Separation method and assembly for chip-on-wafer processing
A method for separating semiconductor die stacks of a chip-on-wafer assembly is disclosed herein. In one example, divider walls are arranged in a pattern on a first surface of a device wafer such that regions between the divider walls define mounting sites. Die stacks are mounted to the device wafer, wherein individual die stacks are located at a corresponding mounting site between the divider walls. The device wafer is cut through from a second surface that is opposite the first surface of the device wafer, and the divider walls are removed from between the die stacks to form a vacant lane between adjacent die stacks.
1. A method for separating semiconductor die stacks of a chip-on-wafer assembly, comprising:
mounting a carrier wafer on a second surface of a device wafer;
arranging divider walls in a pattern on a first surface of a device wafer such that regions between the divider walls define mounting sites, the first surface opposite the second surface;
mounting the die stacks to the first surface of the device wafer after arranging the divider walls, wherein each individual die stack of the die stacks is located at a corresponding mounting site between the divider walls;
removing the carrier wafer from the second surface of the device wafer;
after removing the carrier wafer from the device wafer, cutting through the device wafer from the second surface; and
removing the divider walls from between the die stacks after cutting through the device wafer thereby forming a vacant lane between adjacent pairs of the die stacks.
2. The method of claim 1 , wherein the divider walls are arranged on the first surface of the device wafer prior to mounting the die stacks.
3. The method of claim 1 , further comprising:
pre-forming the divider walls into the pattern prior to arranging the divider walls on the first surface of the device wafer; and
adhering the divider walls to the first surface of the device wafer.
4. The method of claim 1 , further comprising molding a molding material over a top surface of each of the die stacks and the divider walls, and wherein the cutting through the device wafer is accomplished after the molding material is applied.
5. The method of claim 1 , wherein the divider walls have a height that is greater than a height of the die stacks.
6. The method of claim 1 , wherein a width of the divider walls between each of the die stacks is less than a distance between the die stacks, the method further comprising molding a molding material over a top surface of each of the die stacks and the divider walls, the molding material extending between the divider walls and side portions of each of the die stacks.
7. The method of claim 1 , wherein the divider walls are water soluble, solvent dissolvable, or removable using an etching process.
8. The method of claim 1 , the method further comprising:
molding a molding material over a top surface of each of the die stacks and the divider walls; and
thinning at least the molding material to expose at least a top surface of the divider walls.
9. The method of claim 1 , wherein the divider walls form an integral interface with at least one side of an adjacent die stack.
10. A method for separating semiconductor die stacks of a chip-on-wafer assembly, comprising:
mounting a carrier wafer on a second surface of a device wafer;
dispensing a divider wall material into intersecting lines of a pattern to form divider walls on a first surface of the device wafer;
mounting the die stacks to a first surface of the device wafer after dispensing the divider wall material, the die stacks having lanes therebetween that define the intersecting lines of the pattern; and
separating the carrier wafer from the device wafer; after separating the carrier wafer from the device wafer, cutting through the device wafer from the second surface of the device wafer to the first surface; and
removing the divider walls after the cutting through the device wafer.
11. The method of claim 10 , further comprising removing the divider walls using water, solvent, dry etch, or plasma etch.
12. The method of claim 10 , further comprising:
applying a carrier film over a top surface of the die stacks prior to the removing the carrier wafer, the carrier film being attached to a dicing frame.
13. The method of claim 10 , further comprising applying a molding material over a top surface of each of the die stacks and the divider walls, wherein the molding material does not extend between each of the die stacks and the divider walls.
14. The method of claim 10 , further comprising applying a molding material over a top surface of each of the die stacks and the divider walls, wherein the molding material forms side portions between each of the die stacks and the divider walls.