Method of electrowetting

1. An electrokinetic device for moving an aqueous droplet, comprising:

a first substrate having a matrix of electrodes, wherein each of the matrix of electrodes is coupled to a thin film transistor, and wherein the matrix of electrodes are overcoated with a functional coating comprising:

a dielectric in contact with the matrix of electrodes, the dielectric comprising a layer of aluminium oxide and a layer of hafnium oxide;

a conformal layer comprising parylene in contact with the dielectric, wherein the parylene is circa 100 nm in thickness;

a hydrophobic layer in contact with the conformal layer;

a second substrate comprising a top electrode and a second hydrophobic layer;

a spacer disposed between the first substrate and the second substrate and defining an electrokinetic workspace; and

a voltage source operatively coupled to the matrix of electrodes, the voltage source controllable to provide a differential electrical potential between a first matrix electrode and a second matrix electrode in order to move the aqueous droplet between the first matrix electrode and the second matrix electrode.

2. The electrokinetic device of claim 1 , the dielectric has a thickness between 10 nm and 100 μm.

3. The electrokinetic device of claim 1 , wherein the hydrophobic layer comprises a fluoropolymer coating, fluorinated silane coating, manganese oxide polystyrene nanocomposite, zinc oxide polystyrene nanocomposite, precipitated calcium carbonate, carbon nanotube structure, silica nanocoating, or slippery liquid-infused porous coating.

4. The electrokinetic device of claim 1 , further comprising a controller to control the differential electrical potential provided between the first matrix electrode and the second matrix electrode.

5. The electrokinetic device of claim 4 , further comprising a plurality of scan lines and a plurality of gate lines, wherein each of the thin film transistors is coupled to one of the plurality of scan lines, and one of the plurality of gate lines, and the plurality of gate lines are operatively connected to the controller.

6. The electrokinetic device of claim 1 , wherein the aqueous droplet has a volume of 1 μL or smaller.

7. The electrokinetic device of claim 1 , wherein the voltage source being further controllable to provide the differential electrical potential between a third matrix electrode and the second matrix electrode thereby causing the aqueous droplet to contact a second aqueous droplet on the third matrix electrode.

8. The electrokinetic device of claim 1 , wherein the dielectric comprises three sublayers.

9. The electrokinetic device of claim 1 , wherein the dielectric comprises:

a first layer including an aluminum oxide or a hafnium oxide, the first layer having a thickness between 9 nm and 80 nm;

a second layer including a tantalum oxide or a hafnium oxide, the second layer having a thickness between 40 nm and 250 nm; and

a third layer including a tantalum oxide or a hafnium oxide, the third layer having a thickness between 5 nm and 60 nm, wherein the second layer is disposed between the first layer and the third layer.

10. The electrokinetic device of claim 1 , wherein the hydrophobic layer comprises an amorphous fluoropolymer.

11. The electrokinetic device of claim 1 , wherein the conformal parylene layer mitigates contact angle hysteresis arising from high conductivity solutions or solutions deviating from neutral pH.

12. The electrokinetic device of claim 1 , wherein the voltage source provides a driving voltage of <15 V.