Integrated circuit
An integrated circuit and method of making an integrated circuit is provided. The integrated circuit includes a substrate having an electronic component. A substrate-based coil is on the substrate and the substrate-based coil is electrically coupled to the electronic component. A magnetic mold compound encapsulates the substrate-based coil and the electronic component.
1. A method of fabricating integrated circuits, the method comprising:
providing a substrate having an array of electronic components;
attaching a sheet array of substrate-based coils to the substrate where respective substrate-based coils are aligned with respective electronic components;
encapsulating the substrate having the array of electronic components and the sheet of substrate-based coils with a magnetic mold compound; and
singulating the array of electronic components and respective substrate-based coils to form the integrated circuits.
2. The method of claim 1 , wherein attaching a sheet array of substrate-based coils to the substrate where respective substrate-based coils are aligned with respective electronic components comprises:
disposing substrate interconnects on substrate contacts, disposed on the substrate, of respective electronic components;
placing the sheet array of substrate-based coils on the substrate interconnects with respective coil ends of respective coils coupled to respective substrate contacts; and
bonding the sheet array of substrate-based coils to the substrate.
3. The method of claim 2 , wherein the substrate interconnects are bump bonds, and the bonding the sheet array of substrate-based coils to the substrate comprises performing a reflow process to apply solder and heat to the bump bonds and the substrate contacts to mechanically and electrically bond the sheet array of substrate-based coils to the substrate.
4. The method of claim 1 , wherein attaching a sheet array of substrate-based coils to the substrate where respective substrate-based coils are aligned with respective electronic components comprises:
providing the sheet array of substrate-based coils with respective pillar interconnects extending from the substrate-based coils;
placing the sheet array of substrate-based coils on the substrate where the pillar interconnects align with respective substrate contacts, of respective electronic components, disposed on the substrate; and
bonding the sheet array of substrate-based coils to the substrate.
5. The method of claim 4 , wherein the bonding the sheet array of substrate-based coils to the substrate comprises performing a reflow process to apply solder and heat to the pillar interconnects and the substrate contacts to mechanically and electrically bond the sheet array of substrate-based coils to the substrate.
6. The method of claim 1 , further comprising forming the sheet array of substrate-based coils, wherein the forming comprises:
forming first coil portions in a first dielectric layer;
forming coil interconnects in second dielectric layer over the first dielectric layer; and
forming second coil portions in a third dielectric layer over the second dielectric layer, where a respective coil interconnect connects a first coil portion and a second coil portion for each of the first coil portions and the second coil portions to form the sheet array of substrate-based coils.
7. The method of claim 6 , further comprising forming pillar interconnects in a fourth dielectric layer over the third dielectric layer, including: a first pillar interconnect extending from an end of one of the first coil portions; and a second pillar interconnect extending from an end of one of the second coil portions.
8. The method of claim 7 , wherein the first coil portions, the coil interconnects, the second coil portions, and the pillar interconnects are formed by one of printing, etching and depositing, or plating.
9. The method of claim 6 , wherein the first coil portions have respective first ends terminating at a periphery of the first dielectric layer, the second coil portions have respective first ends terminating at a periphery of the third dielectric layer at an opposite side than the respective first ends of the first coil portions, the respective first ends of the first coil portions connect to the substrate via a first substrate interconnect, and the respective first ends of the second coil portions connect to the substrate via a second substrate interconnect.
10. The method of claim 9 , wherein the first coil portions have respective second ends terminating proximate a center of the first dielectric layer, and the second coil portions have respective second ends terminating proximate a center of the third dielectric layer.
11. The method of claim 6 , wherein forming the first coil portions in the first dielectric layer and forming the second coil portions in the third dielectric layer forms a gap between the first coil portions and the second coil portions creating a high inductance.