Method for producing an advanced substrate for hybrid integration
A method of forming a substrate comprises providing a receiver substrate and a donor substrate successively comprising: a carrier substrate, a sacrificial layer, which can be selectively etched in relation to an active layer, and a silicon oxide layer, which is arranged on the active layer. A cavity is formed in the oxide layer to form a first portion that has a first thickness and a second portion that has a second thickness greater than the first thickness. The cavity is filled with a polycrystalline silicon filling layer to form a second free surface that is continuous and substantially planar. The receiver substrate and the donor substrate are assembled at the second free surface, and the carrier substrate is eliminated while preserving the active layer and the sacrificial layer.
1. A substrate, comprising:
a receiver substrate;
an active layer comprising single-crystal semiconductor material; and
an electrically insulating silicon oxide layer interposed between the active layer and the receiver substrate; and
a polycrystalline silicon layer on the receiver substrate, the polycrystalline silicon layer coated with the electrically insulating silicon oxide layer so as to define a first portion of the electrically insulating silicon oxide layer having a first thickness and interposed between the polycrystalline silicon layer and the active layer, and a second portion of the electrically insulating silicon oxide layer having a second thickness greater than the first thickness, the second portion being located between the receiver substrate and the active layer.
2. The substrate of claim 1 , further comprising an additional layer comprising polycrystalline silicon, the additional layer interposed between the receiver substrate and an assembly formed by the electrically insulating silicon oxide layer and the polycrystalline silicon layer.
3. The substrate of claim 2 , further comprising an additional electrically insulating layer interposed between the additional layer and the receiver substrate.
4. The substrate of claim 3 , wherein the receiver substrate comprises an epitaxially grown and doped layer configured to form microelectronic components in the epitaxially grown and doped layer.
5. The substrate of claim 4 , wherein the receiver substrate comprises integrated circuits.
6. The substrate of claim 3 , wherein the receiver substrate comprises integrated circuits.
7. The substrate of claim 1 , wherein the active layer comprises silicon of silicon-germanium.
8. The substrate of claim 1 , wherein a thickness of the active layer is between 5 nm and 500 nm.
9. The substrate of claim 8 , wherein the thickness of the active layer is not uniform.
10. The substrate of claim 1 , wherein each of the first thickness in the first portion of the electrically insulating silicon oxide layer and the second thickness in the second portion of the electrically insulating silicon oxide layer is between 10 nm and 500 nm.
11. The substrate of claim 1 , wherein at least a portion of the polycrystalline silicon layer is configured to function as a trapping layer.
12. The substrate of claim 1 , wherein at least a portion of the polycrystalline silicon layer is configured to function as a conductive layer.
13. The substrate of claim 1 , wherein at least a first portion of the polycrystalline silicon layer is configured to function as a trapping layer, and at least a second portion of the polycrystalline silicon layer is configured to function as a conductive layer.
14. The substrate of claim 1 , further comprising at least one fully depleted silicon on insulator (FDSOI) device on the active layer over the first portion of the electrically insulating silicon oxide layer having the first thickness, and at least one radiofrequency (RF) device on the active layer over the second portion of the electrically insulating silicon oxide layer having the second thickness.
15. The substrate of claim 1 , further comprising a sacrificial layer on the active layer, the sacrificial layer comprising a material capable of being selectively etched relative to the active layer.
16. The substrate of claim 1 , wherein the active layer comprises an epitaxial layer.