Semiconductor device having conductive oxide electrode layers in direct contact with oxide semiconductor layer
An object is to provide a semiconductor device with high aperture ratio or a manufacturing method thereof. Another object is to provide semiconductor device with low power consumption or a manufacturing method thereof. A light-transmitting conductive layer which functions as a gate electrode, a gate insulating film formed over the light-transmitting conductive layer, a semiconductor layer formed over the light-transmitting conductive layer which functions as the gate electrode with the gate insulating film interposed therebetween, and a light-transmitting conductive layer which is electrically connected to the semiconductor layer and functions as source and drain electrodes are included.
1. A semiconductor device comprising:
a gate electrode;
a first insulating layer over the gate electrode;
an oxide semiconductor layer over the first insulating layer;
a first conductive layer over and in direct contact with the oxide semiconductor layer;
a second conductive layer over and in direct contact with the oxide semiconductor layer;
a metal layer over and in direct contact with the first conductive layer;
a second insulating layer comprising silicon nitride over the first conductive layer, the second conductive layer, and the metal layer; and
a pixel electrode over the second insulating layer,
wherein a light transmittance of the first conductive layer is higher than a light transmittance of the metal layer,
wherein each of the first conductive layer and the second conductive layer is an oxide layer comprising indium and zinc,
wherein the metal layer comprises copper, and
wherein the first conductive layer comprises a region in which the first conductive layer and the metal layer do not overlap with each other.
2. The semiconductor device according to claim 1 , wherein the pixel electrode is electrically connected with the second conductive layer through a contact hole in the second insulating layer.
3. The semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises indium, gallium, and zinc.
4. The semiconductor device according to claim 1 , wherein the pixel electrode comprises a region overlapping with the oxide semiconductor layer.
5. The semiconductor device according to claim 1 , wherein the pixel electrode comprises the same material as the second conductive layer.
6. The semiconductor device according to claim 1 , wherein the metal layer does not overlap with the oxide semiconductor layer.
7. The semiconductor device according to claim 1 , wherein all side edges of the metal layer recedes from all side edges of the first conductive layer.
8. The semiconductor device according to claim 1 , wherein the gate electrode comprises a first layer and a second layer over the first layer.
9. The semiconductor device according to claim 1 , wherein the first conductive layer is included in a source electrode.
10. The semiconductor device according to claim 1 , wherein the metal layer does not directly contact with the oxide semiconductor layer.