Surface stabilization of biosensors
A sensor apparatus includes a substrate, a semiconductor device disposed over the substrate, the semiconductor device having a surface electrode structure, and a saccharide coating formed over the surface electrode structure. The saccharide coating can be removed prior to use. The semiconductor device can further include a well and optionally a bead disposed in the well.
1. A semiconductor apparatus comprising:
an array of semiconductor sensors formed on a semiconductor substrate;
an array of wells formed over the array of semiconductor sensors, wherein each semiconductor sensor includes a field effect transistor having a gate structure; and
a removable saccharide coating disposed over the array of wells and the gate structure.
2. The semiconductor apparatus of claim 1 , further comprising a flow cell lid disposed over the semiconductor substrate and the array of wells and defining a flow cell between the substrate and the flow cell lid.
3. The semiconductor apparatus of claim 1 , wherein the gate structure is a floating gate structure.
4. The semiconductor apparatus of claim 3 , wherein the floating gate includes a sensor plate and a sensor layer disposed over the sensor plate.
5. The semiconductor apparatus of claim 4 , wherein the sensor layer includes a ceramic layer.
6. The semiconductor apparatus of claim 1 , wherein the field effect transistor is a chemical field effect transistor.
7. The semiconductor apparatus of claim 6 , wherein the chemical field effect transistor is an ion-sensitive field effect transistor.
8. The semiconductor apparatus of claim 1 , wherein the removable saccharide coating includes a monosaccharide, a disaccharide, a polysaccharide, a derivation thereof, or a combination thereof.
9. The semiconductor apparatus of claim 8 , wherein the monosaccharide includes glucose, fructose, galactose, or a combination thereof.
10. The semiconductor apparatus of claim 8 , wherein the disaccharide includes sucrose, trehalose, maltose, or lactose.
11. The semiconductor apparatus of claim 10 , wherein the disaccharide includes sucrose.
12. The semiconductor apparatus of claim 10 , wherein the disaccharide includes trehalose.
13. The semiconductor apparatus of claim 1 , wherein the removable saccharide coating includes a surfactant.
14. The semiconductor apparatus of claim 13 , wherein the surfactant is selected from a non-ionic fluorosurfactant, an alkyl polysaccharide surfactant, an alkyl sulfonate surfactant or a zwitterionic surfactant.
15. The semiconductor apparatus of claim 14 , wherein the alkyl polysaccharide surfactant comprises dioctyl sodium sulfosuccinate.
16. The semiconductor apparatus of claim 14 , wherein the zwitterionic surfactant comprises anzergent 3-12.
17. The semiconductor apparatus of claim 1 , wherein the removable saccharide coating is a conformal coating.
18. The semiconductor apparatus of claim 1 , wherein the removable saccharide coating is a protective coating.
19. The semiconductor apparatus of claim 18 , wherein the protective coating is configured to be removed before the semiconductor apparatus is used.