Semiconductor memory device and method of fabricating same
A semiconductor memory device includes; a first impurity region and a second impurity region spaced apart in a substrate, a device isolation pattern between the first impurity region and the second impurity region, a bit-line contact on the first impurity region, a storage node contact on the second impurity region and a dielectric pattern between the bit-line contact and the storage node contact. An upper part of a sidewall of the device isolation pattern has a first slope and a lower part of the sidewall of the device isolation pattern has a second slope different from the first slope.
1. A semiconductor memory device comprising:
a first impurity region and a second impurity region spaced apart in a substrate;
a device isolation pattern between the first impurity region and the second impurity region;
a bit-line contact on the first impurity region;
a storage node contact on the second impurity region;
a dielectric pattern between the bit-line contact and the storage node contact; and
a spacer between the dielectric pattern and the device isolation pattern, wherein:
a lowermost surface of the spacer is below an upper surface of the first impurity region, and
an upper part of a sidewall of the device isolation pattern has a first slope and, a lower part of the sidewall of the device isolation pattern has a second slope different from the first slope.
2. The semiconductor memory device of claim 1 , wherein the second slope is less acute than the first slope.
3. The semiconductor memory device of claim 1 , wherein:
the sidewall of the device isolation pattern includes an inflection point at which a slope of the sidewall changes from the first slope to the second slope, and
the inflection point is disposed above an upper surface of the first impurity region.
4. The semiconductor memory device of claim 1 , wherein a sidewall of the dielectric pattern has a shape transferred from the sidewall of the device isolation pattern.
5. The semiconductor memory device of claim 1 , further comprising a single layer buffer pattern on the substrate.
6. The semiconductor memory device of claim 5 , wherein the buffer pattern and the device isolation pattern include a same material.
7. The semiconductor memory device of claim 6 , wherein the buffer pattern includes a silicon oxide layer and the buffer pattern excludes a silicon nitride layer.
8. The semiconductor memory device of claim 1 , wherein:
the second impurity region is provided as a pair of second impurity regions and the pair of second impurity regions are provided across the first impurity region,
dielectric patterns are respectively disposed between the first impurity region and the pair of second impurity regions and have a lower surface below an upper surface of the first impurity region, and
widths of the dielectric patterns are the same at a level of the upper surface of the first impurity region.
9. The semiconductor memory device of claim 8 , wherein the widths of the dielectric patterns change at a level above the upper surface of the first impurity region and vary one dielectric pattern from another dielectric pattern among the dielectric patterns.
10. The semiconductor memory device of claim 1 , wherein the device isolation pattern includes a sidewall having a step difference.
11. A semiconductor memory device comprising:
a substrate including a first impurity region spaced apart from a second impurity region;
a device isolation pattern disposed between the first impurity region and the second impurity region;
a bit-line contact on the first impurity region;
a storage node contact on the second impurity region;
a dielectric pattern disposed between the bit-line contact and the storage node contact; and
a spacer between the dielectric pattern and the device isolation pattern, wherein:
a lowermost surface of the spacer is below an upper surface of the first impurity region, and
the dielectric pattern includes lower parts, each having a constant width, and upper parts, each having a variable width.
12. The semiconductor memory device of claim 11 , wherein a lower surface of the dielectric pattern is below an upper surface of the first impurity region.
13. The semiconductor memory device of claim 11 , further comprising:
a buffer pattern disposed on the substrate, wherein
the buffer pattern includes a material different than that of the dielectric pattern.
14. The semiconductor memory device of claim 11 , wherein:
the second impurity region is provided as a pair of second impurity regions and the pair of second impurity regions is provided across from the first impurity region, and
the lower parts of the dielectric pattern between the first impurity region and the pair of second impurity regions are symmetrically disposed with respect to the first impurity region.
15. A semiconductor memory device comprising:
a first impurity region in a substrate;
a pair of second impurity regions in the substrate spaced apart from each other and across from the first impurity region;
device isolation patterns respectively between the first impurity region and the pair of second impurity regions;
a bit-line contact on the first impurity region;
storage node contacts respectively on the pair of second impurity regions;
dielectric patterns respectively between the bit-line contact and the storage node contacts; and
a spacer between the dielectric pattern and the device isolation pattern, wherein:
a lowermost surface of the spacer is below an upper surface of the first impurity region,
sidewalls and upper surfaces of the device isolation patterns define a recess having a first inner sidewall and an opposing second inner sidewall,
the first inner sidewall includes an upper part, a lower part and a first inflection point disposed above an upper surface of the first impurity region at which a slope of the first inner sidewall changes, and
the second inner sidewall includes an upper part, a lower part and a second inflection point disposed above an upper surface of the first impurity region at which a slope of the second inner sidewall changes.
16. The semiconductor memory device of claim 15 , wherein the lower part of the first inner sidewall and the lower part of the second inner sidewall are spaced apart by a same interval from the first impurity region.
17. The semiconductor memory device of claim 16 , wherein the lower part of the first inner sidewall and the lower part of the second inner sidewall have the same slope.
18. The semiconductor memory device of claim 16 , wherein at a same level, an interval between the bit-line contact and the first inner sidewall is different from an interval between the bit-line contact and the second inner sidewall.
19. The semiconductor memory device of claim 16 , wherein at least one of the first inner sidewall and the second inner sidewall has a step difference.