Filter and capacitor using redistribution layer and micro bump layer
An integrated circuit package includes a die. An electrically conductive layer comprises a redistribution layer (RDL) in the die, or a micro-bump layer above the die, or both. The micro bump layer comprises at least one micro-bump line. A filter comprises the electrically conductive layer. A capacitor comprises an electrode formed in the electrically conductive layer.
1. A method of forming an integrated circuit package, the method comprising:
forming a first redistribution line and a second redistribution line on a first die;
forming an insulator layer over the first redistribution line and the second redistribution line;
forming a first micro-bump line on the first redistribution line and a second micro-bump line on the second redistribution line; and
attaching a first substrate to the first die, wherein the second micro-bump line is electrically interposed between the first die and the first substrate, wherein the first micro-bump line is not electrically interposed between the first die and the first substrate, wherein the first micro-bump line is physically between the first die and the first substrate.
2. The method of claim 1 further comprising:
prior to forming the first micro-bump line, forming a first under bump metal (UBM) on an upper surface of the insulator layer, wherein the first UBM extends through the insulator layer to the first redistribution line, wherein forming the first micro-bump line comprises forming the first micro-bump line on the UBM.
3. The method of claim 2 further comprising:
prior to forming the first micro-bump line, forming a second UBM on an upper surface of the insulator layer, wherein the second UBM extends through the insulator layer to the second redistribution line, wherein forming the second micro-bump line comprises forming the second micro-bump line on the UBM.
4. The method of claim 1 , wherein the first micro-bump line is separated from the first substrate.
5. The method of claim 1 further comprising:
forming an underfill between the first substrate and the first die.
6. The method of claim 5 , wherein the underfill extends between the first micro-bump line and the first substrate.
7. The method of claim 1 , wherein the first micro-bump line comprises a part of a filter or a capacitor.
8. A method of forming an integrated circuit package, the method comprising:
forming a first redistribution line and a second redistribution line on a first die;
forming an insulator layer over the first redistribution line and the second redistribution line;
simultaneously forming a first micro-bump line electrically coupled to the first redistribution line and a second micro-bump line electrically coupled to the second redistribution line;
attaching a first substrate to the first die, wherein the second micro-bump line is electrically interposed between the first die and the first substrate; and
forming an underfill between the first die and the first substrate, wherein the underfill completely separates the first micro-bump line from the first substrate.
9. The method of claim 8 further comprising:
forming a third micro-bump line simultaneously with the first micro-bump line and the second micro-bump line, wherein the underfill completely separates the third micro-bump line from the first substrate.
10. The method of claim 9 , wherein a longitudinal axis of the third micro-bump line is parallel with a longitudinal axis of the first micro-bump line in a plan view.
11. The method of claim 8 , wherein the first micro-bump line comprises a U-shape in a plan view.
12. The method of claim 8 , wherein the first micro-bump line comprises perpendicular sections in a plan view.
13. The method of claim 8 , wherein simultaneously forming the first micro-bump line and the second micro-bump line comprises
forming a metal structure; and
forming a solder layer over the metal structure.
14. The method of claim 13 , wherein forming the metal structure comprises:
forming a first metal layer; and
forming a second metal layer, the second metal layer comprising a different metal than the first metal layer.
15. A method of forming an integrated circuit package, the method comprising:
forming a first redistribution line and a second redistribution line on a first die;
forming a capacitor or a filter electrically coupled to the first redistribution line, wherein the capacitor or filter comprises a first micro-bump line electrically coupled to the first redistribution line;
forming a second micro-bump line electrically coupled to the second redistribution line, the second micro-bump line being at a same level as the first micro-bump line;
attaching a first substrate to the first die, wherein the second micro-bump line is electrically interposed between the first die and the first substrate, wherein the first micro-bump line is not directly electrically coupled to the first substrate; and
forming an underfill between the first die and the first substrate, wherein the underfill extends between the first micro-bump line and the first substrate.
16. The method of claim 15 , wherein the underfill completely separates the first micro-bump line from the first substrate.
17. The method of claim 15 , wherein the first redistribution line and the second redistribution line are formed in a dielectric layer, wherein an upper surface of the first redistribution line, an upper surface of the second redistribution line, and an upper surface of the dielectric layer are level.
18. The method of claim 15 , wherein forming the first micro-bump line comprises:
forming a copper layer; and
forming a solder layer over the copper layer.
19. The method of claim 18 , wherein the solder layer has a thickness in a range from 20 μm to 200 μm.
20. The method of claim 15 further comprising forming a third redistribution line, the first redistribution line being electrically coupled to the third redistribution line by a via, wherein the first redistribution line has a same shape as and completely overlaps the third redistribution line in a plan view.