Light irradiation type thermal process apparatus using a gas ring
A gas ring is attached to an upper portion of a chamber side portion as a side wall of a chamber. The gas ring is formed by overlapping an upper ring and a lower ring. A gap between the upper ring and the lower ring provides a flow path for processing gas. A labyrinthine resisting unit is formed in the flow path. The mass of the lower ring having an inner wall surface is increased to increase heat capacity. The lower ring is attached to the chamber side portion to be in surface contact with the chamber side portion, so that thermal conductivity from the lower ring to the chamber side portion has a large value, and the amount of heat accumulated in the lower ring is reduced. An increase in temperature of the lower ring at thermal processing is thereby suppressed to prevent discoloration of the gas ring.
1. A thermal processing apparatus irradiating a substrate with light to heat said substrate, said thermal processing apparatus comprising:
a chamber having a cylindrical side wall;
a holding unit for holding said substrate in said chamber;
a light irradiation unit irradiating said substrate with light;
an annular gas ring attached to said side wall and directing processing gas supplied from outside said chamber into said chamber; and
a cooling mechanism cooling said side wall, wherein
said gas ring includes an annular upper ring and an annular lower ring,
a gap between said upper ring and said lower ring provides a flow path for said processing gas,
said lower ring has a cylindrical inner wall surface having a smaller diameter than said side wall,
said inner wall surface of said lower ring is exposed to the thermal processing space in said chamber so that radiant heat from said substrate is transmitted, and
at least said lower ring is in surface contact with said side wall.
2. The thermal processing apparatus according to claim 1 , wherein
said lower ring is of a solid material.
3. The thermal processing apparatus according to claim 1 , wherein
a labyrinthine resisting unit for reducing flow velocity of said processing gas is located in said flow path between said upper ring and said lower ring.
4. The thermal processing apparatus according to claim 3 , wherein
said gas ring has a plurality of introduction holes for introducing, to said resisting unit, said processing gas supplied through a gas supply inlet from outside said chamber, and
intervals at which said plurality of introduction holes are arranged increases with increasing distance from said gas supply inlet.
5. The thermal processing apparatus according to claim 1 , wherein
said light irradiation unit includes a continuous illumination lamp irradiating said substrate with light from below said chamber.
6. The thermal processing apparatus according to claim 5 , wherein
said light irradiation unit includes a flash lamp irradiating said substrate with a flash of light from above said chamber.
7. A thermal processing apparatus irradiating a substrate with light to heat said substrate, said thermal processing apparatus comprising:
a chamber having a cylindrical side wall;
a holding unit for holding said substrate in said chamber;
a light irradiation unit irradiating said substrate with light;
an annular gas ring attached to said side wall and directing processing gas supplied from outside said chamber into said chamber; and
a cooling mechanism cooling said side wall, wherein
said gas ring includes an annular upper ring and an annular lower ring,
a gap between said upper ring and said lower ring provides a flow path for said processing gas,
said lower ring has a cylindrical inner wall surface having a smaller diameter than said side wall,
said inner wall surface of said lower ring is exposed to the thermal processing space in said chamber so that radiant heat from said substrate is transmitted, and
heat capacity of said lower ring and thermal conductivity from said lower ring to said side wall have values not causing discoloration of said inner wall surface of said lower ring through light irradiation by said light irradiation unit.