IP Library › Granted Patent US 12,057,401
Granted Patent B2
US 12,057,401 · App. 18/226,784 · Granted Aug 6, 2024

Semiconductor device having contact plug connected to gate structure on PMOS region

Inventors: Shih-Cheng Chen (Tainan, TW); Li-Hsuan Ho (Kaohsiung, TW); Tsuo-Wen Lu (Kaohsiung, TW); Shih-Hao Liang (Tainan, TW); Tsung-Hsun Wu (Kaohsiung, TW); Po-Jen Chuang (Kaohsiung, TW); Chi-Mao Hsu (Tainan, TW)
Assignee: UNITED MICROELECTRONICS CORP.
H01L23/535H01L21/28088H01L21/82385H01L21/823871H01L23/528H01L27/092H01L29/4966H01L29/66545
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Quick Facts
Patent No.
US 12,057,401
App. No.
18/226,784
Granted
Aug 6, 2024
Kind
B2
Abstract

A semiconductor device including a substrate having a NMOS region and a PMOS region; a metal gate extending continuously along a first direction from the NMOS region to the PMOS region on the substrate; a first source/drain region extending along a second direction adjacent to two sides of the metal gate on the NMOS region; a second source/drain region extending along the second direction adjacent to two sides of the metal gate on the PMOS region; a first contact plug landing on the second source/drain region adjacent to one side of the metal gate; a second contact plug landing on the second source/drain region adjacent to another side of the metal gate; and a third contact plug landing directly on a portion of the metal gate on the PMOS region and between the first contact plug and the second contact plug.

Claims (8)

1. A semiconductor device, comprising:

a substrate having a NMOS region and a PMOS region;

a metal gate extending continuously along a first direction from the NMOS region to the PMOS region on the substrate;

a first source/drain region extending along a second direction adjacent to two sides of the metal gate on the NMOS region;

a second source/drain region extending along the second direction adjacent to two sides of the metal gate on the PMOS region;

a first contact plug landing on the second source/drain region adjacent to one side of the metal gate;

a second contact plug landing on the second source/drain region adjacent to another side of the metal gate; and

a third contact plug landing directly on a portion of the metal gate on the PMOS region not between the first source/drain region and the second source/drain region, away from a boundary separating the NMOS region and the PMOS region, and near an end of the metal gate on the PMOS region.

Priority Claims (1)
CN 201911033932.5 · Oct 28, 2019 · national
Continuity (3)
Continuation 17493852 · Oct 5, 2021
Continuation 16695028 · Nov 25, 2019
Related Publication 20230369227A1 · Nov 16, 2023
Cited By (1)
US 12,438,092