Substance detecting element
A through-hole ( 3 ) is disposed in a supporting substrate ( 2 ). Plate-shaped beams ( 4 ( 4 A, 4 B)) each includes a piezoelectric element, extends from an edge of the through-hole ( 3 ) toward an opposite edge to close a part of the through-hole ( 3 ), supports a substance adsorption film to which a constitutive substance to be detected adheres, and has a vibration frequency that is varied due to adhesion of the constitutive substance to the substance adsorption film. Drive electrodes ( 16 ) apply a voltage to the piezoelectric element to vibrate and deform the beams ( 4 ). Detection electrodes ( 17 ) detect information about the vibration frequencies of the beams ( 4 ).
1. A substance detecting element comprising:
a supporting substrate in which a through-hole is disposed; and
a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
the beam comprises an elongated plate-shaped first beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends and an elongated plate-shaped second beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends, the second beam intersecting the first beam,
the electrode provided on the first beam applies a voltage to the piezoelectric element to vibrate and deform the beam,
the electrode provided on the second beam detects information about a vibration frequency of the beam,
a width of the first beam is set to be wider than a width of the second beam, and.
2. The substance detecting element according to claim 1 , wherein at least one of the first beam or the second beam is provided with the electrode on each of both the ends thereof fixed to the edges of the through-hole.
3. The substance detecting element according to claim 1 , wherein
a width of a coupling portion of the first beam and the second beam is set to be wider than widths of portions of the first beam and the second beam other than the coupling portion.
4. The substance detecting element according to claim 1 , wherein the first beam and the second beam are orthogonal to each other.
5. A substance detecting element comprising:
a supporting substrate in which a through-hole is disposed; and
a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
the beam comprises an elongated plate-shaped first beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends and an elongated plate-shaped second beam having both ends fixed to edges of the through-hole and provided with an electrode on at least one of both the ends, the second beam intersecting the first beam,
the electrode provided on the first beam applies a voltage to the piezoelectric element to vibrate and deform the beam,
the electrode provided on the second beam detects information about a vibration frequency of the beam,
the electrode is formed on both the ends of one beam of the first beam or the second beam,
a lead wire is formed on the one beam, the lead wire connecting a plurality of the electrodes formed on both the ends of the one beam, and
a lead wire that is electrically connected to one electrode of the plurality of electrodes formed on both the ends of the one beam is drawn to outside of the one beam.
6. The substance detecting element according to claim 1 , wherein
the electrode is formed on both the ends of one beam of the first beam or the second beam, and
lead wires that each are electrically connected to a corresponding one electrode of a plurality of the electrodes formed on both the ends of the one beam, are drawn to outside of the one beam and are unified into one.
7. A substance detecting element comprising:
a supporting substrate in which a through-hole is disposed; and
a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
a plurality of the through-holes is disposed in the supporting substrate, each of the plurality of the through-holes is provided with the beam, and each beam supports a different kind of the substance adsorption film.
8. The substance detecting element according to claim 1 , wherein the first beam and the second beam are coupled to each other at respective middles of the first beam and the second beam.
9. A substance detecting element comprising:
a supporting substrate in which a through-hole is disposed; and
a plate-shaped beam that comprises a piezoelectric element, the beam extending from an edge of the through-hole toward an opposite edge to close a part of the through-hole and supporting a substance adsorption film to which a substance to be detected adheres, and the beam having a vibration frequency that is varied due to adhesion of the substance to the substance adsorption film, wherein
a plurality of the through-holes is disposed in the supporting substrate,
a plurality of the beams is disposed,
the through-holes are provided with the respective beams, and
the through-holes include through-holes that have mutually different hole sizes.
10. The substance detecting element according to claim 1 , wherein the electrode provided on the first beam and the electrode provided on the second beam are each formed to straddle a corresponding edge of the through-hole.
11. The substance detecting element according to claim 1 , wherein
the second beam is provided with the electrode on each of both the ends thereof fixed to the edges of the through-hole, and
one electrode of a plurality of the electrodes formed on both the ends of the second beam is connected to a lead wire drawn to outside of the second beam.