second direction.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2020
From: OKAJIMA, MUTSUMI
To: KIOXIA CORPORATION
Reel/Frame 053969/0779 →
Priority Claims (1)
JP JP2020-052006 · Mar 24, 2020 · national
Continuity (1)
Related Publication 20210305230A1 · Sep 30, 2021
Cited By (1)
US 12,444,679