IP Library Granted Patent US 11,430,740
Granted Patent B2
US 11,430,740 · App. 16/474,026 · Granted Aug 30, 2022

Microelectronic device with embedded die substrate on interposer

Inventors: Robert Alan May (Chandler, AZ); Islam A. Salama (Scottsdale, AZ); Sri Ranga Sai Boyapati (Chandler, AZ); Sheng Li (Gilbert, AZ); Kristof Darmawikarta (Chandler, AZ); Robert L. Sankman (Phoenix, AZ); Amruthavalli Pallavi Alur (Tempe, AZ)
Assignee: Intel Corporation
H01L23/5389H01L21/56H01L21/6835H01L23/3128H01L24/19H01L24/25H01L24/82H01L25/0652H01L25/0655H01L25/071H01L25/112H01L2221/68359H01L2221/68372H01L2224/0401H01L2224/16235H01L2224/16238H01L2224/22H01L2224/224H01L2224/24226H01L2224/73103H01L2224/73104H01L2224/73203H01L2224/73204H01L2224/73209H01L2224/73217H01L2224/73267H01L2924/15311
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Quick Facts
Patent No.
US 11,430,740
App. No.
16/474,026
Granted
Aug 30, 2022
Kind
B2
Abstract

Microelectronic devices with an embedded die substrate on an interposer are described. For example, a microelectronic device includes a substrate housing an embedded die. At least one surface die is retained above a first outermost surface of the substrate. An interposer is retained proximate a second outermost surface of the substrate.

Claims (21)

1. A microelectronic device, comprising:

a substrate housing at least a first embedded die, the substrate comprising through contacts extending from a first outermost surface of the substrate to an opposing second outermost surface of the substrate, wherein each of the through contacts is continuous along a vertical axis from the first outermost surface of the substrate to the opposing second outermost surface of the substrate, and wherein each of the through contacts comprises a conductive material, wherein the conductive material is continuous from the first outermost surface of the substrate to the opposing second outermost surface of the substrate, and the substrate comprising contacts extending from the first outermost surface to the at least a first embedded die;

at least one surface die retained above the first outermost surface of the substrate, the at least one surface die electrically coupled to one or more of the contacts of the substrate; and

an interposer retained proximate the second outermost surface of the substrate, the interposer having a first set of multiple interposer contacts on a first surface, the first set of multiple interposer contacts coupled to respective ones of the through contacts of the substrate, the interposer containing multiple layers of traces redistributing contacts of the first set of multiple interposer contacts to respective locations on an opposing second surface of the interposer.

2. The microelectronic device of claim 1 , wherein the substrate comprises a single layer of transverse routing traces.

3. The microelectronic device of claim 2 , wherein the single layer of transverse routing traces is proximate a surface of the substrate.

4. The microelectronic device of claim 2 , wherein the single layer of transverse routing traces is proximate the second outermost surface of the substrate.

5. The microelectronic device of claim 2 , wherein the single layer of transverse routing traces is formed internal to the substrate.

6. The microelectronic device of claim 1 , wherein the at least a first embedded die is a bridge die.

7. The microelectronic device of claim 1 , wherein the at least a first embedded die is an active die.

8. The microelectronic device of claim 1 , further comprising a second embedded die.

9. The microelectronic device of claim 1 , wherein the substrate comprises a dielectric body in which the embedded die is retained.

10. The microelectronic device of claim 9 , wherein the dielectric body comprises a first portion extending beneath the embedded die, wherein the first portion has a first planarized surface proximate the embedded die.

11. The microelectronic device of claim 10 , wherein the first planarized surface is formed by grinding or chemical mechanical planarization.

12. An electronic system, comprising:

a microelectronic device, comprising:

a substrate housing at least a first embedded die, the substrate comprising through contacts extending from a first outermost surface of the substrate to an opposing second outermost surface of the substrate, wherein each of the through contacts is continuous along a vertical axis from the first outermost surface of the substrate to the opposing second outermost surface of the substrate, and wherein each of the through contacts comprises a conductive material, wherein the conductive material is continuous from the first outermost surface of the substrate to the opposing second outermost surface of the substrate, and the substrate comprising contacts extending from the first outermost surface to the at least a first embedded die;

at least one surface die retained above the first outermost surface of the substrate, the at least one surface die electrically coupled to one or more of the contacts of the substrate; and

an interposer retained proximate the second outermost surface of the substrate, the interposer having a first set of multiple interposer contacts on a first surface, the first set of multiple interposer contacts coupled to respective ones of the through contacts of the substrate, the interposer containing multiple layers of traces redistributing contacts of the first set of multiple interposer contacts to respective locations on an opposing second surface of the interposer; and

at least one of an additional semiconductor device, mass storage device and a network interface operably coupled to the microelectronic device.

13. The microelectronic device of claim 12 , wherein the substrate comprises a single layer of transverse routing traces.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 25, 2022
From: MAY, ROBERT ALAN; SALAMA, ISLAM A.; BOYAPATI, SRI RANGA SAI; LI, SHENG; DARMAWIKARTA, KRISTOF; SANKMAN, ROBERT L.; ALUR, AMRUTHAVALLI PALLAVI
To: INTEL CORPORATION
Reel/Frame 060604/0478 →
Continuity (1)
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