Acoustic wave resonator with multiple resonant frequencies
Aspects of this disclosure relate to an acoustic wave resonator having at least two resonant frequencies. An acoustic wave filter can include series acoustic wave resonators and shunt acoustic wave resonators together arranged to filter a radio frequency signal. A first shunt resonator of the shunt acoustic wave resonators can include an interdigital transducer electrode and have at least a first resonant frequency and a second resonant frequency. Related acoustic wave resonators, multiplexers, wireless devices, and methods are disclosed.
1. An acoustic wave resonator with a plurality of resonant frequencies, the acoustic wave resonator comprising:
a piezoelectric layer; and
an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including first interdigital transducer electrode fingers and second interdigital transducer electrode fingers, the first interdigital transducer electrode fingers having a first pitch corresponding to a first resonant frequency, and the second interdigital transducer electrode fingers having a second pitch corresponding to a second resonant frequency.
2. The acoustic wave resonator of claim 1 wherein the second resonant frequency is between the first resonant frequency and an edge of a pass band of an acoustic wave filter that includes the acoustic wave resonator.
3. The acoustic wave resonator of claim 1 wherein the acoustic wave resonator is configured to generate a surface acoustic wave.
4. The acoustic wave resonator of claim 1 further comprising a temperature compensation layer over the interdigital transducer electrode.
5. The acoustic wave resonator of claim 4 wherein the temperature compensation layer is a silicon dioxide layer.
6. The acoustic wave resonator of claim 1 further comprising a support substrate, the piezoelectric layer being positioned on the support substrate.
7. The acoustic wave resonator of claim 1 wherein the acoustic wave resonator is configured to generate a boundary acoustic wave.
8. The acoustic wave resonator of claim 1 wherein the acoustic wave resonator is configured to generate a Lamb wave.
9. The acoustic wave resonator of claim 1 wherein the interdigital transducer electrode includes third interdigital transducer electrode fingers having a third pitch corresponding to a third resonant frequency.
10. The acoustic wave resonator of claim 1 wherein the second resonant frequency is at least 5 megahertz above the first resonant frequency.
11. The acoustic wave resonator of claim 1 wherein the piezoelectric layer is an aluminum nitride layer.
12. The acoustic wave resonator of claim 1 wherein the interdigital transducer electrode includes a bus bar from which both the first interdigital transducer electrode fingers and the second interdigital transducer electrode fingers extend, and the interdigital transducer electrode is positioned between two acoustic reflectors that are on the piezoelectric layer.
13. A multiplexer with filters for filter radio frequency signals, the multiplexer comprising:
a first filter including an acoustic wave resonator, the acoustic wave resonator including a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including first interdigital transducer electrode fingers and second interdigital transducer electrode fingers, the first interdigital transducer electrode fingers having a first pitch corresponding to a first resonant frequency, and the second interdigital transducer electrode fingers having a second pitch corresponding to a second resonant frequency; and
a second filter coupled to the first filter at a common node, the second filter configured to filter a second radio frequency signal.
14. The multiplexer of claim 13 wherein the second filter includes acoustic wave resonators.
15. The multiplexer of claim 13 further comprising:
a third filter coupled to the common node, the third filter configured to filter a third radio frequency signal; and
a fourth filter coupled to the common node, the fourth filter configured to filter a fourth radio frequency signal.
16. The multiplexer of claim 15 wherein each of the second filter, the third filter, and the fourth filter is an acoustic wave filter.
17. The multiplexer of claim 13 wherein the multiplexer is configured to provide filtering for at least two carriers of a carrier aggregation.
18. A method of filtering a radio frequency signal with an acoustic wave filter, the method comprising:
receiving, by the acoustic wave filter, a radio frequency signal; and
generating, with an acoustic wave resonator of the acoustic wave filter that includes an interdigital transducer electrode including first interdigital transducer electrode fingers having a first pitch and second interdigital transducer electrode fingers having a second pitch, two notches in a frequency response of the acoustic wave resonator corresponding to the first pitch and the second pitch to thereby improve rejection of the acoustic wave filter.
19. The method of claim 18 wherein the acoustic wave resonator having at least first and second resonant frequencies, the second resonant frequency is between the first resonant frequency and an edge of a pass band of the acoustic wave filter.
20. The method of claim 18 wherein the acoustic wave resonator is configured to generate a boundary acoustic wave.