Method of manufacturing semiconductor device and associated memory device
A method includes providing a substrate including a channel region, the substrate comprising a two-stage structure having a first surface, a second surface higher than the first surface and a third surface connected between the first surface and the second surface; covering the substrate from a top thereof with an oxide layer; forming a ferroelectric material strip on a topmost surface of the oxide layer; and forming a gate strip covering the ferroelectric material strip and the oxide layer from a top of the gate strip.
1. A method of manufacturing a semiconductor device, comprising:
providing a substrate including a channel region, the substrate comprising a two-stage structure having a first surface, a second surface higher than the first surface and a third surface connected between the first surface and the second surface;
covering the substrate from a top thereof with an oxide layer;
forming a ferroelectric material strip on a topmost surface of the oxide layer; and
forming a gate strip covering the ferroelectric material strip and the oxide layer from a top of the gate strip.
2. The method of claim 1 , wherein the providing of the substrate comprises executing a photolithography operation upon the substrate to form the two-stage structure.
3. The method of claim 1 , wherein the covering of the substrate from top with the oxide layer comprises electroplating the oxide layer on the substrate to cover the first surface, the second surface and the third surface.
4. The method of claim 1 , wherein the covering of the substrate from top with the oxide layer comprises executing an atomic layer deposition, a physical vapor deposition, a chemical vapor phase deposition (CVD), a low pressure CVD or a plasma-enhanced CVD to form the oxide layer.
5. The method of claim 1 , wherein the forming of the ferroelectric material strip on the topmost surface of the oxide layer comprises electroplating a ferroelectric material upon the topmost surface of the oxide layer to form the ferroelectric material strip.
6. The method of claim 1 , wherein the forming of the ferroelectric material strip on the topmost surface of the oxide layer comprises executing an atomic layer deposition, a physical vapor deposition, a chemical vapor phase deposition (CVD), a low-pressure CVD (LPCVD) or a plasma-enhanced CVD (PECVD) to form the ferroelectric material strip.
7. The method of claim 1 , wherein the forming of the ferroelectric material strip on the topmost surface of the oxide layer comprises:
depositing a ferroelectric material layer upon the oxide layer; and
shaping the ferroelectric material layer to include a side plane and a bottom plane of the oxide layer free from being covered by the ferroelectric material layer.
8. The method of claim 7 , wherein the shaping of the ferroelectric material layer comprises:
disposing a photomask above a part of the ferroelectric material layer, wherein the part of the ferroelectric material layer is located above the topmost surface; and
executing a photolithography operation upon the ferroelectric material layer to form the ferroelectric material strip.
9. The method of claim 1 , wherein an angle between the third surface and the first surface ranges from 70 degrees to 90 degrees.
10. The method of claim 1 , wherein a length of the third surface along a direction from the second surface to the first surface ranges from 15 nm to 80 nm.
11. The method of claim 1 , wherein the ferroelectric material strip and the gate strip extend in a first direction and a second direction, respectively, and the first direction is orthogonal to the second direction.
12. The method of claim 11 , wherein a length of the first surface along the second direction ranges from 15 nm to 50 nm.
13. The method of claim 11 , wherein a length of the second surface of the channel region along the second direction ranges from 15 nm to 50 nm.
14. The method of claim 1 , wherein a thickness of the topmost surface of the oxide layer ranges from 1 nm to 6 nm.
15. The method of claim 1 , wherein a thickness of a side plane of the oxide layer ranges from 1 nm to 6 nm.
16. The method of claim 1 , wherein a thickness of a bottom plane of the oxide layer ranges from 15 nm to 50 nm.
17. A method of manufacturing a semiconductor device, comprising:
providing a substrate;
forming a gate electrode layer on the substrate;
generating a trench on the gate electrode layer to expose a top surface of the substrate;
covering a part of a sidewall of the trench with a ferroelectric material layer; and
covering rest portions of the sidewall of the trench and the ferroelectric material layer with an oxide layer.
18. The method of claim 17 , further comprising filling a channel layer into the trench.
19. The method of claim 17 , wherein the ferroelectric material layer surrounds 25% to 75% of a sidewall of the oxide layer.
20. A memory device, comprising:
a plurality of memory cells connected in series, each of the plurality of memory cells including a first transistor, a second transistor and a capacitor, wherein the first transistor and the second transistor are connected in parallel, and the capacitor is connected to gate terminals of the first transistor and the second transistor; and
a selection transistor connected to one end of the plurality of memory cells in series.