IP Library › Granted Patent US 12,062,629
Granted Patent B2
US 12,062,629 · App. 15/691,941 · Granted Aug 13, 2024

Multiband QAM interface for slab waveguide

Inventors: Huan-Neng Chen (Taichung, TW); Chewn-Pu Jou (Hsinchu, TW); Feng Wei Kuo (Hsinchu, TW); Lan-Chou Cho (Hsinchu, TW); Wen-Shiang Liao (Miaoli, TW); Yanghyo Kim (Los Angeles, CA)
Assignees: Taiwan Semiconductor Manufacturing Company Limited; The University of California, Los Angeles (UCLA)
H01L23/66G02B6/102G02B6/4274G02B6/43G02F1/011G02F1/0121G02F1/025H01L23/552H01P3/081H01P3/16H04B10/40
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Quick Facts
Patent No.
US 12,062,629
App. No.
15/691,941
Granted
Aug 13, 2024
Kind
B2
Abstract

Systems and methods are provided for an integrated chip. An integrated chip includes a package substrate including a plurality of first layers and a plurality of second layers, each second layer being disposed between a respective adjacent pair of the first layers. A transceiver unit is disposed above the package substrate. A waveguide unit including a plurality of waveguides having top and bottom walls formed in the first layers of the package substrate and sidewalls formed in the second layers of the package substrate.

Claims (67)

1. An integrated chip comprising:

a package substrate including a plurality of first layers and a plurality of second layers, each second layer being disposed between a respective adjacent pair of the first layers;

a transceiver unit disposed above the package substrate and including a transmitter and a receiver;

a waveguide unit including a plurality of waveguides having a length extending in a first direction, arranged along a second direction transverse to the first direction, and including top and bottom walls formed in the first layers of the package substrate and sidewalls formed in the second layers of the package substrate,

wherein the top and bottom walls are of a different material than the first and second layers, and

wherein the bottom wall of a first waveguide of the plurality of waveguides has a wider width than a waveguide opening of the first waveguide, serves as the top wall of a second waveguide of the plurality of waveguides, and is substantially the same width as a waveguide opening of the second waveguide;

a first coupling unit including a coupler aligned with the top wall of the first waveguide in the first direction and misaligned with the waveguide opening of the first waveguide in the first direction;

a second coupling unit including a coupler aligned with the top wall of the first waveguide in the first waveguide and misaligned with the waveguide opening of the first waveguide in the first direction, wherein the top wall of the first waveguide is disposed between the first and second coupling units and the first and second coupling units define a distance therebetween shorter than the length of the second waveguide;

a first shield unit disposed between the first coupling unit and the waveguide opening of the second waveguide and coupled between the transmitter and a top surface of the bottom wall of the first waveguide, wherein the first coupling unit is disposed between the waveguide opening of the first waveguide and the first shield unit; and

a second shield unit disposed between the second coupling unit and the waveguide opening of the second waveguide and coupled between the receiver and the top surface of the bottom wall of the first waveguide, wherein the second coupling unit is disposed between the waveguide opening of the first waveguide and the second shield unit,

wherein the waveguide unit is configured to convey electromagnetic radiations along the plurality of waveguides and to transmit frequencies outside of a visible spectrum,

wherein the plurality of waveguides are stacked along a same center line in a direction transverse to a direction of a length of the package substrate to narrow an area occupied by the waveguide unit,

wherein the plurality of waveguides have increasing widths in a direction from a top of the waveguide unit to a bottom of the waveguide unit, and

wherein each of the plurality of waveguides is a dielectric waveguide having a dielectric constant that is larger than a dielectric constant of the plurality of first layers and a dielectric constant of the plurality of second layers.

2. The integrated chip of claim 1 , wherein:

the first coupling unit is configured to couple a first electrical signal generated by the transceiver unit to the waveguide unit as an electromagnetic radiation; and

the second coupling unit is configured to couple the electromagnetic radiation from the waveguide unit as a second electrical signal to the transceiver unit.

3. The integrated chip of claim 1 , wherein the first shield unit is configured to minimize crosstalk between the plurality of waveguides, the first shield unit coupling the waveguide unit to a ground.

4. The integrated chip of claim 1 , wherein each of the first and second coupling units are disposed between the waveguide unit and a respective one of the first and second shield units.

