Method of manufacturing EUV photo masks
In a method of manufacturing a photo mask, an etching mask layer having circuit patterns is formed over a target layer of the photo mask to be etched. The photo mask includes a backside conductive layer. The target layer is etched by plasma etching, while preventing active species of plasma from attacking the backside conductive layer.
1. A method of manufacturing a photo mask, the method comprising:
forming an etching mask layer having patterns over a target layer of the photo mask to be etched;
covering an edge portion of the photo mask with a frame shaped etching hard cover having an opening; and
etching the target layer by plasma etching through the opening.
2. The method of claim 1 , wherein during the etching comprises preventing active species of plasma from attacking a backside of the photo mask.
3. The method of claim 1 , wherein the frame shaped cover layer is distanced from the etching mask layer.
4. The method of claim 1 , wherein the frame shaped cover layer is in contact with the etching mask layer.
5. The method of claim 1 , wherein the frame shaped cover layer is in contact with the target layer to be etched.
6. The method of claim 1 , wherein:
the etching mask layer is a resist pattern, and
the target layer is a hard mask layer on an absorber layer of the photo mask.
7. The method of claim 1 , wherein:
the etching mask pattern is a hard mask pattern, and
the target layer is an absorber layer of the photo mask.
8. The method of claim 1 , wherein:
the etching mask layer is a resist pattern, and
the target layer includes an absorber layer, a capping layer and a reflective multilayer disposed over a substrate of the photo mask.
9. A method of manufacturing a photo mask, comprising:
forming a circuit pattern in an absorber layer of a mask blank, the mask blank including a substrate, a reflective multilayer on the substrate, a capping layer on the reflective multilayer and an absorber layer;
forming an etching mask layer having a black border pattern over the absorber layer;
covering an edge portion of the absorber layer with an etching hard cover having an opening, the opening having a rectangular shape; and
etching the absorber layer, the capping layer and the reflective multilayer by plasma etching through the opening, while preventing active species of plasma from attacking a backside of the mask blank.
10. The method of claim 9 , wherein the cover layer is separated from the etching mask layer.
11. The method of claim 9 , wherein the cover layer is in contact with the etching mask layer.
12. The method of claim 9 , wherein the etching hard cover is made of ceramic.
13. The method of claim 12 , wherein the etching hard cover has a frame shape having the opening and a frame portion defining the opening and a side frame from which the frame portion extends.
14. An etching apparatus for patterning a reflective photo mask, comprising:
a mask stage; and
an electric chuck to hold the reflective photo mask, wherein:
the electric chuck including a cathode and the mask stage includes a capture ring surrounding the electric chuck, and
a cathode protrusion is provided on the cathode.
15. The etching apparatus of claim 14 , wherein a stage protrusion is provided at a flat surface of the capture ring of the mask stage.
16. The etching apparatus of claim 14 , wherein the stage protrusion is an O-ring disposed in a groove formed in the capture ring.
17. The etching apparatus of claim 14 , wherein the stage protrusion is a protruding part of the capturing ring.
18. The etching apparatus of claim 14 , wherein the electric chuck is configured to move up and down relative to the capture ring.
19. The etching apparatus of claim 14 , wherein the stage protrusion is configured to contact a part of a substrate of the reflective photo mask where no conductive layer is formed.
20. The etching apparatus of claim 14 , wherein the capture ring is configured such that when the reflective photo mask is placed on the mask stage, a top of the capture ring is located above a top of the reflective photo mask.