Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

1. A substrate processing apparatus, comprising:

a plasma vessel in which a process gas is plasma-excited;

a substrate process chamber which is in fluid communication with the plasma vessel;

a gas supply system configured to supply the process gas into the plasma vessel; and

a coil installed to wind plural times in a spiral form around an outer periphery of the plasma vessel and configured to be supplied with high-frequency power,

wherein the coil is installed such that:

distances from an inner periphery of the coil to an inner periphery of the plasma vessel at plural positions of the coil between one end and the other end of the coil are different from each other;

a distance d 2 among the distances, at which an amplitude of a standing wave of a voltage applied to the coil is maximized, is maximized among a section from the one end to the other end of the coil; and

distances d 1 among the distances, at a first section that is wound once around the outer periphery of the plasma vessel from the one end of the coil, at a second section that is wound once around the outer periphery of the plasma vessel from the other end of the coil, and at a center section that is wound once around the outer periphery of the plasma vessel at a midpoint of the coil as a center of the center section are configured to be shorter than d 2 .

2. The substrate processing apparatus according to claim 1 , wherein the coil is installed such that a distance from the inner periphery of the coil to the inner periphery of the plasma vessel at at least one of positions on the coil, at which the amplitude of the standing wave of the voltage applied to the coil is minimized, is minimized.

3. The substrate processing apparatus according to claim 1 , wherein the coil is installed such that a distance from the inner periphery of the coil to the inner periphery of the plasma vessel at at least one of positions on the coil, at which an amplitude of a standing wave of a current supplied to the coil is maximized, is minimized.

4. The substrate processing apparatus according to claim 3 , wherein at least one of the positions on the coil at which the amplitude of the standing wave of the current supplied to the coil is maximized is the midpoint of the coil, and

wherein the coil is installed such that a distance from the inner periphery of the coil to the inner periphery of the plasma vessel at the midpoint of the coil is minimized.

5. The substrate processing apparatus according to claim 4 , wherein the positions on the coil at which the amplitude of the standing wave of the current supplied to the coil is maximized include the one end and the other end of the coil, and

wherein the coil is installed such that distances from the inner periphery of the coil to the inner periphery of the plasma vessel at the first section of the coil that is wound once around the outer periphery of the plasma vessel from the one end of the coil, the second section of the coil that is wound once around the outer periphery of the plasma vessel from the other end of the coil, and the center section of the coil that is wound once around the outer periphery of the plasma vessel at the midpoint of the coil as a center of the center section are minimized.

6. The substrate processing apparatus according to claim 4 , wherein the coil is installed such that a distance from the inner periphery of the coil to the inner periphery of the plasma vessel at the center section of the coil that is wound multiple times around the outer periphery of the plasma vessel at the midpoint of the coil as a center of the section is minimized.

7. The substrate processing apparatus according to claim 4 , wherein the coil is installed such that a distance from the inner periphery of the coil to the inner periphery of the plasma vessel at the center section of the coil that is wound once around the outer periphery of the plasma vessel at the midpoint of the coil as a center of the section is minimized.

8. The substrate processing apparatus according to claim 1 , wherein the coil is installed such that a distance at a position on the coil from the inner periphery of the coil to the inner periphery of the plasma vessel becomes smaller as the position on the coil becomes farther from the position on the coil at which the amplitude of the standing wave of the voltage applied to the coil is maximized.

9. The substrate processing apparatus according to claim 1 , further comprising:

a high-frequency power source configured to supply the high-frequency power to the coil;

a sensor configured to detect a value of reflected power from the coil; and

a controller configured to control the high-frequency power source such that the reflected power is minimized, based on the value of the reflected power detected by the sensor.

10. The substrate processing apparatus according to claim 1 , wherein the coil has an electrical length which is one time a wavelength of the high-frequency power.

11. A method of manufacturing a semiconductor device, comprising:

loading a substrate into a substrate process chamber which is in fluid communication with a plasma vessel;

supplying a process gas into the plasma vessel;

plasma-exciting the process gas supplied into the plasma vessel by supplying high-frequency power to a coil installed to wind plural times in a spiral form around an outer periphery of the plasma vessel; and

processing the substrate with excited plasma,

wherein the coil is installed such that:

distances from an inner periphery of the coil to an inner periphery of the plasma vessel at plural positions of the coil between one end and the other end of the coil are different from each other;

a distance d 2 among the distances at which an amplitude of a standing wave of a voltage applied to the coil is maximized, is maximized among a section from the one end to the other end of the coil; and

distances d 1 among the distances at a first section that is wound once around the outer periphery of the plasma vessel from the one end of the coil, at a second section that is wound once around the outer periphery of the plasma vessel from the other end of the coil, and at a center section that is wound once around the outer periphery of the plasma vessel at a midpoint of the coil as a center of the center section are configured to be shorter than the distance d 2 .

12. A non-transitory computer-readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform a process, the process comprising:

loading a substrate into a substrate process chamber of the substrate processing apparatus which is in fluid communication with a plasma vessel;

supplying a process gas into the plasma vessel;

plasma-exciting the process gas supplied into the plasma vessel by supplying high-frequency power to a coil installed to wind plural times in a spiral form around an outer periphery of the plasma vessel; and

processing the substrate with excited plasma,

wherein the coil is installed such that:

distances from an inner periphery of the coil to an inner periphery of the plasma vessel at plural positions of the coil between one end and the other end of the coil are different from each other;

a distance d 2 among the distances at which an amplitude of a standing wave of a voltage applied to the coil is maximized, is maximized among a section from the one end to the other end of the coil; and

distances d 1 among the distances at a first section that is wound once around the outer periphery of the plasma vessel from the one end of the coil, at a second section that is wound once around the outer periphery of the plasma vessel from the other end of the coil, and at a center section that is wound once around the outer periphery of the plasma vessel at a midpoint of the coil as a center of the center section are configured to be shorter than d 2 .