IP Library › Granted Patent US 11,562,941
Granted Patent B2
US 11,562,941 · App. 17/168,186 · Granted Jan 24, 2023

Semiconductor packages having thermal conductive patterns surrounding the semiconductor die

Inventors: Jing-Cheng Lin (Hsinchu, TW); Szu-Wei Lu (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L23/4334H01L21/561H01L21/568H01L23/3121H01L23/3135H01L23/3675H01L24/24H01L24/25H01L25/105H01L25/18H01L2224/24175H01L2224/25171H01L2224/82005H01L2225/1035H01L2225/1041H01L2225/1058
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Quick Facts
Patent No.
US 11,562,941
App. No.
17/168,186
Granted
Jan 24, 2023
Kind
B2
Abstract

A semiconductor package includes a semiconductor die, a first thermal conductive pattern and a second thermal conductive pattern. The semiconductor die is encapsulated by an encapsulant. The first thermal conductive pattern is disposed aside the semiconductor die in the encapsulant. The second thermal conductive pattern is disposed over the semiconductor die, wherein the first thermal conductive pattern is thermally coupled to the semiconductor die through the second thermal conductive pattern and electrically insulated from the semiconductor die.

Claims (32)

1. A semiconductor package, comprising:

a semiconductor die, encapsulated by an encapsulant;

a first thermal conductive pattern aside the semiconductor die in the encapsulant; and

a second thermal conductive pattern over the semiconductor die, wherein the first thermal conductive pattern is thermally coupled to the semiconductor die through the second thermal conductive pattern and electrically insulated from the semiconductor die, and a material of the first thermal conductive pattern is different from a material of the second thermal conductive pattern.

2. The semiconductor package as claimed in claim 1 , wherein a portion of the second thermal conductive pattern is extended over the encapsulant.

3. The semiconductor package as claimed in claim 1 , wherein the first thermal conductive pattern comprises a plurality of through vias penetrating through the encapsulant.

4. The semiconductor package as claimed in claim 1 , wherein the second thermal conductive pattern is in direct contact with the first thermal conductive pattern and the semiconductor die.

5. The semiconductor package as claimed in claim 1 , wherein a top surface of the encapsulant is disposed between a top surface of the semiconductor die and a top surface of the second thermal conductive pattern.

6. The semiconductor package as claimed in claim 1 further comprising an adhesive material between the semiconductor die and the second thermal conductive pattern.

7. The semiconductor package as claimed in claim 1 further comprising a dummy pattern and a redistribution pattern below the semiconductor die, wherein the first thermal conductive pattern is in direct contact with the dummy pattern and insulated from the redistribution pattern.

8. A semiconductor package, comprising:

a semiconductor die;

a through via, disposed aside and electrically connected to the semiconductor die;

a heat dissipation pattern, disposed between and electrically insulated from the semiconductor die and the through via; and

a heat dissipation material over the semiconductor die, wherein the heat dissipation pattern is thermally coupled to the semiconductor die through the heat dissipation material.

9. The semiconductor package as claimed in claim 8 further comprising an encapsulant encapsulating the semiconductor die, the heat dissipation pattern and the through via.

10. The semiconductor package as claimed in claim 8 , wherein the heat dissipation material is in direct contact with the heat dissipation pattern.

11. The semiconductor package as claimed in claim 8 , wherein the heat dissipation material comprises a first portion covering the semiconductor die and a second portion covering the heat dissipation pattern, and the first portion is thicker than the second portion.

12. The semiconductor package as claimed in claim 8 , wherein the heat dissipation pattern is a thermal conductive through via, and the heat dissipation material is a conductive paste.

13. A semiconductor package, comprising:

a semiconductor die, encapsulated by an encapsulant;

a semiconductor device over the semiconductor die and the encapsulant;

a plurality of through vias embedded in the encapsulant, surrounding the semiconductor die and electrically connected to the semiconductor device;

a thermal conductive pattern embedded in the encapsulant and electrically insulated from the semiconductor die; and

a thermal conductive material between the semiconductor die and the semiconductor device, wherein the thermal conductive pattern is thermally coupled to the semiconductor die through the thermal conductive material.

14. The semiconductor package as claimed in claim 13 , wherein the thermal conductive pattern is disposed between the semiconductor die and the plurality of through vias.

15. The semiconductor package as claimed in claim 13 , wherein the thermal conductive pattern comprises a plurality of discrete thermal conductive through vias surrounding the semiconductor die.

16. The semiconductor package as claimed in claim 13 , wherein the thermal conductive pattern comprises a ring-shaped structure surrounding the semiconductor die.

17. The semiconductor package as claimed in claim 13 , wherein the thermal conductive pattern comprises a plurality of discrete wall-shaped structures.

18. The semiconductor package as claimed in claim 13 further comprising an underfill between the thermal conductive material and the semiconductor device.

19. The semiconductor package as claimed in claim 13 , wherein a material of the thermal conductive pattern is the same as a material of the plurality of through vias.

20. The semiconductor package as claimed in claim 13 , wherein the thermal conductive material is a conductive paste.

Continuity (3)
Continuation 16431747 · Jun 5, 2019
Provisional Application 62691627 · Jun 29, 2018
Related Publication 20210159147A1 · May 27, 2021