Fingerprint identification module, method for forming fingerprint identification module, and electronic device
View Patent ↗Fingerprint identification modules, methods for forming the fingerprint identification modules and electronic devices are provided. The method may include providing a substrate, containing a signal process circuit formed therein; providing a carrier substrate; forming one or more piezoelectric transducers on the carrier substrate, wherein a piezoelectric transducer of the one or more piezoelectric transducers includes a first electrode, a piezoelectric layer on the first electrode and a second electrode on the piezoelectric layer; forming a permanent bonding layer, containing one or more cavities, on one of the carrier substrate and the substrate; bonding the carrier substrate with the substrate using the permanent bonding layer, wherein the permanent bonding layer is between the one or more piezoelectric transducers and the substrate, and each piezoelectric transducer covers one cavity; and removing the carrier substrate.
1. A fingerprint identification module, comprising:
a substrate;
a signal processing circuit formed in the substrate;
a permanent bonding layer bonded to the substrate, the permanent bonding layer containing one or more cavities;
one or more piezoelectric transducers, located over the permanent bonding layer, wherein
a piezoelectric transducer of the one or more piezoelectric transducers includes a first electrode, a second electrode under the first electrode, and a piezoelectric layer between the first electrode and the second electrode,
the second electrode of each piezoelectric transducer fully covers one cavity, and
a second conductive plug electrically connected to the second electrode and formed on a side of the second electrode opposite to the cavity, the second conductive plug passing through the piezoelectric layer.
2. The fingerprint identification module according to claim 1 , further comprising:
connection terminals of the signal processing circuit formed in the substrate and exposed by a surface of the substrate, and
third conductive plugs electrically connected to the connection terminals, wherein the third conductive plugs are formed through the permanent bonding layer and the piezoelectric layer.
3. The fingerprint identification module according to claim 1 , further comprising:
an isolation layer, located on a surface of the first electrode.
4. The fingerprint identification module according to claim 3 , further comprising:
a first conductive plug electrically connected to and formed on the first electrode, the first conductive plug further passing through the isolation layer.
5. The fingerprint identification module according to claim 1 , wherein:
the permanent bonding layer includes a dry film.
6. The fingerprint identification module according to claim 1 , wherein:
the substrate is a wafer-level substrate or a chip-level substrate.
7. The fingerprint identification module according to claim 1 , further comprising:
the second electrode has a top surface coplanar with the permanent bonding layer, and
the first electrode has a top surface coplanar with the piezoelectric layer or above the piezoelectric layer.
8. The fingerprint identification module according to claim 1 , further comprising:
an isolation layer formed on the first electrode, and
a passivation layer formed on the piezoelectric layer and on sidewalls of the isolation layer and the first electrode,
wherein the second conductive plug passing through the piezoelectric layer further includes a portion formed on the piezoelectric layer and on a sidewall of the passivation layer.
9. An electronic device, comprising:
a fingerprint identification module, comprising:
a substrate;
a signal processing circuit formed in the substrate;
a permanent bonding layer bonded to the substrate, the permanent bonding layer containing one or more cavities;
one or more piezoelectric transducers, located over the permanent bonding layer, wherein
a piezoelectric transducer of the one or more piezoelectric transducers includes a first electrode, a second electrode under the first electrode, and a piezoelectric layer between the first electrode and the second electrode,
the second electrode of each piezoelectric transducer fully covers one cavity, and
a second conductive plug electrically connected to the second electrode and formed on a side of the second electrode opposite to the cavity, the second conductive plug passing through the piezoelectric layer.