Semiconductor device
A semiconductor device includes an enhancement mode high electron mobility transistor (HEMT) with an active region and an isolation region. The HEMT includes a substrate, a group III-V body layer, a group III-V barrier layer, a group III-V gate structure and a group III-V patterned structure. The group III-V body layer and the group III-V barrier layer are disposed on the substrate. The group III-V gate structure is disposed on the group III-V barrier layer within the active region. The group III-V patterned structure is disposed on the group III-V barrier layer within the isolation region. The composition of the group III-V patterned structure is the same as the composition of the group III-V gate structure.
1. A semiconductor device, comprising:
an enhancement mode high electron mobility transistor comprising an active region and an isolation region, wherein the enhancement mode high electron mobility transistor comprises:
a substrate;
a group III-V body layer and a group III-V barrier layer disposed on the substrate;
a group III-V gate structure disposed on the group III-V barrier layer in the active region; and
a group III-V patterned structure disposed on the group III-V barrier layer in the isolation region, wherein a composition of the group III-V patterned structure is the same as a composition of the group III-V gate structure.
2. The semiconductor device according to claim 1 , wherein a bottom surface of the group III-V gate structure is aligned with a bottom surface of the group III-V patterned structure.
3. The semiconductor device according to claim 1 , wherein the composition of the group III-V gate structure and the composition of the group III-V patterned structure are p-type GaN or p-type AlGaN.
4. The semiconductor device according to claim 1 , further comprising an etch stop layer disposed between the group III-V patterned structure and the group III-V barrier layer.
5. The semiconductor device of claim 1 , further comprising an etch mask layer disposed on top surfaces of the group III-V gate structure and the group III-V patterned structure.
6. The semiconductor device according to claim 5 , wherein a composition of the etch mask layer comprises silicon nitride or silicon oxide.
7. The semiconductor device of claim 1 , further comprising a passivation layer disposed on the group III-V gate structure and the group III-V patterned structure.
8. The semiconductor device of claim 7 , further comprising an etch mask layer disposed between the passivation layer and the group III-V patterned structure.
9. The semiconductor device according to claim 7 , wherein a composition of the passivation layer comprises aluminum nitride, aluminum oxide or silicon nitride.
10. The semiconductor device according to claim 1 , further comprising another enhancement mode high electron mobility transistor disposed adjacent to one side of the enhancement mode high electron mobility transistor, wherein a portion of the group III-V patterned structure is continuously disposed between the enhancement mode high electron mobility transistors.
11. The semiconductor device of claim 1 , further comprising:
an etch mask layer, disposed on a top surface of the group III-V gate structure; and
a gate electrode, disposed on the group III-V gate structure and passing through the etch mask layer on the top surface of the group III-V gate structure.