Strain gauge with improved stability and stress reduction
A strain gauge includes a flexible substrate, and a resistor formed of material containing at least one from among chromium and nickel, on or above the substrate. The resistor includes a first layer that is a lowermost layer; and a second layer that is a surface layer laminated on or above the first layer. The second layer is a layer having a higher density than the first layer. The first layer has a first surface provided on a side where the flexible resin substrate is situated, the functional layer being laminated on the first surface. The first layer has a second surface on which the second layer is laminated.
1. A strain gauge comprising:
a flexible resin substrate;
a functional layer formed of a metal, an alloy, or a metal compound, on one surface of the substrate; and
a resistor formed as a film containing Cr, CrN, and Cr 2 N, on one surface of the functional layer,
wherein the resistor includes a first layer that is a lowermost layer; and a second layer that is a surface layer laminated on or above the first layer,
wherein the second layer is a layer having a higher density than the first layer, and
wherein the first layer has
a first surface provided on a side where the flexible resin substrate is situated, the functional layer being laminated on the first surface, and
a second surface on which the second layer is laminated.
2. The strain gauge according to claim 1 , further comprising one or more other layers between the first layer and the second layer, wherein the density gradually increases from the first layer to the second layer.
3. The strain gauge according to claim 1 , wherein one or more lower layers beneath the second layer each have a columnar structure.
4. The strain gauge according to claim 3 , wherein a film thickness of the second layer is half or less than half a total thickness of the layers each having the columnar structure.
5. The strain gauge according to claim 1 , wherein a main component of the resistor is alpha-chromium.
6. The strain gauge according to claim 5 , wherein the resistor includes alpha-chromium at 80% by weight or more.
7. The strain gauge according to claim 1 , wherein the functional layer includes a function of promoting crystal growth of the resistor.
8. The strain gauge according to claim 1 , further comprising an insulating resin layer with which the resistor is coated.