Isolation structure for preventing unintentional merging of epitaxially grown source/drain
A semiconductor device includes a first active region and a second active region disposed over a substrate. A first source/drain component is grown on the first active region. A second source/drain component is grown on the second active region. An interlayer dielectric (ILD) is disposed around the first source/drain component and the second source/drain component. An isolation structure extends vertically through the ILD. The isolation structure separates the first source/drain component from the second source/drain component.
1. A device, comprising:
a first active region, a second active region, a third active region, and a fourth active region;
a first epitaxial component, a second epitaxial component, a third epitaxial component, and a fourth epitaxial component formed on the first active region, the second active region, the third active region, and the fourth active region, respectively; and
a dielectric material disposed between the second epitaxial component and the third epitaxial component;
wherein:
the first epitaxial component and the second epitaxial component are merged together;
the third epitaxial component and the fourth epitaxial component are merged together;
a first outermost lateral portion of the first epitaxial component is pointier than a second outermost lateral portion of the second epitaxial component in a cross-sectional side view; and
a fourth outermost lateral portion of the fourth epitaxial component is pointier than a third outermost lateral portion of the third epitaxial component in the cross-sectional side view.
2. The device of claim 1 , wherein the first outermost lateral portion and the fourth outermost lateral portion each include a pointy tip, respectively.
3. The device of claim 2 , wherein the point tip of the first outermost lateral portion and the pointy tip of the fourth outermost lateral portion point in opposite lateral directions.
4. The device of claim 1 , wherein the second outermost lateral portion and the third outermost lateral portion each include a substantially linear edge, respectively.
5. The device of claim 1 , wherein:
the first epitaxial component is wider than the second epitaxial component; and
the fourth epitaxial component is wider than the third epitaxial component.
6. The device of claim 1 , wherein the dielectric material comprises an interlayer dielectric (ILD), and wherein the ILD further surrounds the first epitaxial component and the fourth epitaxial component.
7. The device of claim 1 , wherein the first, second, third, and fourth epitaxial components are surrounded by an interlayer dielectric (ILD), and wherein the dielectric material comprises an isolation structure that extends vertically through the ILD.
8. The device of claim 7 , wherein the isolation structure has a greater height than the first, second, third, and fourth epitaxial components.
9. The device of claim 7 , wherein:
the isolation structure includes a dielectric segment and a dielectric liner that surrounds the dielectric segment; and
the dielectric liner is in direct physical contact with the second outermost lateral portion and the third outermost lateral portion.
10. The device of claim 9 , wherein the dielectric segment has an air gap embedded therein.
11. The device of claim 1 , further comprising:
a fifth active region and a sixth active region; and
a fifth epitaxial component and a sixth epitaxial component formed over the fifth active region and the sixth active region, respectively;
wherein:
the fifth epitaxial component includes a fifth outermost lateral portion and a sixth outermost lateral portion;
the sixth epitaxial component includes a seventh outermost lateral portion and an eighth outermost lateral portion;
the fifth outermost lateral portion is pointier than the sixth outermost lateral portion;
the eighth outermost lateral portion is pointier than the seventh outermost lateral portion; and
a portion of the dielectric material is further disposed between the fifth epitaxial component and the sixth epitaxial component.
12. The device of claim 1 , wherein:
the device is a FinFET device or a Gate-All-Around (GAA) device; and
the first, second, third, and fourth epitaxial components are source/drains of the FinFET device or the GAA device.
13. A device, comprising:
a first active region, a second active region, a third active region, and a fourth active region each disposed over a substrate;
a first source/drain, a second source/drain, a third source/drain, and a fourth source/drain formed on the first active region, the second active region, the third active region, and the fourth active region, respectively, wherein the first source/drain is merged with the second source/drain in a horizontal direction, wherein the third source/drain is merged with the fourth source/drain in the horizontal direction, wherein the first source/drain is wider than the second source/drain in the horizontal direction, and wherein the fourth source/drain is wider than the third source/drain in the horizontal direction; and
a dielectric structure disposed between the second source/drain and the third source/drain;
wherein the first, second, third, and fourth source/drains are source/drains of FinFET devices or Gate-All-Around (GAA) devices.
14. The device of claim 13 , wherein:
outermost horizontal portions of the first source/drain and the fourth source/drain have substantially pointy tips; and
outermost horizontal portions of the second source/drain and the third source/drain have substantially straight edges.
15. The device of claim 13 , wherein the dielectric structure comprises an interlayer dielectric (ILD).
16. The device of claim 15 , wherein the dielectric structure further comprises an isolation structure that extends vertically through the ILD, wherein the isolation structure and the ILD have different material compositions.
17. The device of claim 16 , wherein the isolation structure includes an air gap embedded therein.
18. The device of claim 16 , wherein an uppermost surface of the dielectric structure is more elevated vertically than uppermost surfaces of the first, second, third, and fourth source/drains.
19. A device, comprising:
a first active region and a second active region that each protrude vertically out of a substrate;
a first epitaxial structure that is grown over the first active region, wherein the first epitaxial structure protrudes farther out in a first horizontal direction than a second horizontal direction opposite the first horizontal direction;
a second epitaxial structure that is grown over the second active region, wherein the second epitaxial structure protrudes farther out in the second horizontal direction than the first horizontal direction; and
a dielectric structure separating the first epitaxial structure from the second epitaxial structure.
20. The device of claim 19 , wherein:
the first epitaxial structure terminates into a first substantially pointy tip in the first horizontal direction;
the first epitaxial structure terminates into a first substantially flat edge in the second horizontal direction;
the second epitaxial structure terminates into a second substantially pointy tip in the second horizontal direction; and
the second epitaxial structure terminates into a second substantially flat edge in the first horizontal direction.