Integrated circuit package and method
In an embodiment, a device includes: a bottom integrated circuit die having a first front side and a first back side; a top integrated circuit die having a second front side and a second back side, the second back side being bonded to the first front side, the top integrated circuit die being free from through substrate vias (TSVs); a dielectric layer surrounding the top integrated circuit die, the dielectric layer being disposed on the first front side, the dielectric layer and the bottom integrated circuit die being laterally coterminous; and a through via extending through the dielectric layer, the through via being electrically coupled to the bottom integrated circuit die, surfaces of the through via, the dielectric layer, and the top integrated circuit die being planar.
1. A device comprising:
a bottom integrated circuit die having a first front side and a first back side;
a top integrated circuit die having a second front side and a second back side, the second back side being bonded to the first front side, the top integrated circuit die being free from through substrate vias (TSVs);
a dielectric layer surrounding the top integrated circuit die, the dielectric layer being disposed on the first front side, the dielectric layer and the bottom integrated circuit die being laterally coterminous; and
a through via extending through the dielectric layer, the through via being electrically coupled to the bottom integrated circuit die, surfaces of the through via, the dielectric layer, and the top integrated circuit die being planar.
2. The device of claim 1 , wherein the second back side is bonded to the first front side by an adhesive.
3. The device of claim 1 , wherein the top integrated circuit die comprises a semiconductor substrate, and the bottom integrated circuit die comprises a first bonding layer at the first front side, the semiconductor substrate being directly bonded to the first bonding layer.
4. The device of claim 1 , wherein the bottom integrated circuit die comprises a first bonding layer at the first front side, and the top integrated circuit die comprises a second bonding layer at the second back side, the first bonding layer being directly bonded to the second bonding layer.
5. The device of claim 4 , wherein the top integrated circuit die comprises a semiconductor substrate and an alignment mark in the semiconductor substrate, the alignment mark and the second bonding layer being a continuous dielectric material.
6. The device of claim 1 further comprising:
a semiconductor substrate having a third front side and a third back side, the third back side being bonded to the first front side, the through via extending through the semiconductor substrate, surfaces of the dielectric layer and the semiconductor substrate being planar, the semiconductor substrate being free from active devices and from passive devices.
7. The device of claim 1 wherein the bottom integrated circuit die comprises:
a semiconductor substrate; and
an interconnect structure on the semiconductor substrate, the interconnect structure comprising a contact pad, the through via being physically and electrically coupled to the contact pad.
8. The device of claim 1 wherein the bottom integrated circuit die comprises:
a semiconductor substrate;
an interconnect structure on the semiconductor substrate, the interconnect structure comprising a contact pad; and
a die connector on the contact pad, the through via being physically and electrically coupled to the die connector.
9. The device of claim 1 further comprising:
a redistribution structure on the top integrated circuit die, the dielectric layer, and the through via, the redistribution structure comprising metallization patterns, the metallization patterns being physically and electrically coupled to the through via and the top integrated circuit die.
10. A device comprising:
a die stack comprising:
a bottom integrated circuit die;
a top integrated circuit die on the bottom integrated circuit die, a back side of the top integrated circuit die being bonded to a front side of the bottom integrated circuit die, the bottom integrated circuit die being wider than the top integrated circuit die, the top integrated circuit die comprising a first die connector;
a first through via adjacent the top integrated circuit die, the first through via being physically and electrically coupled to the bottom integrated circuit die; and
a first dielectric layer surrounding the first through via, the first dielectric layer physically separating the first through via from the top integrated circuit die; and
a redistribution structure comprising:
a metallization pattern on the die stack, the metallization pattern electrically coupling the first die connector to the first through via; and
a second dielectric layer on the metallization pattern and the first dielectric layer,
wherein the die stack is free of solder.
11. The device of claim 10 , wherein the metallization pattern comprises conductive features having a pitch in a range of about 0.8 μm to about 5 μm.
12. The device of claim 10 further comprising:
an encapsulant surrounding the die stack, the encapsulant and the second dielectric layer being laterally coterminous.
13. The device of claim 12 further comprising:
a second through via extending through the encapsulant, the second through via being electrically coupled to the metallization pattern.
14. The device of claim 10 , wherein the first dielectric layer, the second dielectric layer, and the bottom integrated circuit die are laterally coterminous.
15. The device of claim 10 , wherein a top surface of the first dielectric layer is coplanar with a top surface of the first through via and a top surface of the first die connector, and the metallization pattern has a line portion extending along the top surface of the first dielectric layer, the top surface of the first through via, and the top surface of the first die connector.
16. A device comprising:
a first integrated circuit die;
a second integrated circuit die bonded to the first integrated circuit die in a back-to-face manner;
a dielectric layer around the second integrated circuit die, the dielectric layer and the first integrated circuit die being laterally coterminous; and
a conductive via extending through the dielectric layer, the conductive via connected to the first integrated circuit die, a top surface of the conductive via coplanar with a top surface of the dielectric layer and a top surface of the second integrated circuit die.
17. The device of claim 16 , wherein the second integrated circuit die is free from through substrate vias (TSVs).
18. The device of claim 16 , wherein the second integrated circuit die is bonded to the first integrated circuit die with dielectric-to-dielectric bonds that are free of solder.
19. The device of claim 16 further comprising:
a redistribution structure on the dielectric layer and the second integrated circuit die, the redistribution structure comprising redistribution lines connected to the conductive via and the second integrated circuit die, the redistribution lines having a pitch in a range of about 0.8 μm to about 5 μm.
20. The device of claim 19 further comprising:
an encapsulant around the first integrated circuit die and the dielectric layer, the redistribution structure disposed on the encapsulant.