Semiconductor device and manufacturing method of semiconductor device
A semiconductor device and a manufacturing method thereof includes a source contact structure, a gate stack structure including a side region adjacent to the source contact structure, and a center region extending from the side region. The semiconductor device further includes a source gate pattern disposed under the side region of the first gate stack structure. The source gate pattern has an inclined surface facing the source contact structure. The semiconductor device also includes a channel pattern penetrating the center region of the gate stack structure, the channel pattern extending toward and contacting the source contact structure.
1. A semiconductor device comprising:
a gate stack structure comprising conductive patterns and interlayer insulating layers alternately stacked in a first direction;
a channel layer including a connecting part under the gate stack structure and a pillar part extending from the connecting part to pass through the gate stack structure, the connecting part having an L-shaped edge;
a source gate pattern disposed between the gate stack structure and the L-shaped edge of the connecting part in the channel layer; and
a multi-layered memory layer between the channel layer and the gate stack structure.
2. The semiconductor device of claim 1 ,
wherein the source gate pattern has a first sidewall and a second sidewall opposite the first sidewall, and
wherein the second sidewall has an inclined surface.
3. The semiconductor device of claim 1 ,
wherein each of the conductive patterns has a resistance lower than that of the source gate pattern.
4. The semiconductor device of claim 1 ,
wherein the connecting part of the channel layer includes a first connecting part parallel to a bottom surface of the gate stack structure and extending from a top of the L-shaped edge, and
wherein the pillar part extends from the first connecting part.
5. The semiconductor device of claim 1 ,
wherein the multi-layered memory layer extends to be interposed between the source gate pattern and the L-shaped edge of the connecting part in the channel layer.
6. The semiconductor device of claim 1 ,
wherein each of the channel layer and the multi-layered memory layer has an edge part protruding farther than the source gate pattern in a lateral direction crossing the pillar part.
7. The semiconductor device of claim 6 , further comprising:
a protective pattern aligned over the edge part of the multi-layered memory layer.
8. The semiconductor device of claim 1 ,
wherein the L-shaped edge of the connecting part in the channel layer includes a dopant of a conductivity type.