Semiconductor structure
A semiconductor structure is disclosed. The semiconductor structure includes an interposer substrate having an upper surface and a lower surface that is opposite to the upper surface. A guard ring is formed in the interposer substrate and surrounds a device region of the interposer substrate. At least a through-silicon via is formed in the interposer substrate. An end of the guard ring and an end of the through-silicon via that are near the upper surface of the interposer substrate are flush with each other.
1. A semiconductor structure, comprising:
an interposer substrate having an upper surface and a lower surface that is opposite to the upper surface;
a guard ring formed in the interposer substrate and surrounding a device region of the interposer substrate;
an electronic device formed in the device region; and
at least a through-silicon via (TSV) formed in the interposer substrate, wherein an end of the guard ring and an end of the TSV that are near the upper surface of the interposer substrate are flush with each other, and another end of the guard ring and another end of the TSV that are near the lower surface of the interposer substrate are flush with each other.
2. The semiconductor structure according to claim 1 , further comprising an electronic device formed in the device region of the interposer substrate.
3. The semiconductor structure according to claim 2 , wherein the electronic device comprises at least one of a capacitor, a resistor or an inductor.
4. The semiconductor structure according to claim 2 , wherein the electronic device comprises a deep trench capacitor (DTC), and the guard ring and the deep trench capacitor comprise the same materials.
5. The semiconductor structure according to claim 1 , wherein the guard ring and the TSV comprise the same materials.
6. The semiconductor structure according to claim 1 , further comprising a first redistribution layer formed on the upper surface of the interposer substrate, wherein the electronic device, the TSV and the guard ring are electrically connected to the first redistribution layer.
7. The semiconductor structure according to claim 6 , further comprising a first shielding layer disposed in the first redistribution layer and electrically connected to the guard ring.
8. The semiconductor structure according to claim 1 , further comprising a second redistribution layer disposed on the lower surface of the interposer substrate, wherein the TSV and the guard ring are electrically connected to the second redistribution layer.
9. The semiconductor structure according to claim 8 , further comprising a second shielding layer disposed in the second redistribution layer and electrically connected to the guard ring.
10. The semiconductor structure according to claim 8 , further comprising a plurality of bumps disposed on the second redistribution layer.
11. The semiconductor structure according to claim 1 , wherein the guard ring is electrically connected to a ground voltage.
12. The semiconductor structure according to claim 1 , wherein the guard ring has a closed-ring shape from a top view.
13. The semiconductor structure according to claim 1 , further comprising at least an assistant guard ring surrounding the guard ring, wherein the assistant guard ring and the guard ring form a multiple concentric ring structure surrounding the device region.
14. The semiconductor structure according to claim 13 , wherein the assistant guard ring has a non-continuous ring shape.