Radiation detection systems and methods
A method of forming a radiation detector includes forming a stack including a plurality of arrays of radiation detection devices. Forming an array of the plurality of arrays includes forming a polysilicon layer over an interlayer dielectric layer of another array of the plurality of arrays; forming charge storage layers over the polysilicon layer; forming a second polysilicon layer over the charge storage layers; etching the second polysilicon layer to form gate stacks; and depositing an interlayer dielectric disposed on at least three sides of the gate stacks, the interlayer dielectric including a radiation reactive material.
1. A method of forming a radiation detector, the method comprising:
forming a stack including a plurality of arrays of radiation detection devices, wherein forming an array of the plurality of arrays includes:
forming a polysilicon layer over an interlayer dielectric layer of another array of the plurality of arrays;
forming charge storage layers over the polysilicon layer, wherein forming the charge storage layers includes forming a layer of an oxide of silicon having a thickness in a range of 1 nm to 3 nm directly on the polysilicon layer, forming a layer of a nitride of silicon on the layer of the oxide of silicon, and forming a second layer of an oxide of silicon, wherein the layer of the nitride of silicon defines two charge storage regions;
forming a second polysilicon layer over the charge storage layers;
etching the second polysilicon layer to form gate stacks; and
depositing an interlayer dielectric disposed on at least three sides of the gate stacks, the interlayer dielectric including a radiation reactive material.
2. The method of claim 1 , further comprising forming source/drains in the polysilicon layer prior to depositing the interlayer dielectric.
3. The method of claim 1 , further comprising forming a silicide layer over the gate stacks prior to depositing the interlayer dielectric.
4. The method of claim 1 , wherein the radiation reactive material includes a radiation reactive component selected from boron-10 ( 10 B), lithium-6 ( 6 Li), cadmium-113 ( 113 Cd), gadolinium-157 ( 157 Gd), uranium-235 ( 235 U), and a combination thereof.
5. The method of claim 4 , wherein the radiation reactive material includes at least 50% of the radiation reactive component.
6. The method of claim 5 , wherein the radiation reactive material includes at least 80% of the radiation reactive component.
7. The method of claim 4 , wherein the radiation reactive material includes an oxide, nitride, oxynitride, or carbide of the radiation reactive component.
8. The method of claim 4 , wherein the radiation reactive material includes an oxide, nitride, oxynitride, or carbide of boron-10.
9. The method of claim 8 , wherein the radiation reactive material includes an oxide of boron-10.
10. The method of claim 1 , wherein the layer of the nitride of silicon has a thickness in a range of 3 nm to 7 nm.
11. The method of claim 1 , wherein the second layer of the oxide of silicon has a thickness in a range of 3 nm to 15 nm.
12. The method of claim 1 , wherein a single word line connects to a gate in each array of the plurality of arrays.
13. The method of claim 1 , wherein a single bit line connects to a source/drain in each array of the plurality of arrays.
14. A method of forming a radiation detector, the method comprising:
forming charge storage layers over a polysilicon layer, wherein forming the charge storage layers includes forming a layer of an oxide of silicon having a thickness in a range of 1 nm to 3 nm directly on the polysilicon layer, forming a layer of a nitride of silicon on the layer of the oxide of silicon, and forming a second layer of an oxide of silicon, wherein the layer of the nitride of silicon defines two charge storage regions;
forming a second polysilicon layer over the charge storage layers;
etching the second polysilicon layer to form gate stacks; and
depositing an insulative dielectric disposed on at least three sides of the gate stacks, the insulative dielectric including a radiation reactive material.
15. The method of claim 14 , further comprising forming source/drains in the polysilicon layer prior to depositing the insulative dielectric.
16. The method of claim 14 , further comprising forming a silicide layer over the gate stacks prior to depositing the insulative dielectric.
17. The method of claim 14 , wherein the radiation reactive material includes a radiation reactive component selected from boron-10 ( 10 B), lithium-6 ( 6 Li), cadmium-113 ( 113 Cd), gadolinium-157 ( 157 Gd), uranium-235 ( 235 U), and a combination thereof.
18. The method of claim 17 , wherein the radiation reactive material includes at least 50% of the radiation reactive component.
19. The method of claim 17 , wherein the radiation reactive material includes an oxide, nitride, oxynitride, or carbide of the radiation reactive component.
20. The method of claim 17 , wherein the radiation reactive material includes an oxide, nitride, oxynitride, or carbide of boron-10.