Structured pedestal for MTJ containing devices
View Patent ↗A magnetic tunnel junction (MTJ) containing device is provided that includes an undercut conductive pedestal structure having a concave sidewall positioned between a bottom electrode and a MTJ pillar. The geometric nature of such a conductive pedestal structure makes the pedestal structure unlikely to be resputtered and deposited on a sidewall of the MTJ pillar, especially the sidewall of the tunnel barrier of the MTJ pillar. Thus, electrical shorts caused by depositing resputtered conductive metal particles on the sidewall of the tunnel barrier of the MTJ pillar are substantially reduced.
1. A method of forming a magnetic tunnel junction (MTJ) containing device, the method comprising:
forming a structure comprising a conductive layer located on a bottom electrode, a multilayered magnetic tunnel junction (MTJ) stack located on the conductive layer, and a top electrode located on the multilayered MTJ stack;
etching the multilayered MTJ stack and the conductive layer to provide a MTJ pillar and a conductive pedestal having a tapered sidewall, respectively;
forming a passivation material spacer on a sidewall of each of the top electrode and the MTJ pillar, and on an upper portion of the tapered sidewall of the conductive pedestal; and
etching the conductive pedestal having the tapered sidewall to provide a conductive pedestal structure having a concave sidewall.
2. The method of claim 1 , wherein the bottom electrode is located on a surface of an electrically conductive structure.
3. The method of claim 2 , wherein the electrically conductive structure is embedded in an interconnect dielectric material layer.
4. The method of claim 1 , wherein the conductive pedestal structure is hour-glass shaped.
5. The method of claim 1 , wherein the MTJ stack comprises a magnetic reference layer, a tunnel barrier layer, and a magnetic free layer, wherein the magnetic reference layer forms an interface with the conductive layer.
6. The method of claim 1 , wherein the MTJ stack comprises a magnetic reference layer, a tunnel barrier layer, and a magnetic free layer, wherein the magnetic free layer forms an interface with the conductive layer.
7. The method of claim 1 , wherein the concave sidewall of the conductive pedestal structure is located directly beneath the passivation spacer.
8. The method of claim 1 , wherein the etching of the multilayered MTJ stack and the underlying conductive layer utilizes the top electrode as an etch mask.
9. The method of claim 8 , wherein the etching comprises one or more reactive ion etching processes.
10. The method of claim 1 , wherein the top electrode and the MTJ pillar are both cylindrical in shape.
11. The method of claim 1 , wherein the forming of the passivation material spacer comprises:
forming a passivation material layer on physically exposed surfaces of the top electrode, the MTJ pillar and the conductive pedestal having tapered sidewall; and
etching the passivation material layer to provide the passivation material spacer.
12. The method of claim 1 , wherein the tapered sidewall of the conductive pedestal extends outward from a topmost surface of the conductive pedestal to a bottommost surface of the conductive pedestal.
13. The method of claim 1 , wherein the conductive pedestal structure is located entirely on the bottom electrode.
14. The method of claim 1 , wherein no resputtered conductive metal particles are present on a sidewall of the MTJ pillar.
15. The method of claim 1 , wherein the passivation material spacer is thinned by the etching of the conductive pedestal.
16. The method of claim 1 , further comprising performing an angled ion beam etch to remove residual metallic particles from the MTJ pillar, wherein the angled ion beam etch is performed after the etching of the conductive pedestal.
17. The method of claim 1 , wherein an angle between a bottommost surface of the conductive pedestal and the tapered sidewall is from 25° to 85°.
18. The method of claim 1 , wherein the conductive pedestal has a lateral dimension that is greater than a lateral dimension of each of the bottom electrode, the MTJ pillar and the top electrode.
19. The method of claim 1 , wherein the conductive pedestal has a pyramidal shape having a thickness that decreases from a bottommost surface upwards to the topmost surface.
20. A method of forming a magnetic tunnel junction (MTJ) containing device, the method comprising:
forming a structure comprising a conductive layer located on a bottom electrode, a multilayered magnetic tunnel junction (MTJ) stack located on the conductive layer, and a top electrode located on the multilayered MTJ stack;
etching the multilayered MTJ stack and the conductive layer to provide a MTJ pillar and a conductive pedestal having a tapered sidewall, respectively, wherein the conductive pedestal has a pyramidal shape having a thickness that decreases from a bottommost surface upwards to the topmost surface.
forming a passivation material spacer on a sidewall of each of the top electrode and the MTJ pillar, and on an upper portion of the tapered sidewall of the conductive pedestal; and
etching the conductive pedestal having the tapered sidewall to provide a conductive pedestal structure having a concave sidewall and an hour-glass shape.