IP Library Granted Patent US 11,728,201
Granted Patent B2
US 11,728,201 · App. 17/164,269 · Granted Aug 15, 2023

Methods for releasing ultra-small or ultra-thin discrete components from a substrate

Inventor: Val Marinov (Fargo, ND)
Assignee: Kulicke and Soffa Industries, Inc.
H01L21/6836B32B37/025B32B37/12B32B38/0004B32B38/10B32B38/1858H01L21/67144H01L21/6835H01L24/83B32B2037/268B32B2038/0016B32B2038/045B32B2307/40B32B2310/0831B32B2457/14H01L2221/68318H01L2221/68327H01L2221/68354H01L2221/68368H01L2221/68381H01L2224/2919H01L2224/32225H01L2224/75251H01L2224/75314H01L2224/75317H01L2224/83005H01L2224/83192H01L2224/83203H01L2224/83874
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Quick Facts
Patent No.
US 11,728,201
App. No.
17/164,269
Granted
Aug 15, 2023
Kind
B2
Abstract

Among other things a method including releasing a discrete component from an interim handle and depositing a discrete component on a handle substrate, attaching the handle substrate to the discrete component, and removing the handle substrate from the discrete component.

Claims (28)

1. A method comprising:

providing a first substrate, a release layer attached to the first substrate, and a discrete component attached to the release layer;

providing a device substrate and an adhesive layer attached to the device substrate; and

applying a stimulus to the release layer, the stimulus causing the release layer to undergo a change in state at least partially concurrently with a change in state of the adhesive layer attached to the device substrate,

in which the change in state of the release layer is a change to a state in which the release layer has an adhesion that is not sufficient to adhere the discrete component to the first substrate, and in which the change in state of the adhesive layer is a change to a state in which the adhesive layer has an adhesion that is sufficient to adhere the discrete component to the device substrate.

2. The method of claim 1 , in which the discrete component has an ultra-thin, an ultra-small, or an ultra-thin and ultra-small configuration.

3. The method of claim 1 , in which at least one side of the first substrate has a length longer than at least one side of the discrete component.

4. The method of claim 1 , in which applying the stimulus to the release layer comprises applying thermal energy, UV light, or both.

5. The method of claim 1 , in which the stimulus causes the change in state of the adhesive layer.

6. The method of claim 1 , in which the discrete component comprises an integrated circuit on a face of the discrete component in contact with the release layer.

7. The method of claim 1 , in which the change in state of the adhesive layer comprises a curing of the adhesive layer.

8. The method of claim 1 , comprising applying the stimulus by a bonding tool in contact with the first substrate.

9. The method of claim 1 , comprising applying a second stimulus through the device substrate, the second stimulus causing the change in state of the adhesive layer.

10. The method of claim 1 , comprising applying the stimulus while the discrete component is in contact with the adhesive layer.

11. A method comprising:

providing a substrate, a release layer attached to the substrate, and a discrete component releasably attached to the substrate by the release layer,

in which the release layer comprises multiple layers, in which a first layer of the multiple layers is a permanent adhesive and a second layer of the multiple layers is at least one of thermally sensitive and UV light sensitive, and

in which the discrete component has an ultra-thin, an ultra-small, or an ultra-thin and ultra-small configuration; and

applying a stimulus to the release layer, the stimulus causing the release layer to release the discrete component such that, subsequent to being released from the release layer, the discrete component is in contact with neither the first layer nor the second layer.

12. The method of claim 11 , in which the first layer of the release layer is attached to the substrate, and in which the discrete component is releasably attached to the second layer of the release layer.

13. The method of claim 11 , in which the discrete component has a thickness less than 50 microns.

14. The method of claim 11 , in which the discrete component comprises an integrated circuit on a face of the discrete component in contact with the release layer.

15. The method of claim 11 , in which applying the stimulus comprises causing the release layer to melt.

16. The method of claim 11 , in which applying the stimulus comprises applying a normal force, a shear force, or a normal and shear force to the discrete component.

17. The method of claim 11 , in which applying the stimulus comprises applying thermal energy, UV light, or both.

18. The method of claim 11 , in which applying the stimulus causes a decrease in an adhesive strength of the second layer of the release layer.

19. The method of claim 11 , in which the release layer remains attached to the substrate in response to the stimulus.

20. The method of claim 11 , in which a bond strength between the discrete component and the release layer is less than a bond strength between the release layer and the substrate.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 5, 2021
From: UNIQARTA, INC.
To: KULICKE AND SOFFA INDUSTRIES, INC.
Reel/Frame 057095/0223 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 17, 2021
From: MARINOV, VAL
To: UNIQARTA, INC.
Reel/Frame 056257/0035 →
Continuity (5)
Continuation 16726474 · Dec 24, 2019
Division 15501330
Provisional Application 62060928 · Oct 7, 2014
Provisional Application 62033595 · Aug 5, 2014
Related Publication 20210265191A1 · Aug 26, 2021
Cited By (1)
US 12,412,772