High-speed light sensing apparatus II
An optical apparatus includes: a substrate having a first material; an absorption region having a second material different from the first material, the absorption region configured to absorb photons and to generate photo-carriers including electrons and holes in response to the absorbed photons; a first well region surrounding the absorption region and arranged between the absorption region and the substrate, the first well region being doped with a first polarity; and one or more switches each controlled by a respective control signal, the one or more switches each configured to collect at least a portion of the photo-carriers based on the respective control signal and to provide the portion of the photo-carriers to a respective readout circuit.
1. An optical apparatus comprising:
a substrate having a first material;
an absorption region having a second material different from the first material, the absorption region configured to absorb photons and to generate photo-carriers including electrons and holes in response to the absorbed photons;
a first well region surrounding the absorption region and arranged between the absorption region and the substrate, wherein the first well region is doped with a first polarity;
one or more switches each controlled by a respective control signal, the one or more switches each configured to collect at least a portion of the photo-carriers based on the respective control signal and to provide the portion of the photo-carriers to a respective readout circuit; and
one or more isolation structures in the substrate, the one or more isolation structures comprising one or more of insulator isolations, implant isolations, or heterojunction isolations.
2. The optical apparatus of claim 1 , wherein each of the one or more switches comprises a respective control region in the absorption region and having the first polarity, wherein the respective control region is controlled by the respective control signal.
3. The optical apparatus of claim 2 , wherein each of the one or more switches comprises a respective readout region in the absorption region and having a second polarity different from to the first polarity, and the respective readout region is coupled to the respective readout circuit.
4. The optical apparatus of claim 3 , wherein each of the one or more switches further comprises a respective second well region having the first polarity to reduce a dark current between the respective readout region and the respective control region, wherein the respective readout region is at least partially formed in the respective second well region.
5. The optical apparatus of claim 2 , wherein each of the one or more switches further comprises a respective second well region having a second polarity different from the first polarity to reduce a leakage current between two control regions, wherein the respective control region is at least partially formed in the respective second well region.
6. The optical apparatus of claim 2 , further comprising a second well region in the absorption region having a second polarity different from the first polarity, wherein the second well region is formed to at least partially overlap with two control regions.
7. The optical apparatus of claim 1 , wherein at least one of the one or more isolation structures extends from an upper surface of the substrate and extends into a predetermined depth from the upper surface.
8. The optical apparatus of claim 1 , wherein the first well region is doped to block at least a portion of the electrons or at least a portion of the holes generated in the absorption region from entering into the substrate.
9. The optical apparatus of claim 1 , wherein the first well region is formed in the absorption region, in the substrate, or between the absorption region and the substrate, or combination thereof.
10. The optical apparatus of claim 1 , wherein the absorption region is at least partially embedded in the substrate.
11. The optical apparatus of claim 1 , further comprising a first layer covering an upper surface of the absorption region.
12. The optical apparatus of claim 1 , wherein the substrate includes a p-doped region and an n-doped region, and the p-doped region is electrically shorted with the n-doped region.
13. The optical apparatus of claim 1 , wherein each of the one or more switches comprises a respective control contact over the absorption region and a dielectric layer between the respective control contact and the absorption region.
14. The optical apparatus of claim 1 , wherein the first well region is a ring structure.
15. The optical apparatus of claim 1 , further comprising a bonding layer between the absorption region and the readout circuit.
16. An imaging system comprising:
a transmitter unit capable of emitting light; and
a receiver unit comprising a plurality of pixels formed on a substrate having a first material, each pixel comprising:
an absorption region having a second material different from the first material, the absorption region configured to absorb photons and to generate photo-carriers including electrons and holes in response to the absorbed photons;
a first well region surrounding the absorption region and arranged between the absorption region and the substrate, wherein the first well region is doped with a first polarity;
one or more switches each controlled by a respective control signal, the one or more switches each configured to collect at least a portion of the photo-carriers based on the respective control signal and to provide the portion of the photo-carriers to a respective readout circuit; and
one or more isolation structures in the substrate, the one or more isolation structures comprising one or more of insulator isolations, implant isolations, or heterojunction isolations.
17. The imaging system of claim 16 , wherein the first well region is doped to block at least a portion of the electrons or at least a portion of the holes generated in the absorption region from entering into the substrate.
18. The optical apparatus of claim 1 , wherein the first material comprises silicon, and wherein the second material comprises germanium.
19. The optical apparatus of claim 1 , wherein the one or more switches are formed in the substrate.
20. An optical apparatus comprising:
a substrate having a first material;
an absorption region having a second material different from the first material, the absorption region configured to absorb photons and to generate photo-carriers including electrons and holes in response to the absorbed photons;
a first well region surrounding the absorption region and arranged between the absorption region and the substrate, wherein the first well region is doped with a first polarity; and
one or more switches each controlled by a respective control signal, the one or more switches each configured to collect at least a portion of the photo-carriers based on the respective control signal and to provide the portion of the photo-carriers to a respective readout circuit,
wherein each of the one or more switches comprises a respective control region in the absorption region and having the first polarity, wherein the respective control region is controlled by the respective control signal, and
wherein each of the one or more switches comprises a respective readout region in the absorption region and having a second polarity different from to the first polarity, and the respective readout region is coupled to the respective readout circuit.