Image pickup device and electronic apparatus
The present technology relates to an image pickup device and electronic apparatus that enables suppression of dark current. There are included: a photoelectric conversion unit configured to perform a photoelectric conversion; a trench engraved in a semiconductor substrate; a negative fixed charge film having an oxide film, a nitrogen film, and an oxide film on a side wall of the trench; and an electrode film formed in the fixed charge film. The oxide film configuring the fixed charge film includes silicon monoxide (SiO), and the nitrogen film includes silicon nitride (SiN). The nitrogen film configuring the fixed charge film can also include a polysilicon film or a high dielectric constant film (high-k film). The present technology can be applied to, for example, a back-illuminated CMOS image sensor.
1. An image pickup device, comprising:
a photoelectric conversion unit configured to perform a photoelectric conversion;
a trench engraved in a semiconductor substrate;
a fixed charge film including a first oxide film, a nitrogen film, and a second oxide film on a side wall of the trench; and
an electrode film formed in and in contact with the fixed charge film,
wherein a thickness of the first oxide film is thinner than a thickness of the second oxide film, and
wherein the nitrogen film is provided continuously between the first and second oxide films, the second oxide film is provided closest to the electrode film and the first oxide film is provided closest to the side wall of the trench.
2. The image pickup device according to claim 1 , wherein each of the first and second oxide films configuring the fixed charge film includes silicon monoxide (SiO), and the nitrogen film includes silicon nitride (SiN).
3. The image pickup device according to claim 1 , wherein the nitrogen film configuring the fixed charge film includes a polysilicon film or a high dielectric constant film (high-k film).
4. The image pickup device according to claim 1 , wherein the nitrogen film configuring the fixed charge film includes a film using any of materials: silicon nitride, hafnium, zirconium, aluminum, tantalum, titanium, magnesium, yttrium, and lanthanoid.
5. The image pickup device according to claim 1 , further comprising:
a wiring connected to a power supply that applies a voltage; and
a contact connecting the wiring and the electrode film.
6. The image pickup device according to claim 1 , further comprising:
a light shielding film formed on a light receiving surface side of the photoelectric conversion unit; and
a contact connecting the light shielding film and the electrode film.
7. The image pickup device according to claim 1 , wherein the trench does not penetrate the semiconductor substrate.
8. The image pickup device according to claim 5 , wherein the contact is formed for each pixel.
9. The image pickup device according to claim 5 , wherein the contact is shared by a plurality of pixels.
10. The image pickup device according to claim 1 , wherein the trench is formed so as to partially surround a pixel.
11. An electronic apparatus equipped with an image pickup device, wherein the image pickup device comprises:
a photoelectric conversion unit configured to perform a photoelectric conversion;
a trench engraved in a semiconductor substrate;
a fixed charge film including a first oxide film, a nitrogen film, and
a second oxide film on a side wall of the trench; and
an electrode film formed in and in contact with the fixed charge film,
wherein a thickness of the first oxide film is thinner than a thickness of the second oxide film, and
wherein the nitrogen film is provided continuously between the first and second oxide films, the second oxide film is provided closest to the electrode film and the first oxide film is provided closest to the side wall of the trench.
12. The electronic apparatus according to claim 11 , wherein each of the first and second oxide films configuring the fixed charge film includes silicon monoxide (SiO), and the nitrogen film includes silicon nitride (SiN).
13. The electronic apparatus according to claim 11 , wherein the nitrogen film configuring the fixed charge film includes a polysilicon film or a high dielectric constant film (high-k film).
14. The electronic apparatus according to claim 11 , wherein the nitrogen film configuring the fixed charge film includes a film using any of materials: silicon nitride, hafnium, zirconium, aluminum, tantalum, titanium, magnesium, yttrium, and lanthanoid.
15. The electronic apparatus according to claim 11 , further comprising:
a wiring connected to a power supply that applies a voltage; and
a contact connecting the wiring and the electrode film.
16. The electronic apparatus according to claim 11 , further comprising:
a light shielding film formed on a light receiving surface side of the photoelectric conversion unit; and
a contact connecting the light shielding film and the electrode film.
17. The electronic apparatus according to claim 11 , wherein the trench does not penetrate the semiconductor substrate.
18. The electronic apparatus according to claim 15 , wherein the contact is formed for each pixel.
19. The electronic apparatus according to claim 15 , wherein the contact is shared by a plurality of pixels.
20. The electronic apparatus according to claim 11 , wherein the trench is formed so as to partially surround a pixel.