Semiconductor device and method of manufacturing the same
In one embodiment, a semiconductor device includes a first substrate including first and second regions on its surface, a first control circuit on the first substrate in the first region, a first memory cell array above the first control circuit in the first region and connected to the first control circuit, and a first pad above the first memory cell array in the first region and connected to the first control circuit. The device further includes a second control circuit on the first substrate in the second region, a second memory cell array above the second control circuit in the second region and connected to the second control circuit, a second pad above the second memory cell array in the second region and connected to the second control circuit, and a connection line above the first and second memory cell arrays and connecting the first and second pads.
1. A method of manufacturing a semiconductor device, comprising:
forming a first control circuit on a first substrate in a first region of a surface of the first substrate;
forming a first memory cell array electrically connected to the first control circuit, above the first control circuit in the first region;
forming a first pad electrically connected to the first control circuit, above the first memory cell array in the first region;
forming a second control circuit on the first substrate in a second region of the surface of the first substrate;
forming a second memory cell array electrically connected to the second control circuit, above the second control circuit in the second region;
forming a second pad electrically connected to the second control circuit, above the second memory cell array in the second region;
forming a connection line electrically connecting the first pad to the second pad; and
dicing a wafer including the semiconductor device to cut the connection line, thereby manufacturing a semiconductor device including the first control circuit, the first memory cell array and the first pad, and a semiconductor device including the second control circuit, the second memory cell array and the second pad.
2. The method of claim 1 , wherein the first pad, the second pad and the connection line are formed to be continuous with one another in a metal layer.
3. A method of manufacturing a semiconductor device, comprising:
forming a first control circuit on a first substrate in a first region of a surface of the first substrate;
forming a first memory cell array electrically connected to the first control circuit, above the first control circuit in the first region;
forming a first pad electrically connected to the first control circuit, above the first memory cell array in the first region;
forming a second control circuit on the first substrate in a second region of the surface of the first substrate;
forming a second memory cell array electrically connected to the second control circuit, above the second control circuit in the second region;
forming a second pad electrically connected to the second control circuit, above the second memory cell array in the second region;
forming a connection line electrically connecting the first pad to the second pad; and
bonding a bonding wire to only one of the first and second pads,
wherein a chip including the first and second pads is treated as a non-defective chip when a number of defective blocks in one of the first and second memory cell arrays falls within a first range, a number of defective blocks in the other of the first and second memory cell arrays falls outside the first range, and an average number of defective blocks in the first and second memory cell arrays falls within the first range.
4. A method of manufacturing a semiconductor device, comprising:
forming a first control circuit on a first substrate in a first region of a surface of the first substrate;
forming a first memory cell array electrically connected to the first control circuit, above the first control circuit in the first region;
forming a first pad electrically connected to the first control circuit, above the first memory cell array in the first region;
forming a second control circuit on the first substrate in a second region of the surface of the first substrate;
forming a second memory cell array electrically connected to the second control circuit, above the second control circuit in the second region;
forming a second pad electrically connected to the second control circuit, above the second memory cell array in the second region;
forming a connection line electrically connecting the first pad to the second pad; and
forming a first dicing line having a first width and a second dicing line having a second width larger than the first width, on the first substrate,
wherein the connection line is formed to cross the first dicing line.
5. A method of manufacturing a semiconductor device, comprising:
forming a first control circuit on a first substrate in a first region of a surface of the first substrate;
forming a first memory cell array electrically connected to the first control circuit, above the first control circuit in the first region;
forming a first pad electrically connected to the first control circuit, above the first memory cell array in the first region;
forming a second control circuit on the first substrate in a second region of the surface of the first substrate;
forming a second memory cell array electrically connected to the second control circuit, above the second control circuit in the second region;
forming a second pad electrically connected to the second control circuit, above the second memory cell array in the second region; and
forming a connection line electrically connecting the first pad to the second pad,
wherein the first and second memory cell arrays and the first and second control circuits are formed above the first substrate by:
forming the first and second memory cell arrays on the first substrate;
forming the first and second control circuits on a second substrate; and
bonding the first substrate to the second substrate via the first and second memory cell arrays and the first and second control circuits.