Conductive feature of a semiconductor device and method of forming same

1. A method of forming a semiconductor device, comprising:

forming a semiconductor feature over a substrate, the semiconductor feature comprising a conductive region;

forming a dielectric layer over the semiconductor feature;

patterning the dielectric layer to form a contact opening exposing a top surface of the conductive region;

forming a monolayer over the dielectric layer comprising flowing a non-reactive monolayer precursor over surfaces of the dielectric layer, the top surface of the conductive region remaining exposed, the non-reactive monolayer precursor being non-reactive with the surfaces of the dielectric layer; and

depositing a conductive material in the contact opening.

2. The method of claim 1 , wherein before forming the monolayer, the dielectric layer comprises an exposed surface comprising hydroxyl groups.

3. The method of claim 1 further comprising, before forming the monolayer, performing a chemical treatment on the dielectric layer.

4. The method of claim 3 , wherein performing the chemical treatment increases a concentration of hydroxyl groups on a top surface of the dielectric layer.

5. The method of claim 1 , wherein after forming the monolayer, the top surface of the conductive region remains free of the monolayer.

6. The method of claim 1 further comprising:

before forming the monolayer, a top surface of the dielectric layer having a first contact angle with water; and

after forming the monolayer, a top combined surface of the dielectric layer and the monolayer having a second contact angle with water, the second contact angle being greater than the first contact angle.

7. The method of claim 1 , wherein after depositing the conductive material, a top surface of the monolayer remains free of the conductive material.

8. The method of claim 1 , further comprising forming a conductive feature over and physically contacting the conductive material, the conductive material being different from each material of the conductive feature.

9. A method of forming a semiconductor device, comprising:

forming a first dielectric layer over a substrate;

forming a first opening in the first dielectric layer to expose the substrate;

forming a first conductive feature in the first opening, the first conductive feature comprising a metal;

forming a second dielectric layer over the first dielectric layer and the first conductive feature, wherein upon forming the second dielectric layer, the second dielectric layer has a first concentration of exposed hydroxyl groups;

forming a second opening in the second dielectric layer to expose the first conductive feature;

flowing a monolayer precursor over the second dielectric layer to form a monolayer over the second dielectric layer, wherein upon forming the monolayer, the second dielectric layer has a second concentration of exposed hydroxyl groups, the second concentration being less than the first concentration, the monolayer precursor being non-reactive with surfaces of the second dielectric layer; and

flowing a metal precursor over the second dielectric layer to deposit a metal feature into the second opening and over the first conductive feature.

10. The method of claim 9 further comprising, before flowing the monolayer precursor, performing a chemical treatment, after performing the chemical treatment the second dielectric layer having a third concentration of exposed hydroxyl groups, the third concentration being greater than the first concentration.

11. The method of claim 9 , wherein the second dielectric layer comprises silicon oxide.

12. The method of claim 9 , wherein the metal precursor has a first selectivity for the metal as compared to the second dielectric layer before the flowing the monolayer precursor, wherein the metal precursor has a second selectivity for the metal as compared to the second dielectric layer after the flowing the monolayer precursor, the second selectivity being greater than the first selectivity.

13. The method of claim 9 , wherein the metal feature comprises tungsten.

14. The method of claim 9 , wherein the monolayer precursor is attracted to exposed hydroxyl groups without chemical bonding.

15. The method of claim 14 , wherein the monolayer precursor is an organic molecule.

16. The method of claim 9 , wherein molecules of the monolayer precursor are free of oxygen atoms.

17. A method of forming a semiconductor device, the method comprising:

forming a first dielectric layer over a second dielectric layer, a conductive feature being embedded in the second dielectric layer, wherein upon forming the first dielectric layer, the first dielectric layer has a first concentration of exposed hydroxyl groups;

patterning an opening in the first dielectric layer to expose the conductive feature;

forming a hydrophobic layer over the first dielectric layer, the hydrophobic layer comprising a first portion along a top surface of the first dielectric layer and a second portion along sidewalls of the opening, the hydrophobic layer comprising a monolayer of hydrophobic molecules, the hydrophobic molecules remaining unreacted with the first dielectric layer;

selectively depositing a conductive material in the opening and over the conductive feature;

removing the first portion of the hydrophobic layer; and

forming metallization layers of an interconnect structure over and electrically connected to the conductive material.

18. The method of claim 17 , further comprising, before forming the hydrophobic layer, performing a chemical treatment on the first dielectric layer, wherein upon performing the chemical treatment, the first dielectric layer has a second concentration of exposed hydroxyl groups, wherein the second concentration is greater than the first concentration.

19. The method of claim 17 , wherein the hydrophobic molecules are attracted to exposed hydroxyl groups of the first dielectric layer.

20. The method of claim 17 , wherein the hydrophobic molecules comprise at least one of a benzene ring and a cyclohexane.