Structures and methods for high speed interconnection in photonic systems

1. A photonic device, comprising:

a substrate;

a plurality of metal layers on the substrate;

a contact layer comprising a plurality of contacts over the plurality of metal layers;

a photonic material layer comprising graphene on the contact layer; and

an optical routing layer comprising a waveguide on the photonic material layer, wherein

the photonic material layer comprises: a first photonic material sublayer, a first dielectric sublayer, a second photonic material sublayer, and a second dielectric sublayer,

the second dielectric sublayer is formed on and in contact with both the first dielectric sublayer and the second photonic material sublayer, and

each of the first photonic material sublayer and the second photonic material sublayer is formed on and in contact with the contact layer.

2. The photonic device of claim 1 , wherein:

the substrate is made of bulk silicon.

3. The photonic device of claim 1 , further comprising:

an optical isolation layer on the plurality of metal layers.

4. The photonic device of claim 3 , wherein the optical isolation layer comprises silicon oxide with a thickness of at least one micrometer.

5. The photonic device of claim 3 , further comprising:

a plurality of metal vias extending through the optical isolation layer and onto the plurality of metal layers, wherein each of the plurality of metal vias comprises at least one inter-level metal layer over the plurality of metal layers.

6. The photonic device of claim 5 ,

wherein each of the plurality of contacts is formed on and in contact with a corresponding one of the plurality of metal vias.

7. The photonic device of claim 6 , wherein each of the plurality of contacts comprises at least one of: nickel, palladium, or chromium.

8. The photonic device of claim 6 , wherein the photonic material layer comprises:

at least one graphene sublayer comprising graphene; and

at least one dielectric sublayer comprising a dielectric material.

9. The photonic device of claim 6 , wherein the waveguide and the photonic material layer form at least one of: a modulator or a photodetector.

10. The photonic device of claim 1 , further comprising:

an optical cladding layer on the optical routing layer, wherein the optical cladding layer comprises silicon oxide with a thickness of at least one micrometer; and

a top metal routing layer on the optical cladding layer.

11. An optical communication system, comprising:

an electrical to optical convertor; and

an optical to electrical convertor, wherein each of the electrical to optical convertor and the optical to electrical convertor comprises:

a bulk silicon substrate,

a plurality of metal layers on the bulk silicon substrate,

a contact layer comprising a plurality of contacts over the plurality of metal layers,

a plurality of waveguides over the contact layer, and

a photonic material layer comprising graphene located below a top surface of each of the plurality of waveguides, wherein

the photonic material layer comprises: a first photonic material sublayer, a first dielectric sublayer, a second photonic material sublayer, and a second dielectric sublayer,

the second dielectric sublayer is formed on and in contact with both the first dielectric sublayer and the second photonic material sublayer, and

each of the first photonic material sublayer and the second photonic material sublayer is formed on and in contact with the contact layer.

12. The optical communication system of claim 11 , wherein:

the electrical to optical convertor is configured for converting electrical signals into optical signals, based on a continuous wave light input;

the plurality of waveguides in the electrical to optical convertor forms first N channels for transmitting optical signals;

the plurality of waveguides in the optical to electrical convertor forms second N channels for transmitting optical signals; and

the optical to electrical convertor is configured for converting optical signals into electrical signals.

13. The optical communication system of claim 12 , further comprising:

an optical coupler that is coupled between the electrical to optical convertor and the optical to electrical convertor and is configured for an inter-chip optical communication;

a signal multiplexer that is coupled between the electrical to optical convertor and the optical coupler, and configured for multiplexing the first N channels into a single channel; and

a signal de-multiplexer that is coupled between the optical coupler and the optical to electrical convertor, and configured for de-multiplexing the single channel into the second N channels.

14. The optical communication system of claim 11 , wherein:

the photonic material layer comprises graphene located below a bottom surface of at least one of the plurality of waveguides.

15. The optical communication system of claim 11 , wherein:

the photonic material layer comprises graphene located at a center of at least one of the plurality of waveguides.

16. A method for forming a photonic device, comprising:

forming a plurality of metal layers on a bulk silicon substrate;

depositing a contact layer comprising a plurality of metal contacts over the plurality of metal layers;

forming a photonic material layer comprising at least one two-dimensional material on the contact layer, wherein

the photonic material layer comprises: a first photonic material sublayer, a first dielectric sublayer, a second photonic material sublayer, and a second dielectric sublayer,

the second dielectric sublayer is formed on and in contact with both the first dielectric sublayer and the second photonic material sublayer,

each of the first photonic material sublayer and the second photonic material sublayer is formed on and in contact with the contact layer; and

depositing, according to a structure pattern, an optical routing material onto the photonic material layer to form an optical routing layer comprising a plurality of waveguides.

17. The method of claim 16 , further comprising:

depositing an optical isolation layer on the plurality of metal layers, wherein the optical isolation layer comprises silicon oxide with a thickness of at least one micrometer;

etching the optical isolation layer to form a pattern; and

forming, according to the pattern, a plurality of metal vias extending through the optical isolation layer and onto the plurality of metal layers, wherein each of the plurality of metal vias comprises at least one inter-level metal layer over the plurality of metal layers, wherein:

each of the plurality of metal contacts is deposited, according to the pattern, on and in contact with a corresponding one of the plurality of metal vias, and

each of the plurality of metal contacts comprises at least one of: nickel, palladium, or chromium.

18. The method of claim 16 , wherein forming the photonic material layer comprises:

depositing a first two-dimensional material onto the contact layer according to a first pattern to form the first photonic material sublayer;

annealing the first photonic material sublayer at a temperature between 200 degrees Celsius and 300 degrees Celsius;

depositing a first dielectric material onto the first photonic material sublayer to form the first dielectric sublayer;

etching the first dielectric sublayer to form a second pattern;

depositing a second two-dimensional material onto the first dielectric sublayer according to the second pattern to form the second photonic material sublayer;

annealing the second photonic material sublayer at a temperature between 200 degrees Celsius and 300 degrees Celsius;

depositing a second dielectric material onto the second photonic material sublayer and the first dielectric sublayer to form the second dielectric sublayer.

19. The method of claim 18 , further comprising:

depositing silicon oxide onto the second dielectric sublayer;

etching the silicon oxide to form the structure pattern according to which the optical routing material is deposited onto the second dielectric sublayer, wherein:

the optical routing material comprises at least one of: silicon (Si) nitride, aluminum oxide, polycrystalline-Si, amorphous-Si, Si-rich silicon oxide, or an organic material, and

the optical routing material is same as the first dielectric material and the second dielectric material.

20. The method of claim 16 , further comprising:

depositing an optical cladding layer on the optical routing layer, wherein the optical cladding layer comprises silicon oxide with a thickness of at least one micrometer; and forming a top metal routing layer on the optical cladding layer.