Plasma resistant process chamber lid

1. A lid for a process chamber, comprising:

at least one surface comprising a first ceramic material, wherein the first ceramic material comprises Y 3 Al 5 O 12 , wherein the first ceramic material conformally covers an underlying surface with a uniform thickness having a thickness variation of less than about +/−20%, wherein the first ceramic material is a crystalline single phase material or a crystalline multi-phase material, and wherein the at least one surface comprising the first ceramic material has a porosity of less than 1%; and

an internal region comprising the underlying surface beneath the at least one surface comprising a second ceramic material, wherein the second ceramic material is a crystalline multi-phase material formed from a combination of Al 2 O 3 and ZrO 2 , and wherein the internal region comprising the second ceramic material has a porosity of less than 1%.

2. The lid of claim 1 , wherein the second ceramic material has one or more crystalline phases selected from the group consisting of hexagonal, tetragonal, cubic, and monoclinic.

3. The lid of claim 1 , wherein the first ceramic material is a crystalline single phase material.

4. The lid of claim 1 , wherein the first ceramic material is a crystalline multi-phase material.

5. The lid of claim 1 , wherein a first lattice structure of the first ceramic material differs from a second lattice structure of the second ceramic material.

6. The lid of claim 1 , wherein the lid comprises a plurality of layers comprising the first ceramic material.

7. The lid of claim 1 , wherein the lid comprises a plurality of layers comprising the second ceramic material.

8. The lid of claim 1 , wherein the at least one surface comprising the first ceramic material has a porosity of less than about 0.01%.

9. The lid of claim 1 , wherein the lid is a ceramic lid.

10. A chamber component for a process chamber, the chamber component comprising:

at least one surface comprising a first ceramic material, wherein the first ceramic material comprises Y 3 Al 5 O 12 , wherein the first ceramic material conformally covers an underlying surface with a uniform thickness having a thickness variation of less than about +/−20%, wherein the first ceramic material is a crystalline single phase material or a crystalline multi-phase material, and wherein the at least one surface comprising the first ceramic material has a porosity of less than 1%; and

an internal region comprising the underlying surface beneath the at least one surface comprising a second ceramic material, wherein the second ceramic material is a crystalline multi-phase material formed from a combination of Al 2 O 3 and ZrO 2 , and wherein the internal region comprising the second ceramic material has a porosity of less than 1%.

11. The chamber component of claim 10 , wherein the chamber component is a ceramic chamber component.

12. The chamber component of claim 10 , wherein the second ceramic material comprises one or more crystalline phases selected from the group consisting of hexagonal, tetragonal, cubic, and monoclinic.

13. The chamber component of claim 10 , wherein the first ceramic material is a crystalline single phase material.

14. The chamber component of claim 10 , wherein a first lattice structure of the first ceramic material differs from a second lattice structure of the second ceramic material.

15. The chamber component of claim 10 , wherein the chamber component comprises at least one of a) a plurality of layers comprising the first ceramic material or b) a plurality of layers comprising the second ceramic material.

16. The chamber component of claim 10 , wherein the at least one surface comprising the first ceramic material has a porosity of less than about 0.01%.

17. The chamber component of claim 10 , wherein the first ceramic material is a crystalline multi-phase material.