IP Library › Granted Patent US 11,808,563
Granted Patent B2
US 11,808,563 · App. 17/942,813 · Granted Nov 7, 2023

Surface sensing systems and methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy

Inventors: Jeffrey H. Hunt (Thousand Oaks, CA); Jianing Shi (Sunnyvale, CA); John Paul Changala (Tustin, CA)
Assignees: The Boeing Company; FemtoMetrix, Inc.
G01B11/24G01J3/10G01J3/108G01J3/44G01N21/636G01N21/65G01J2003/102G01N2021/638G01N2021/655G01N2201/103G01N2201/105
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Quick Facts
Patent No.
US 11,808,563
App. No.
17/942,813
Granted
Nov 7, 2023
Kind
B2
Abstract

Surface sensing methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy are disclosed herein. The methods include exposing a sampled location of the scanned surface to a visible light beam and exposing the sampled location to a tunable infrared beam such that the tunable infrared beam is at least partially coincident with the visible light beam. The methods also include varying a frequency of the tunable infrared beam an inducing optical resonance within an imaged structure that extends at least partially within the sampled location. The methods further include receiving at least a portion of an emitted light beam from the sampled location and scanning the visible light beam and the runnable infrared beam across the scanned portion of the scanned surface. The methods also include generating an image of the scanned portion of the scanned surface based upon the receiving and the scanning.

Claims (48)

1. A method for imaging a sample, the method comprising:

exposing the sample to a visible light beam;

inducing optical resonance within a structure in the sample due to exposure of the sample to a tunable infrared (IR) beam;

receiving a portion of an emitted light beam, which includes a sum frequency signal between the visible light beam and the tunable IR beam, from the sample with a light detection system; and

based on receiving the portion of the emitted light beam, generating an image of the sample.

2. The method of claim 1 , wherein generating the image of the sample comprises:

generating the image comprising optical contrast between the structure in the sample and a remainder of the sample.

3. The method of claim 1 , further comprising:

exposing the sample to the tunable IR beam; and

varying a frequency of the tunable IR beam to the frequency that induces the optical resonance within the structure.

4. The method of claim 3 , wherein the varying the frequency of the tunable IR beam comprises:

selectively varying the frequency of the tunable IR beam while concurrently performing the receiving to determine a resonant frequency for the structure.

5. The method of claim 1 , further comprising:

exposing the sample to the tunable IR beam; and

varying a wavelength of the tunable IR beam to the wavelength that induces the optical resonance within the structure.

6. The method of claim 1 , further comprising:

exposing the sample to the tunable IR beam; and

varying a wavelength and a frequency of the tunable IR beam to the wavelength and the frequency that induces the optical resonance within the structure.

7. The method of claim 1 , further comprising:

aligning the visible light beam and the tunable IR beam to be coincident upon a sampled location of the sample.

8. The method of claim 1 , further comprising:

aligning the light detection system such that emitted light beam is received by the light detection system.

9. The method of claim 1 , further comprising:

varying a property of the visible light beam.

10. The method of claim 9 , wherein varying the property of the visible light beam comprises varying an intensity of the visible light beam.

11. The method of claim 9 , wherein varying the property of the visible light beam comprises varying an a polarization of the visible light beam.

12. The method of claim 1 , further comprising includes selectively varying an output spectrum of the tunable IR beam.

13. The method of claim 1 , further comprising selectively varying an intensity of the tunable IR beam.

14. The method of claim 1 , further comprising scanning the visible light beam and the tunable IR beam across the sample.

15. The method of claim 14 , wherein the scanning includes scanning while continuing at least the exposing the sample to the visible light beam, and the receiving the portion of the emitted light beam.

16. A sensing system for imaging a sample, the system comprising:

a visible light source to direct a visible light beam incident upon the sample;

a tunable infrared (IR) source to direct a tunable IR beam coincident with the visible light beam incident upon the sample

a controller programmed to vary operation of the tunable IR source to induce optical resonance within a structure in the sample due to exposure of the sample to the tunable IR beam; and

a light detection system to receive a portion of an emitted light beam, which includes a sum frequency signal between the visible light beam and the tunable IR beam, from the sample, and to generate an image of the sample based on receiving the portion of the emitted light beam.

17. The sensing system of claim 16 , further comprising an alignment structure to operatively align at least two of:

(i) the visible light source;

(ii) the tunable IR source; and

(iii) the light detection system.

18. The sensing system of claim 16 , further comprising:

a scanning structure to scan the visible light beam and the tunable IR beam across the sample to selectively vary portions of the sample being scanned.

19. The sensing system of claim 18 , wherein the scanning structure is configured to at least one of:

(i) move the visible light beam relative to the sample;

(ii) move the tunable IR beam relative to the sample; and

(iii) concurrently move the tunable IR beam and the visible light beam relative to the sample.

20. The sensing system of claim 18 , wherein the scanning structure is configured to at least one of:

(i) move the visible light source independently of the tunable IR source; and

(ii) move the tunable IR source independently of the visible light source.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2022
From: HUNT, JEFFREY H.
To: THE BOEING COMPANY
Reel/Frame 061064/0858 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2022
From: SHI, JIANING
To: FEMTOMETRIX, INC.
Reel/Frame 061064/0861 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2022
From: CHANGALA, JOHN PAUL
To: FEMTOMETRIX, INC.
Reel/Frame 061064/0864 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2022
From: THE BOEING COMPANY; FEMTOMETRIX, INC.
To: THE BOEING COMPANY; FEMTOMETRIX, INC.
Reel/Frame 061064/0875 →
Continuity (4)
Continuation 17146192 · Jan 11, 2021
Continuation 16352569 · Mar 13, 2019
Division 15388743 · Dec 22, 2016
Related Publication 20230003515A1 · Jan 5, 2023