Three-dimensional semiconductor device having vertical misalignment
A multi-stack semiconductor device includes: a lower-stack transistor structure including a lower active region and a lower gate structure, the lower active region including a lower channel structure, and the lower gate structure surrounding the lower channel structure; an upper-stack transistor structure vertically stacked above the lower-stack transistor structure, and including an upper active region and an upper gate structure, the upper active region including an upper channel structure, and the upper gate structure surrounding the upper channel structure; and at least one gate contact plug contacting a top surface of the lower gate structure, wherein the lower gate structure and the upper gate structure have a substantially same size in a plan view, and wherein the lower gate structure is not entirely overlapped by the upper gate structure in a vertical direction.
1. A multi-stack semiconductor device comprising:
a lower-stack transistor structure comprising a lower active region and a lower gate structure, the lower active region comprising a lower channel structure, and the lower gate structure surrounding the lower channel structure;
an upper-stack transistor structure vertically stacked above the lower-stack transistor structure, and comprising an upper active region and an upper gate structure, the upper active region comprising an upper channel structure, and the upper gate structure surrounding the upper channel structure; and
at least one gate contact plug contacting the upper gate structure and a top surface of the lower gate structure,
wherein the lower gate structure and the upper gate structure have a substantially same size in a plan view, and
wherein the lower gate structure is not entirely overlapped by the upper gate structure in a vertical direction.
2. The multi-stack semiconductor device of claim 1 ,
wherein the gate contact plug contacts a side surface of the upper gate structure.
3. The multi-stack semiconductor device of claim 2 ,
wherein the gate contact plug connects the lower gate structure to the upper gate structure at an outside of the lower active region and the upper active region in the plan view.
4. The multi-stack semiconductor device of claim 1 ,
wherein the lower active region and the upper active region have a same size in a plan view.
5. The multi-stack semiconductor device of claim 4 ,
wherein the lower active region is not entirely vertically overlapped by the upper active region.
6. The multi-stack semiconductor device of claim 5 ,
wherein the gate contact plug contacts a side surface of the upper gate structure.
7. The multi-stack semiconductor device of claim 6 ,
wherein the gate contact plug connects the lower gate structure to the upper gate structure at an outside of the lower active region and the upper active region in the plan view.
8. The multi-stack semiconductor device of claim 1 ,
wherein the lower-stack transistor structure comprises a plurality of lower nanosheet layers as the lower channel structure, and
wherein the upper-stack transistor structure comprises a plurality of upper nanosheet layers as the upper channel structure or a different type of channel structure.
9. The multi-stack semiconductor device of claim 8 ,
wherein the lower active region is not entirely overlapped by the upper active region in the vertical direction.
10. The multi-stack semiconductor device of claim 9 ,
wherein the gate contact plug contacts a side surface of the upper gate structure.
11. The multi-stack semiconductor device of claim 10 ,
wherein the gate contact plug connects the lower gate structure to the upper gate structure at an outside of the lower active region and the upper active region in the plan view.
12. The multi-stack semiconductor device of claim 1 ,
wherein the lower-stack transistor structure comprises a plurality of lower nanosheet layers as the lower channel structure, and
wherein the upper-stack transistor structure comprises a plurality of fin structures as the upper channel structure to form a fin-field effect transistor (finFET).
13. The multi-stack semiconductor device of claim 12 ,
wherein the lower active region is not entirely overlapped by the upper active region in the vertical direction.
14. The multi-stack semiconductor device of claim 13 ,
wherein the gate contact plug contacts a side surface of the upper gate structure, and
wherein the gate contact plug connects the lower gate structure to the upper gate structure at an outside of the lower active region and the upper active region in the plan view.
15. A multi-stack semiconductor device comprising:
a lower-stack transistor structure comprising a lower active region and a lower gate structure, the lower active region comprising a lower channel structure, and the lower gate structure surrounding the lower channel structure;
an upper-stack transistor structure vertically stacked above the lower-stack transistor structure, and comprising an upper active region and an upper gate structure, the upper active region comprising an upper channel structure, and the upper gate structure surrounding the upper channel structure;
at least one gate contact plug contacting a top surface of the lower gate structure,
wherein the lower gate structure and the upper gate structure have a same size in a plan view, and
wherein the upper gate structure is formed to have a predetermined offset with respect to the lower gate structure in at least one of a first direction and a second direction in the plan view, the first direction and the second direction being perpendicular to a vertical direction.
16. The multi-stack semiconductor device of claim 15 ,
wherein the upper gate structure is formed to have the predetermined offset only in the first direction among the first direction and the second direction.
17. The multi-stack semiconductor device of claim 16 ,
wherein the upper active region is formed to have the predetermined offset with respect to the lower active region in the at least one of the first direction and the second direction in the plan view.
18. The multi-stack semiconductor device of claim 16 ,
wherein the gate contact plug contacts a side surface of the upper gate structure, and
wherein the gate contact plug connects the lower gate structure to the upper gate structure at an outside of the lower active region and the upper active region in the plan view.
19. The multi-stack semiconductor device of claim 18 ,
wherein the lower-stack transistor structure comprises a plurality of lower nanosheet layers as the lower channel structure, and
wherein the upper-stack transistor structure comprises a plurality of upper nanosheet layers as the upper channel structure or a different type of channel structure.
20. A method of forming a multi-stack semiconductor device, the method comprising:
forming a lower-stack transistor structure comprising a lower active region and a lower gate structure;
forming an upper-stack transistor structure, comprising an upper active region and an upper gate structure, on the lower-stack transistor structure with a substrate interposed such that the upper gate structure is formed to have a predetermined offset with respect to the lower gate structure in at least one of a first direction and a second direction in a plan view, the first direction and the second direction being perpendicular to a vertical direction; and
connecting a gate contact plug directly on a top surface of the lower gate structure through a space provided by the predetermined offset between the lower gate structure and the upper gate structure.