MEMS device for an implant assembly
Disclosed is an implant and method of making an implant. The implant having a housing that defines a cavity. The housing includes a sensor comprising a base attached to a diaphragm wherein said base may be positioned within said cavity. The sensor may be a capacitive pressure sensor. The diaphragm may be connected to the housing to hermetically seal said housing. The sensor may include electrical contacts positioned on the diaphragm. The attachment between the base and the diaphragm may define a capacitive gap and at least one discontinuity configured to enhance at least one performance parameter of said implant.
1. A method of assembling an implant comprising:
providing a housing that defines a cavity;
attaching a floating base to a diaphragm by bonding, to form a capacitive gap, said attachment being positioned along a perimeter of said capacitive gap and including at least one discontinuity in bonding to enhance at least one performance parameter of said implant;
patterning at least one electrode onto the floating base;
attaching said diaphragm to said housing such that said floating base is positioned entirely within said cavity;
attaching a coil to said at least one electrode; and
attaching a bottom to said housing to form a hermetic seal about said cavity.
2. The method of claim 1 , wherein said diaphragm is hermetically attached to said housing by at least one laser weld about the perimeter of said cavity.
3. The method of claim 1 , wherein said diaphragm is made of a glass material and said floating base is made of silicon.