5. The integrated chip of claim 1 , further comprising an interposer disposed between the package substrate and the transceiver unit and having a plurality of interconnects.

6. The integrated chip of claim 1 , wherein at least one of the plurality of waveguides includes a conductive material.

7. The integrated chip of claim 1 , wherein a cross-sectional shape of each waveguide is the same.

8. The integrated chip of claim 1 , wherein a width of each waveguide is about 5 to about 15 times a height thereof.

9. The integrated chip of claim 1 , wherein the dielectric waveguide comprises silicon nitride or silicon carbide.

10. The integrated chip of claim 1 , wherein the dielectric waveguide comprises fluorine-doped silicon dioxide, a carbon-doped silicon dioxide, or a porous silicon dioxide.

11. The integrated chip of claim 1 , wherein the transmitter is configured to generate a first electrical signal, the integrated chip further comprising:

a first interposer, wherein the first coupling unit is configured to receive the first electrical signal through the first interposer and to couple the first electrical signal to the waveguide unit as a first electromagnetic radiation.

12. The integrated chip of claim 11 , wherein the first interposer includes a metal line that extends in the first direction and a via that extends in the second direction.

13. The integrated chip of claim 11 , wherein the package substrate further includes a first interconnect, the integrated chip further comprising a bump having a substantially rounded cross section and interconnecting the first interposer and the first interconnect.

14. The integrated circuit of claim 11 , wherein the transceiver unit further includes a second transmitter configured to generate a second electrical signal, the integrated chip further comprising:

a second interposer;

a second coupler configured to receive the second electrical signal through the second interposer and to couple the second electrical signal to the waveguide unit as a second electromagnetic radiation; and

a shield between the second coupler and a waveguide opening of a third waveguide, connecting the waveguide unit to a ground, and including a plurality of metal lines that extend in the first direction and a plurality of vias that extend in the second direction.

15. The integrated chip of claim 1 , wherein:

the coupler of the first coupling unit is configured to couple an electrical signal between the transceiver unit and the first waveguide,

the coupler of the first coupling unit is horizontally closer to a side of the top wall of the first waveguide than a vertical projection of a corresponding side of the bottom wall of the first waveguide,

a shield of the first shield unit is configured to minimize crosstalk between the first and second waveguides, includes a metal line and a via, and coupled between the bottom wall of the first waveguide and electrical ground, and

the coupler of the first coupling unit is between the top wall of the first waveguide and the shield of the first shield unit.

16. The integrated chip of claim 1 , wherein the first coupler of the first coupling unit is in the same layer of the package substrate as the top wall of first waveguide and is in a different layer of the package substrate than the sidewall of the first waveguide.

17. The integrated circuit of claim 1 , wherein the coupler of the first coupling unit includes a transducer.

18. The integrated circuit of claim 1 , wherein the coupler of the first coupling unit includes an antenna.

19. An integrated chip comprising:

a package substrate;

a transceiver unit disposed above the package substrate and including a transmitter and a receiver; and

a waveguide unit formed in the package substrate and including a plurality of waveguides having a length extending in a first direction, arranged along a second direction transverse to the first direction, and including top and bottom walls, wherein the top and bottom walls are of a different material than the first and second layers, wherein the bottom wall of a first waveguide of the plurality of waveguides has a wider width than a waveguide opening of the first waveguide, serves as the top wall of a second waveguide of the plurality of waveguides, and is substantially the same width as a waveguide opening of the second waveguide;

a first coupling unit including a coupler aligned with the top wall of the first waveguide in the first direction and misaligned with the waveguide opening of the first waveguide in the first direction;

a second coupling unit including a coupler aligned with the top wall of the first waveguide in the first waveguide and misaligned with the waveguide opening of the first waveguide in the first direction, wherein the top wall of the first waveguide is disposed between the first and second coupling units and the first and second coupling units define a distance therebetween shorter than the length of the second waveguide;

a first shield unit disposed between the first coupling unit and the waveguide opening of the second waveguide and coupled between the transmitter and a top surface of the bottom wall of the first waveguide, wherein the first coupling unit is disposed between the waveguide opening of the first waveguide and the first shield unit; and

a second shield unit disposed between the second coupling unit and the waveguide opening of the second waveguide and coupled between the receiver and the top surface of the bottom wall of the first waveguide, wherein the second coupling unit is disposed between the waveguide opening of the first waveguide and the second shield unit,

wherein the waveguide unit is configured to convey electromagnetic radiations along the plurality of waveguides and to transmit frequencies outside of a visible spectrum,

wherein the plurality of waveguides are stacked along a same center line in a direction transverse to a direction of a length of the package substrate to narrow an area occupied by the waveguide unit,

wherein the plurality of waveguides have increasing widths in a direction from a top of the waveguide unit to a bottom of the waveguide unit, and

wherein each of the plurality of waveguides is a dielectric waveguide having a dielectric constant that is larger than a dielectric constant of the package substrate.

