IP Library › Granted Patent US 11,410,689
Granted Patent B2
US 11,410,689 · App. 16/984,381 · Granted Aug 9, 2022

Magnetoresistance effect element and Heusler alloy

Inventors: Kazuumi Inubushi (Tokyo, JP); Katsuyuki Nakada (Tokyo, JP); Tetsuya Uemura (Hokkaido, JP)
Assignee: TDK CORPORATION
G11B5/3903G01R33/093G11B5/3929G11C11/161H01F10/1936H01F10/325H01L27/222H01L43/10G11B2005/3996
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Quick Facts
Patent No.
US 11,410,689
App. No.
16/984,381
Granted
Aug 9, 2022
Kind
B2
Abstract

A magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a non-magnetic layer positioned between the first ferromagnetic layer and the second ferromagnetic layer, and at least one of the first ferromagnetic layer and the second ferromagnetic layer is a Heusler alloy represented by the following General Formula (1): Co 2 Fe α X β   (1) (in Formula (1), X represents one or more elements selected from the group consisting of Mn, Cr, Si, Al, Ga and Ge, and α and β represent numbers that satisfy 2.3≤α+β, α<β, and 0.5<α<1.9).

Claims (61)

1. A magnetoresistance effect element including a first ferromagnetic layer, a second ferromagnetic layer, and a non-magnetic layer positioned between the first ferromagnetic layer and the second ferromagnetic layer,

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer contains a Heusler alloy represented by the following General Formula (1):

Co 2 Fe α X β   (1)

(in Formula (1), X represents one or more elements selected from the group consisting of Mn, Cr, Si, Al, Ga and Ge, and α and β represent numbers that satisfy 2.3≤α+β, α<β, and 0.5<α<1.9).

2. The magnetoresistance effect element according to claim 1 ,

wherein the Heusler alloy is an alloy represented by the following General Formula (2):

Co 2 Fe α Ga γ Y β-γ   (2)

(in Formula (2), Y represents one or more elements selected from the group consisting of Mn, Cr, Si, Al and Ge, and α, β and γ represent numbers that satisfy 2.3≤α+β, α<β, and 0.5<α<1.9, 0.1≤γ).

3. The magnetoresistance effect element according to claim 2 ,

wherein, in General Formula (2), β and γ represent numbers that satisfy 2×γ<β.

4. The magnetoresistance effect element according to claim 1 ,

wherein the Heusler alloy is an alloy represented by the following General Formula (3):

Co 2 Fe α Ge δ Z β-δ   (3)

(in Formula (3), Z represents one or more elements selected from the group consisting of Mn, Cr, Si, Al and Ga, and α, β and δ represent numbers that satisfy 2.3≤α+β, α<β, and 0.5<α<1.9, 0.1≤δ).

5. The magnetoresistance effect element according to claim 4 ,

wherein, in General Formula (3), β and δ represent numbers that satisfy 2×δ>β.

6. The magnetoresistance effect element according to claim 1 ,

wherein the Heusler alloy is an alloy represented by the following General Formula (4):

Co 2 Fe α Ga γ Ge δ   (4)

(in Formula (4), α, γ and δ represent numbers that satisfy 2.3≤α+γ+δ, α<γ+δ, and 0.5<α<1.9, 0.1≤γ, 0.1≤δ).

7. The magnetoresistance effect element according to claim 6 ,

wherein, in General Formula (4), γ and δ represent numbers that satisfy γ<δ.

8. The magnetoresistance effect element according to claim 6 ,

wherein, in General Formula (4), α, γ and δ represent numbers that satisfy 2.3≤α+γ+δ<2.66.

9. The magnetoresistance effect element according to claim 8 ,

wherein, in General Formula (4), α, γ and δ represent numbers that satisfy 2.45<α+γ+δ<2.66.

10. The magnetoresistance effect element according to claim 6 ,

wherein, in General Formula (4), δ represents a number that satisfies 0.63<δ<1.26.

