Microelectronic assemblies with inductors in direct bonding regions
Disclosed herein are microelectronic assemblies including microelectronic components that are coupled together by direct bonding, as well as related structures and techniques. For example, in some embodiments, a microelectronic assembly may include a first microelectronic component and a second microelectronic component coupled to the first microelectronic component by a direct bonding region, wherein the direct bonding region includes at least part of an inductor.
1. A microelectronic assembly, comprising:
a first microelectronic component having a first direct bonding interface, wherein the first microelectronic component includes an inductor trace, and an interface portion of the inductor trace extends along the first direct bonding interface of the first microelectronic component; and
a second microelectronic component having a second direct bonding interface, wherein at least a portion of the second direct bonding interface is in direct contact with the interface portion of the inductor trace.
2. The microelectronic assembly of claim 1 , wherein the interface portion of the inductor trace is part of a first turn of the inductor trace, and at least a portion of a second turn of the inductor trace is in a metallization stack of the first microelectronic component.
3. The microelectronic assembly of claim 1 , wherein the interface portion of the inductor trace is in contact with dielectric material of the second direct bonding interface of the second microelectronic component.
4. The microelectronic assembly of claim 1 , wherein the interface portion of the inductor trace is in contact with conductive material of the second direct bonding interface of the second microelectronic component.
5. The microelectronic assembly of claim 1 , wherein the inductor trace is a first inductor trace, the second microelectronic component includes a second inductor trace, and the first inductor trace and the second inductor trace are parts of a transformer.
6. The microelectronic assembly of claim 1 , wherein the interface portion of the inductor trace includes segments of the inductor trace that alternate with segments of the inductor trace in a metallization stack of the first microelectronic component.
7. The microelectronic assembly of claim 1 , wherein the inductor trace has a coil structure.
8. The microelectronic assembly of claim 1 , wherein the interface portion of the inductor trace includes portions of the inductor trace that are electrically coupled by a portion of the inductor trace in a metallization stack of the first microelectronic component.
9. The microelectronic assembly of claim 1 , wherein the first microelectronic component includes a die.
10. A microelectronic assembly, comprising:
a first microelectronic component; and
a second microelectronic component, wherein the first microelectronic component and the second microelectronic component are coupled by a direct bonding region that directly joins a face of the first microelectronic component and a face of the second microelectronic component, and the direct bonding region includes at least part of a transformer.
11. The microelectronic assembly of claim 10 , wherein the direct bonding region includes metal-to-metal bonds and dielectric-to-dielectric bonds.
12. The microelectronic assembly of claim 10 , wherein the transformer includes a first inductor and a second inductor, the first inductor is included in the first microelectronic component, and the second inductor is included in the second microelectronic component.
13. The microelectronic assembly of claim 12 , wherein an interface portion of the first inductor is at a direct bonding interface of the first microelectronic component.
14. The microelectronic assembly of claim 13 , wherein an interface portion of the second inductor is at a direct bonding interface of the second microelectronic component.
15. The microelectronic assembly of claim 14 , wherein the interface portion of the second inductor does not contact the interface portion of the first inductor.
16. The microelectronic assembly of claim 12 , wherein an interface portion of the first inductor includes segments of the first inductor that alternate with segments of the first inductor in a metallization stack of the first microelectronic component.
17. The microelectronic assembly of claim 12 , wherein an interface portion of the first inductor includes portions of the first inductor that are electrically coupled by a portion of the first inductor in a metallization stack of the first microelectronic component.
18. The microelectronic assembly of claim 12 , wherein the first inductor has a coil structure.
19. A system, comprising:
a circuit board; and
a microelectronic assembly, communicatively coupled to the circuit board, wherein the microelectronic assembly includes at least part of a transformer in a direct bonding region of the microelectronic assembly, the direct bonding region directly coupling two microelectronic components of the microelectronic assembly.
20. The system of claim 19 , wherein the circuit board is a motherboard.