Metal oxide (MO semiconductor and thin-film transistor and application thereof
The present invention discloses a metal oxide (MO) semiconductor, which is obtained by doping a small amount of rare-earth oxide (RO) as a photo-induced carrier transportion center into an indium-containing MO semiconductor to form a (In 2 O 3 ) x (MO) y (RO) z semiconductor material. According to the present invention, a charge transportion center can be formed by utilizing the characteristics that the radius of rare-earth ions is equal to that of indium ions, and 4f orbitals in the rare-earth ions and 5s orbitals of the indium ions, so as to improve the stability under illumination. The present invention further provides a thin-film transistor based on the MO semiconductor and application thereof.
1. A metal oxide (MO) semiconductor, wherein the MO semiconductor is obtained by doping an amount of rare-earth oxide (RO) as a photo-induced carrier transportion center into an indium-containing MO—In 2 O 3 semiconductor to form a (In 2 O 3 ) x (MO) y (RO) z semiconductor material, wherein x+y+z=1, 0.5≤x<0.9999, 0≤y<0.5, and 0.0001≤z≤0.2, and the photo-induced carrier transportion center is located in a region from a bottom of a conduction band of the (In 2 O 3 ) x (MO) y (RO) z semiconductor material to 0.8 eV below the conduction band of the (In 2 O 3 ) x (MO) y (RO) z semiconductor material.
2. The MO semiconductor of claim 1 , wherein in the MO, M is at least one material selected from the group consisting of Zn, Ga, Sn, Ge, Sb, Al, Mg, Ti, Zr, Hf, Ta and W.
3. The MO semiconductor of claim 1 , wherein the RO is at least one material selected from the group consisting of praseodymium oxide, terbium oxide, cerium oxide and dysprosium oxide, or the RO is at least one material selected from the group consisting of samarium oxide, europium oxide and ytterbium oxide.
4. The MO semiconductor of claim 1 , wherein 0.001≤z≤0.1.
5. The MO semiconductor of claim 4 , wherein 0.01≤z≤0.05.
6. The MO semiconductor of claim 1 , wherein the MO semiconductor is prepared into a film by adopting any one of a physical vapor deposition process, a chemical vapor deposition process, an atomic layer deposition process, a laser deposition process, a Reactive-Plasma Deposition (RPD) process and a solution method.
7. A thin-film transistor, comprising
a gate electrode,
an active layer,
an insulating layer located between the gate electrode and the active layer,
a source electrode and
a drain electrode electrically connected to both ends of the active layer respectively, and a spacer layer, wherein the active layer is the MO semiconductor of claim 1 .
8. The thin-film transistor of claim 7 , wherein the spacer layer is at least one layer structure selected from the group consisting of a silicon oxide thin-film, a silicon nitride thin-film and a silicon oxynitride thin-film prepared by plasma-enhanced chemical vapor deposition or a laminated structure.
9. The thin-film transistor of claim 7 is in a display panel or a detector.
10. The MO semiconductor of claim 1 , wherein the semiconductor is aluminum free.