11. The magnetoresistance effect element according to claim 10 ,

wherein, in General Formula (4), δ represents a number that satisfies 0.84<δ<1.26.

12. The magnetoresistance effect element according to claim 1 ,

wherein the Heusler alloy is an alloy represented by the following General Formula (5):

Co 2 Fe α Ga γ Ge δ Mn ε   (5)

(in Formula (5), α, γ, δ and ε represent numbers that satisfy 2.3≤α+γ+δ+ε, α<γ+δ+ε, and 0.5<α<1.9, 0.1≤γ, 0.1≤δ, 0.1≤ε).

13. The magnetoresistance effect element according to claim 12 ,

wherein, in General Formula (5), δ and ε represent numbers that satisfy δ<ε.

14. The magnetoresistance effect element according to claim 12 ,

wherein, in General Formula (5), c represents a number that satisfies 0.38<ε<0.76.

15. The magnetoresistance effect element according to claim 1 ,

wherein the non-magnetic layer contains Ag.

16. The magnetoresistance effect element according to claim 1 ,

wherein a NiAl layer containing a NiAl alloy is provided between the first ferromagnetic layer and the non-magnetic layer and between the second ferromagnetic layer and the non-magnetic layer.

17. The magnetoresistance effect element according to claim 16 ,

wherein the thickness t of the NiAl layer satisfies 0<t≤0.63 nm.

18. The magnetoresistance effect element according to claim 16 ,

wherein the NiAl alloy contains a larger amount of Ni than of Al.

19. The magnetoresistance effect element according to claim 16 ,

wherein the NiAl alloy contains a larger amount of Al than of Ni.

20. The magnetoresistance effect element according to claim 1 ,

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer is a laminate including two or more ferromagnetic layers, and the ferromagnetic layer in contact with the non-magnetic layer among the two or more ferromagnetic layers has a higher Fe concentration than the ferromagnetic layer on the side opposite to the non-magnetic layer.

21. The magnetoresistance effect element according to claim 1 ,

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer is a laminate including two or more ferromagnetic layers, the two or more ferromagnetic layers each contains Ge, and the ferromagnetic layer in contact with the non-magnetic layer among the two or more ferromagnetic layers has a lower Ge concentration than the ferromagnetic layer on the side opposite to the non-magnetic layer.

22. The magnetoresistance effect element according to claim 1 ,

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer is a laminate including two or more ferromagnetic layers, the two or more ferromagnetic layers each contains Ga, and the ferromagnetic layer in contact with the non-magnetic layer among the two or more ferromagnetic layers has a higher Ga concentration than the ferromagnetic layer on the side opposite to the non-magnetic layer.

23. The magnetoresistance effect element according to claim 1 ,

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer is a laminate including two or more ferromagnetic layers, and the ferromagnetic layer in contact with the non-magnetic layer among the two or more ferromagnetic layers has a higher regularity than the ferromagnetic layer on the side opposite to the non-magnetic layer.

24. The magnetoresistance effect element according to claim 1 ,

wherein, on at least one of the first ferromagnetic layer and the second ferromagnetic layer, a layer containing Ni is provided on the side opposite to the non-magnetic layer.

25. A Heusler alloy represented by the following General Formula (1):

Co 2 Fe α X β   (1)

(in Formula (1), X represents one or more elements selected from the group consisting of Mn, Cr, Si, Al, Ga and Ge, and α and β represent numbers that satisfy 2.3≤α+β, α<β, and 0.5<α<1.9).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 4, 2020
From: INUBUSHI, KAZUUMI; NAKADA, KATSUYUKI; UEMURA, TETSUYA
To: TDK CORPORATION
Reel/Frame 053393/0299 →
Priority Claims (2)
JP JP2019-146630 · Aug 8, 2019 · national
JP JP2020-041353 · Mar 10, 2020 · national
Continuity (1)
Related Publication 20210043225A1 · Feb 11, 2021
Cited By (5)
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