Display device including an auxiliary layer
A display device is provided including a substrate. A second semiconductor layer is disposed on the substrate. The second semiconductor layer includes Si. A second gate lower electrode overlaps a channel region of the second semiconductor layer. A second gate insulating layer is disposed on the second gate lower electrode. A second gate upper electrode and a light blocking layer are disposed on the second gate insulating layer. A first auxiliary layer is disposed on the second gate upper electrode and the light blocking layer. A first semiconductor layer overlaps the light blocking layer. The first semiconductor layer includes an oxide semiconductor. A first gate electrode overlaps a channel region of the first semiconductor layer. The first auxiliary layer includes an insulating layer including at least one compound selected from SiNx, SiOx, and SiON, and at least one material selected from F, Cl, and C.
1. A display device, comprising:
a substrate;
an electrode layer disposed on the substrate;
a first semiconductor layer overlaps the electrode layer, the first semiconductor layer includes an oxide semiconductor;
a first gate electrode overlaps a channel region of the first semiconductor layer, and
an insulating layer disposed between the first semiconductor layer and the electrode layer, and
wherein the insulating layer includes a first layer, a second layer and a third layer,
the first layer includes SiNx:F,
the second layer include SiNx,
the third layer includes SiOx, and
the first layer of the insulating layer is disposed closer to the substrate than the second layer of the insulating layer,
the second layer of the insulating layer is disposed closer to the substrate than the third layer of the insulating layer.
2. The display device of claim 1 , wherein
a thickness of the first layer is in a range of 1 Å to 100 Å.
3. The display device of claim 1 , wherein
the electrode layer overlaps the first semiconductor layer and has an area similar to that of the first semiconductor layer.
4. The display device of claim 1 , further comprising:
a third gate insulating layer disposed between the first semiconductor layer and the first gate electrode,
wherein the third gate insulating layer overlaps the first semiconductor layer.
5. The display device of claim 1 , further comprising:
a third gate insulating layer disposed between the first semiconductor layer and the first gate electrode,
wherein the third gate insulating layer overlaps the channel region of the first semiconductor layer and does not overlap a source region and a drain region of the first semiconductor layer.
6. The display device of claim 1 , further comprising:
an auxiliary layer disposed on the first gate electrode,
wherein the auxiliary layer includes an insulating layer including at least one compound selected from SiNx, SiOx, and SiON, and at least one material selected from F, Cl, and C, and
a content of the at least one material selected from F, Cl, and C included in the auxiliary layer is three times or more greater than at least one material selected from F, Cl, and C included in the second gate insulating layer.
7. The display device of claim 1 , further comprising
a second semiconductor layer disposed on the substrate, the second semiconductor layer including Si;
a second gate lower electrode overlaps a channel region of the second semiconductor layer;
a second gate insulating layer disposed on the second gate lower electrode;
a second gate upper electrode disposed on the second gate insulating layer; and
wherein the second semiconductor layer, the second gate lower electrode, the second gate insulating layer, and the second gate upper electrode are disposed between the substrate and the first layer.
8. The display device of claim 7 , wherein
a content of the at least one material selected from F, Cl, and C included in the first layer is three times or more greater than that of at least one material selected from F, Cl, and C included in the second gate insulating layer.
9. The display device of claim 7 , wherein
the second gate upper electrode and the electrode layer include a same material.
10. A display device, comprising:
a substrate;
a first layer disposed on the substrate;
an electrode layer disposed on the first layer;
a second layer including SiNx disposed on the electrode layer;
a third layer including SiOx disposed on the second layer; and
a first auxiliary layer disposed between the first layer and the second layer, wherein the first auxiliary layer includes SiNx:F, and
the first auxiliary layer disposed between the electrode layer and the second layer.
11. The display device of claim 10 , further comprising:
a second semiconductor layer disposed on the substrate, the second semiconductor layer including Si;
a second gate lower electrode overlaps a channel region of the second semiconductor layer; and
a second gate upper electrode overlaps the second gate lower electrode;
wherein the first layer disposed between the second gate lower electrode and the second gate upper electrode,
a content of the at least one material selected from F, Cl, and C included in the first auxiliary layer is three times or more greater than that of at least one material selected from F, Cl, and C included in the first layer.
12. The display device of claim 10 , further comprising:
a first semiconductor layer overlaps the electrode layer, the first semiconductor layer includes an oxide semiconductor;
a first gate electrode overlaps a channel region of the first semiconductor layer.
13. The display device of claim 10 , wherein
a thickness of the first auxiliary layer is in a range of 1 Å to 100 Å.
14. The display device of claim 13 , wherein further comprising:
a second auxiliary layer disposed on the first gate electrode,
wherein the second auxiliary layer includes an insulating layer including at least one compound selected from SiNx, SiOx, and SiON, and at least one material selected from F, Cl, and C.