Graphene structure and method of forming the graphene structure
A graphene structure and a method of forming the graphene structure are provided. The graphene structure includes directly grown graphene that is directly grown on a surface of a substrate and has controlled surface energy.
1. A graphene structure comprising:
a substrate,
a material of the substrate including a semiconductor material, a metal material, or an inorganic insulating material; and
a directly grown graphene that is directly grown on a surface of the substrate and has a controlled surface energy, wherein
the directly grown graphene has a water contact angle of less than or equal to about 60 degrees with respect to the surface of the substrate, and
the directly grown graphene is directly on the material of the substrate such that the directly grown graphene is in contact with the semiconductor material, the metal material, or the inorganic insulating material of the substrate, and
the directly grown graphene has a domain size of greater than 0 nm and less than or equal to 100 nm.
2. The graphene structure of claim 1 , wherein the controlled surface energy of the directly grown graphene is an increased surface energy of the directly grown graphene.
3. The graphene structure of claim 1 , wherein the directly grown graphene comprises an N component.
4. The graphene structure of claim 1 , further comprising:
a material layer on the directly grown graphene, wherein
the material layer comprises a metal material layer or a dielectric material layer.
5. The graphene structure of claim 1 , wherein the water contact angle of the directly grown graphene is in a range of 20 degrees to 60 degrees with respect to the surface of the substrate.
6. An electronic device comprising:
the graphene structure of claim 1 .
7. The graphene structure of claim 1 , wherein
the directly grown graphene is doped,
a doping concentration in the directly grown graphene is greater than 0% and less than or equal to 5%, and
a dopant in the directly grown graphene includes an N component or a B component, provided the dopant does not include both the N component and the B component.
8. The graphene structure of claim 1 , wherein the metal material includes at least one of Cu, Mo, Ni, Al, W, Ru, Co, Mn, Ti, Ta, Au, Hf, Zr, Zn, Y, Cr, Gd, Rh, Ir, Os, TiN and TaN.
9. A method of forming a graphene structure, the method comprising:
preparing a substrate; and
directly growing graphene on a surface of the substrate using a plasma enhanced chemical vapor deposition (PECVD) process, and the directly growing graphene including changing a surface energy of a graphene to provide a directly grown graphene having a controlled surface energy, wherein
the changing the surface energy of the graphene includes at least one of injecting a doping gas during the directly growing graphene to form plasma of carbon precursor and dopant precursor, performing a plasma treatment after the directly growing graphene, and performing an UV-ozone treatment after the directly growing graphene and
the directly grown graphene has a water contact angle of less than or equal to about 60 degrees with respect to the surface of the substrate,
wherein the directly grown graphene has a domain size of greater than 0 nm and less than or equal to 100 nm.
10. The method of claim 9 , wherein the directly growing graphene includes increasing the surface energy so the directly grown graphene has an increased surface energy.
11. The method of claim 9 , wherein the directly grown graphene comprises an N component.
12. The method of claim 11 , wherein the doping gas contains the N component and is injected into the graphene during the changing the surface energy of the graphene of the directly growing graphene.
13. The method of claim 12 , wherein the doping gas comprises NH 3 .
14. The method of claim 9 , wherein
the changing the surface energy of the graphene includes the performing the plasma treatment after the directly growing graphene, and
the plasma treatment is performed with a gas containing the N component.
15. The method of claim 14 , wherein the gas containing the N component comprises NH 3 .
16. The method of claim 9 , wherein the doping gas contains at least one of NH 3 , BH 3 , B 2 H 6 , AsH 3 , PH 3 , TMSb, TMIn, and TMGa.
17. The method of claim 9 , wherein a doping concentration in the directly grown graphene is greater than 0% and less than or equal to 5% during the injecting the doping gas during directly grown the graphene.
18. The method of claim 9 , wherein
the changing the surface energy of the graphene includes the performing the plasma treatment after the directly growing graphene,
the plasma treatment uses a gas with any one of NH 3 , H 2 , Ar, O 2 , and two or more gas combinations thereof.
19. The method of claim 9 , wherein the directly growing graphene is performed using a reaction gas including a mixed gas of carbon source gas, inert gas, and hydrogen gas.
20. The method of claim 9 , further comprising:
forming a material layer comprising any one of a metal and a dielectric material on the directly grown graphene having the controlled surface energy.
21. The method of claim 20 , wherein
the material layer comprises a metal layer or a dielectric layer,
the metal layer includes at least one of W, Cu, Al, Hf, Zr, Fe, Ru, Rh, Ir, Mo, Co, Cr, V, Nb, Ta, Ti, TaN, and TiN, and
the dielectric layer includes Si nitride or an oxide including at least one of Si, Ge, Al, Hf, Zr, and La.
22. The method of claim 9 , wherein the water contact angle of the directly grown graphene is in a range of 20 degrees to 60 degrees with respect to the surface of the substrate.
23. The method of claim 9 , wherein
the substrate includes a semiconductor material, a metal material, or an inorganic insulating material, and
the metal material includes at least one of W, Al, Hf, Zr, Fe, Ru, Rh, Ir, Mo, Co, Cr, V, Nb, Ta, Ti, TaN, and TiN.
24. A graphene structure comprising:
a substrate; and
a directly grown graphene that is directly grown on a surface of the substrate and has a controlled surface energy, wherein
the directly grown graphene has a water contact angle in a range of 20 degrees to 60 degrees with respect to the surface of the substrate,
the directly grown graphene is doped,
a doping concentration in the directly grown graphene is greater than 0% and less than or equal to 5%, and
a dopant in the directly grown graphene includes an N component or a B component, provided the dopant does not include both the N component and the B component, wherein
the directly grown graphene has a domain size of greater than 0 nm and less than or equal to 100 nm.
25. The graphene structure of claim 1 , wherein
the directly grown graphene comprises the N component.
26. The graphene structure of claim 24 , wherein
the substrate includes a semiconductor material, a metal material, or an inorganic insulating material, and
the metal material includes at least one of Cu, Mo, Ni, Al, W, Ru, Co, Mn, Ti, Ta, Au, Hf, Zr, Zn, Y, Cr, Gd, Rh, Ir, Os, TiN and TaN.