20. An integrated chip comprising:

a package substrate including a plurality of first layers and a plurality of second layers, each second layer being disposed between a respective adjacent pair of the first layers;

a transceiver unit disposed above the package substrate and including a transmitter and a receiver;

a waveguide unit including a plurality of waveguides having a length extending in a first direction, arranged along a second direction transverse to the first direction, and including top and bottom walls formed in the first layers of the package substrate and sidewalls formed in the second layers of the package substrate,

wherein the top and bottom walls are of a different material than the first and second layers, and

wherein the bottom wall of a first waveguide of the plurality of waveguides has a wider width than a waveguide opening of the first waveguide, serves as the top wall of a second waveguide of the plurality of waveguides, and is substantially the same width as a waveguide opening of the second waveguide;

a first coupling unit including a coupler aligned with the top wall of the first waveguide in the first direction and misaligned with the waveguide opening of the first waveguide in the first direction;

a second coupling unit including a coupler aligned with the top wall of the first waveguide in the first waveguide and misaligned with the waveguide opening of the first waveguide in the first direction, wherein the top wall of the first waveguide is disposed between the first and second coupling units and the first and second coupling units define a distance therebetween shorter than the length of the second waveguide;

a first shield unit disposed between the first coupling unit and the waveguide opening of the second waveguide and coupled between the transmitter and a top surface of the bottom wall of the first waveguide, wherein the first coupling unit is disposed between the waveguide opening of the first waveguide and the first shield unit; and

a second shield unit disposed between the second coupling unit and the waveguide opening of the second waveguide and coupled between the receiver and the top surface of the bottom wall of the first waveguide, wherein the second coupling unit is disposed between the waveguide opening of the first waveguide and the second shield unit,

wherein the waveguide unit is configured to convey electromagnetic radiations along the plurality of waveguides and to transmit frequencies outside of a visible spectrum,

wherein the plurality of waveguides are stacked along a same center line in a direction transverse to a direction of a length of the package substrate to narrow an area occupied by the waveguide unit,

wherein the plurality of waveguides have increasing widths in a direction from a top of the waveguide unit to a bottom of the waveguide unit, and

wherein each of the plurality of waveguides is a dielectric waveguide having a dielectric constant that is larger than a dielectric constant of the plurality of first layers and a dielectric constant of the plurality of second layers.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 9, 2025
From: CHEN, HUAN-NENG; JOU, CHEWN-PU; KUO, FENG WEI; CHO, LAN-CHOU; LIAO, WEN-SHIANG; KIM, YANGHYO
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED; THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 071643/0185 →
CORRECTIVE ASSIGNMENT TO CORRECT THE RECEIVING PARTY DATA PREVIOUSLY RECORDED AT REEL: 43460 FRAME: 160. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jul 3, 2025
From: CHEN, HUAN-NENG; JOU, CHEWN-PU; KUO, FENG WEI; CHO, LAN-CHOU; LIAO, WEN-SHIANG; KIM, YANGHYO
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED; THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 071815/0020 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 31, 2017
From: CHEN, HUAN-NENG; JOU, CHEWN-PU; KUO, FENG WEI; CHO, LAN-CHOU; LIAO, WEN-SHIANG; KIM, YANGHYO
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED; THE UNIVERSITY OF CALIFORNIA, LOS ANGELES (UCLA)
Reel/Frame 043460/0160 →
Continuity (5)
Continuation In Part 15258348 · Sep 7, 2016
Continuation In Part 14692794 · Apr 22, 2015
Continuation In Part 14483247 · Sep 11, 2014
Provisional Application 62451258 · Jan 27, 2017
Related Publication 20170365563A1 · Dec 21, 2017