Substrate fixing apparatus including a base plate, an electrostatic adsorption member, a plurality of support members on the base plate and supporting the electrostatic adsorption member, and an adhesive layer bonding the electrostatic adsorption member to the base plate
A substrate fixing apparatus includes: a base plate; an electrostatic adsorption member that adsorbs and retains a substrate; a support member that is disposed on the base plate to support the electrostatic adsorption member; and an adhesive layer that adhesively bonds the electrostatic adsorption member to the base plate. The support member directly contacts the base plate and the electrostatic adsorption member. An elastic modulus of the support member is higher than an elastic modulus of the adhesive layer.
1. A substrate fixing apparatus comprising:
a base plate;
an electrostatic adsorption member that adsorbs and retains a substrate;
a plurality of support members that are disposed on the base plate to support the electrostatic adsorption member; and
an adhesive layer that adhesively bonds the electrostatic adsorption member to the base plate,
wherein
each of the plurality of support members directly contacts the base plate and the electrostatic adsorption member,
an elastic modulus of each of the plurality of support members is higher than an elastic modulus of the adhesive layer, and
heights of the plurality of support members are substantially the same.
2. The substrate fixing apparatus according to claim 1 , wherein
the elastic modulus of each of the plurality of support members is ten or more times as high as the elastic modulus of the adhesive layer.
3. The substrate fixing apparatus according to claim 1 , wherein
the electrostatic adsorption member comprises an electrostatic chuck.
4. The substrate fixing apparatus according to claim 3 , wherein
the electrostatic adsorption member further comprises a heating portion between the base plate and the electrostatic chuck.
5. The substrate fixing apparatus according to claim 1 , wherein
the base plate comprises:
a metal base body, and
a resin layer that is provided on the metal base body and between the metal base body and the electrostatic adsorption member.
6. The substrate fixing apparatus according to claim 5 , wherein
each of the plurality of support members directly contacts the resin layer.
7. The substrate fixing apparatus according to claim 1 , wherein
a difference between thermal conductivity of each of the plurality of support members and thermal conductivity of the adhesive layer is not higher than 2 W/(m·K).
8. The substrate fixing apparatus according to claim 1 , wherein
a coefficient of thermal expansion of each of the plurality of support members is not smaller than 0.1 time and not larger than 10 times as high as a coefficient of thermal expansion of the adhesive layer.
9. The substrate fixing apparatus according to claim 1 , wherein
the adhesive layer is provided between the electrostatic adsorption member and the base plate so as to cover the plurality of support members.
10. The substrate fixing apparatus according to claim 1 , wherein
the plurality of support members are disposed in a point symmetry with respect to a center point of the base plate.