Zone-controlled rare-earth oxide ALD and CVD coatings
Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.
1. An article comprising a plasma resistant protective coating on a surface of the article, wherein the plasma resistant protective coating comprises:
a stack of alternating layers of crystalline rare-earth oxide layers and crystalline metal oxide layers, wherein:
a first layer in the stack of alternating layers is a crystalline rare-earth oxide layer,
the crystalline rare-earth oxide layers have a thickness of about 500-5000 angstroms,
the crystalline metal oxide layers have an atomic crystalline phase different from a phase of the crystalline rare-earth oxide layers,
the crystalline metal oxide layers have a thickness of about 1-500 angstroms,
the crystalline metal oxide layers inhibit grain growth of the crystalline rare-earth oxide layers, and
the crystalline metal oxide layers comprise one of:
a) a mixture of about 65 wt % of zirconium oxide in a tetragonal phase and about 35 wt % of zirconium oxide in a monoclinic phase,
b) a mixture of about 70 wt % of a multi-elemental oxide of zirconium yttrium oxide in a first cubic phase and about 30 wt % of yttrium oxide in a second cubic phase, wherein the first cubic phase and the second cubic phase have a lattice structure that is different from a lattice structure of the crystalline rare earth oxide layers, or
c) a mixture of about 30 wt % of a multi-elemental oxide of zirconium yttrium oxide in a first cubic phase and about 70 wt % of yttrium oxide in a second cubic phase.
2. The article of claim 1 , wherein the crystalline rare-earth oxide layer comprises crystalline yttrium oxide in a cubic phase.
3. The article of claim 1 , wherein the plasma resistant protective coating has a thickness ranging from about 500 nm to about 10 μm, and wherein the plasma resistant protective coating is uniform, conformal, and porosity-free.
4. The article of claim 1 , wherein the article is a chamber component selected from the group consisting of: an electrostatic chuck, a nozzle, a gas distribution plate, a showerhead, an electrostatic chuck component, a chamber wall, a liner, a liner kit, a gas line, a lid, a chamber lid, a nozzle, a single ring, a processing kit ring, a base, a shield, a plasma screen, a flow equalizer, a cooling base, a chamber viewport, a bellow, a faceplate, and selectivity modulating device.
5. The article of claim 1 , wherein the thickness of one of the crystalline metal oxide layers is lower than the thickness of one of the crystalline rare-earth oxide layers.
6. The article of claim 1 , wherein a thickness ratio of thickness of the crystalline rare-earth oxide layers to thickness of the crystalline metal oxide layers is about 10:1 to about 500:1.
7. The article of claim 1 , wherein the crystalline metal oxide layers inhibit grain growth of the crystalline rare-earth oxide layers such that all grains in the crystalline rare-earth oxide layers have a grain size that is below 100 nm in length and that is below 200 nm in width.
8. The article of claim 1 , wherein the crystalline metal oxide layers comprise:
the mixture of about 65 wt % of zirconium oxide in the tetragonal phase and about 35 wt % of zirconium oxide in the monoclinic phase.
9. The article of claim 1 , wherein the crystalline metal oxide layers comprise:
the mixture of about 70 wt % of a multi-elemental oxide of zirconium yttrium oxide in the first cubic phase and about 30 wt % of yttrium oxide in the second cubic phase.
10. The article of claim 1 , wherein the crystalline metal oxide layers comprise:
the mixture of about 30 wt % of the multi-elemental oxide of zirconium yttrium oxide in the first cubic phase and about 70 wt % of yttrium oxide in the second cubic phase.